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公开(公告)号：EP3406758A1
公开(公告)日：2018-11-28
申请号：EP17172267.1
申请日：2017-05-22
发明人： BRUCKNER, Michaela , JAROSLAW, Kita , MOOS, Ralf , MÜNCH, Christian , POULAIN, Véronique , SCHUURMAN, Sophie
摘要： The present invention relates to a method of producing a negative temperature coefficient resistor (NTCR) sensor, the method comprising the steps of: providing a mixture comprising uncalcined powder and a carrier gas in an aerosol-producing unit, with the uncalcined powder comprising metal oxide components; forming an aerosol from said mixture and said carrier gas and accelerating said aerosol in a vacuum towards a substrate arranged in a deposition chamber; forming a film of the uncalcined powder of said mixture on said substrate; and transforming the film into a layer of spinel-based material by applying a heat treatment step.
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公开(公告)号：EP3607109A1
公开(公告)日：2020-02-12
申请号：EP18728798.2
申请日：2018-05-03
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