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公开(公告)号:EP0635480B1
公开(公告)日:1997-03-19
申请号:EP94305123.5
申请日:1994-07-13
发明人: Urano,Fumiyoshi, c/o Tokyo Kenkyusho , Oono, Keiji, c/o Tokyo Kenkyusho , Matsuda, Hiroshi, c/o Tokyo Kenkyusho
IPC分类号: C07C69/88 , C07C69/92 , C07C69/017
CPC分类号: C07C69/88 , C07C2603/24
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公开(公告)号:EP0635480A1
公开(公告)日:1995-01-25
申请号:EP94305123.5
申请日:1994-07-13
发明人: Urano,Fumiyoshi, c/o Tokyo Kenkyusho , Oono, Keiji, c/o Tokyo Kenkyusho , Matsuda, Hiroshi, c/o Tokyo Kenkyusho
IPC分类号: C07C69/88 , C07C69/92 , C07C69/017
CPC分类号: C07C69/88 , C07C2603/24
摘要: An anthracene derivative having at least two groups of the formula:
wherein R¹ and R² are independently hydrogen, alkyl, alkoxy, etc., is particular effective for forming an antireflection coating for preventing multiple reflection of exposing light from a highly reflective substrate, etc.摘要翻译: 具有至少两个下式的蒽衍生物:其中R 1和R 2独立地为氢,烷基,烷氧基等,其特征在于形成用于防止多次反射曝光的抗反射涂层 来自高反射性基板的光等
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