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    VORRICHTUNG ZUR ISOLIERUNG UND ABDICHTUNG VON ELEKTRODENHALTERUNGEN IN CVD REAKTOREN
    2.
    发明公开
    VORRICHTUNG ZUR ISOLIERUNG UND ABDICHTUNG VON ELEKTRODENHALTERUNGEN IN CVD REAKTOREN 审中-公开

    公开(公告)号：EP3362586A1

    公开(公告)日：2018-08-22

    申请号：EP16788451.9

    申请日：2016-10-10

    申请人： Wacker Chemie AG

    发明人： RENNSCHMID, Dominik ,  KRAUS, Heinz ,  KUTZA, Christian

    IPC分类号： C23C16/24 ,  C01B33/035 ,  C23C16/44 ,  F16J15/10

    摘要： The invention relates to a device for insulating and sealing electrode holders in CVD reactors, comprising an electrode that is suitable for receiving a filament rod and arranged on an electrode holder made of an electrically-conductive material, mounted in a recess of a base plate, wherein an electrically-insulating ring is provided between the electrode holder and base plate, said ring being made of a material with a specific heat conductivity at room temperature of between 0.2 and 50 W/mK, a minimum flexural strength of greater than 120 MPa, and a specific electrical resistance at room temperature of greater than 10
    9 Ωcm, wherein at least two annular sealing elements are provided for sealing between the electrode holder and base plate, the electrically-insulating ring or the electrode holder or the base plate having at least one groove in which a first sealing element is secured, and at least one second sealing element that is not secured in a groove being provided between the electrically-insulating ring and the base plate or between the electrically-insulating ring and the electrode holder.

    VORRICHTUNG ZUR ISOLIERUNG UND ABDICHTUNG VON ELEKTRODENHALTERUNGEN IN CVD REAKTOREN
    4.
    发明公开
    VORRICHTUNG ZUR ISOLIERUNG UND ABDICHTUNG VON ELEKTRODENHALTERUNGEN IN CVD REAKTOREN 审中-公开
    VORRICHTUNG ZUR ISOLIERUNG UND ABDICHTUNG VON ELEKTRODENHALTERUNGEN在CVD REAKTOREN

    公开(公告)号：EP3221263A1

    公开(公告)日：2017-09-27

    申请号：EP15795134.4

    申请日：2015-11-06

    申请人： Wacker Chemie AG

    发明人： KRAUS, Heinz ,  KUTZA, Christian ,  RENNSCHMID, Dominik

    IPC分类号： C01B33/035 ,  C23C16/458 ,  C23C16/24 ,  C23C16/44

    CPC分类号： C23C16/24 ,  C01B33/035 ,  C23C16/4418 ,  C23C16/4581 ,  C23C16/46

    摘要： The invention relates to a device for insulating and sealing electrode holders in CVD reactors, comprising an electrode, suitable for receiving a filament rod, on an electrode holder made of an electrically conductive material, attached in a recess of a base plate, wherein an electrically insulating ring is provided between the electrode holder and base plate, said ring being made of a material with a specific heat conductivity at room temperature of between 1 and 200 W/mK, a continuous temperature resistance of greater than or equal to 400°C, and a specific electrical resistance at room temperature of greater than 10
    9 Ωcm, wherein at least two ring-shaped sealing elements are provided for sealing between the electrode holder and base plate, wherein the electrically insulating ring or the electrode holder or the base plate have grooves in which the sealing elements are secured, wherein at least one of the sealing elements is secured in a groove formed in the electrode holder or in the base plate, and located above or under the electrically insulating ring.

    摘要翻译： 本发明涉及一种用于绝缘和密封CVD反应器中的电极保持器的装置，该装置包括适于接收细丝棒的电极，在由导电材料制成的电极保持器上，附接在基板的凹槽中， 绝缘环设置在电极夹持器和基板之间，所述环由具有在1和200W / mK之间的室温下的比热导率，大于或等于400℃的连续耐热性， 并且在室温下具有大于109Ωcm的特定电阻，其中提供至少两个环形密封元件用于在电极夹持器和基板之间进行密封，其中电绝缘环或电极夹持器或基板具有凹槽 其中密封元件被固定，其中密封元件中的至少一个被固定在形成在电极保持器中的凹槽中或者其中， e底板，并位于电绝缘环的上方或下方。