公开(公告)号：EP0624533A3

公开(公告)日：1995-02-22

申请号：EP94303441.3

申请日：1994-05-13

申请人： XEROX CORPORATION

发明人： Kilmer, David J. ,  Foley, Geoffrey M. ,  Petropoulos, Mark C. ,  Williams, John K. ,  Antonelli, Alexander A. ,  Swain, Eugene A. ,  Duffy, Robert A.

IPC分类号： B65G47/90 ,  B25J15/00

CPC分类号： B65G47/908 ,  Y10S294/902

摘要： An apparatus (5) is disclosed for internally holding an at least partially hollow substrate (35) having at least one open end. The apparatus (5) includes a member (10) defining a fluid passageway (15), a normally inflated porous material (25) mounted on the member (10) in communication (20) with the fluid passageway (15) of the member, and means, in communication with the member, for deflating the porous material (25), the deflating means being de-energized in response to the porous material (25) being disposed into the opening in the substrate (35) for enabling the porous material (25) to return to being normally inflated to hold the substrate.

公开(公告)号：EP0728551B1

公开(公告)日：2001-11-07

申请号：EP96301088.9

申请日：1996-02-16

申请人： XEROX CORPORATION

发明人： Swain, Eugene A. ,  Petropoulos, Mark C. ,  Pietrzykowski, Stanley J. ,  Smith, Alan D.

IPC分类号： B23B31/40 ,  B65B21/12 ,  B65G47/90

CPC分类号： B65G47/908 ,  Y10T279/1066 ,  Y10T279/1087

公开(公告)号：EP0728551A1

公开(公告)日：1996-08-28

申请号：EP96301088.9

申请日：1996-02-16

申请人： XEROX CORPORATION

发明人： Swain, Eugene A. ,  Petropoulos, Mark C. ,  Pietrzykowski, Stanley J. ,  Smith, Alan D.

IPC分类号： B23B31/40 ,  B65B21/12 ,  B65G47/90

CPC分类号： B65G47/908 ,  Y10T279/1066 ,  Y10T279/1087

摘要： A chuck assembly (2) which may be inserted into and engage the inner surface of a hollow substrate has a housing (6) having a first open end (8) and a passageway (12) in communication with the first open end, a partially hollow elastic boot (4) having an entry hole which engages the housing and an inner surface which is in communication with the passageway, and a movable, boot stretching member (32) disposed in the passageway and adapted to engage the inner surface of the boot. Movement of the member in a direction to stretch the boot decreases the cross-sectional dimension of the boot, thereby permitting insertion of the boot into the substrate, and movement of the member in the opposite direction increases the cross-sectional dimension of the boot, thereby permitting engagement of the boot against the inner surface of the substrate.

摘要翻译： 可以插入并接合中空基板的内表面的卡盘组件（2）具有壳体（6），其具有与第一开口端连通的第一开口端（8）和通道（12），部分 具有与所述壳体接合的入口孔和与所述通道连通的内表面的中空弹性靴（4）和设置在所述通道中并适于接合所述靴子的内表面的可移动的靴子拉伸构件（32） 。 构件在拉伸套管的方向上的移动减小了护罩的横截面尺寸，从而允许将靴子插入衬底中，并且构件沿相反方向的移动增加了护罩的横截面尺寸， 从而允许护罩与衬底的内表面接合。

公开(公告)号：EP0624533A2

公开(公告)日：1994-11-17

申请号：EP94303441.3

申请日：1994-05-13

申请人： XEROX CORPORATION

发明人： Kilmer, David J. ,  Foley, Geoffrey M. ,  Petropoulos, Mark C. ,  Williams, John K. ,  Antonelli, Alexander A. ,  Swain, Eugene A. ,  Duffy, Robert A.

IPC分类号： B65G47/90 ,  B25J15/00

CPC分类号： B65G47/908 ,  Y10S294/902

摘要： An apparatus (5) is disclosed for internally holding an at least partially hollow substrate (35) having at least one open end. The apparatus (5) includes a member (10) defining a fluid passageway (15), a normally inflated porous material (25) mounted on the member (10) in communication (20) with the fluid passageway (15) of the member, and means, in communication with the member, for deflating the porous material (25), the deflating means being de-energized in response to the porous material (25) being disposed into the opening in the substrate (35) for enabling the porous material (25) to return to being normally inflated to hold the substrate.

摘要翻译： 该装置包括限定流体通道的构件，安装在与构件的流体通道连通的构件上的通常充气的多孔材料，以及与构件连通的用于使多孔材料放气的机构。 放气机构响应于多孔材料设置在基板中的开口中而被断电，以使多孔材料能够恢复正常充气以保持基板。

公开(公告)号：EP0792697B1

公开(公告)日：2001-10-10

申请号：EP97301276.8

申请日：1997-02-26

申请人： XEROX CORPORATION

发明人： Petropoulos, Mark C. ,  Foley, Geoffrey M.T. ,  Swain, Eugene A. ,  Kilmer, David J. ,  Thomas, Mark S. ,  Pietrzykowski, Stanley J., Jr. ,  Foltz, Robert S. ,  Schmitt, Peter J. ,  Millonzi, Richard P.

IPC分类号： B05C3/09 ,  G03G5/05

CPC分类号： B05C3/09 ,  G03G5/0525

公开(公告)号：EP0792697A1

公开(公告)日：1997-09-03

申请号：EP97301276.8

申请日：1997-02-26

申请人： XEROX CORPORATION

发明人： Petropoulos, Mark C. ,  Foley, Geoffrey M.T. ,  Swain, Eugine A. ,  Kilmer, David J. ,  Thomas, Mark S. ,  Pietrzykowski, Stanley J., Jr. ,  Foltz, Robert S. ,  Schmitt, Peter J. ,  Millonzi, Richard P.

IPC分类号： B05C3/09 ,  G03G5/05

CPC分类号： B05C3/09 ,  G03G5/0525

摘要： There is disclosed a dip coating apparatus including: (a) a single coating vessel (4) capable of containing a batch of substrates (12) vertically positioned in the vessel (4), wherein there is absent vessel walls defining a separate compartment for each of the substrates (12); (b) a coating solution disposed in the vessel (4), wherein the solution is comprised of photosensitive materials and including a solvent that gives off a solvent vapor; and (c) a solvent vapor uniformity control apparatus (22) which minimizes any difference in solvent vapor concentration encountered by the batch of the substrates (12) in the air adjacent the solution surface, thereby improving coating uniformity of the substrates (12).

摘要翻译： 公开了一种浸涂装置，其包括：（a）能够容纳垂直定位在容器（4）中的一批基底（12）的单个涂覆容器（4），其中不存在为每个 的基板（12）; （b）设置在所述容器（4）中的涂布溶液，其中所述溶液由感光材料构成，并且包括产生溶剂蒸气的溶剂; 和（c）溶剂蒸气均匀性控制装置（22），其最小化在溶液表面附近的空气中的一批基底（12）遇到的溶剂蒸汽浓度的任何差异，从而改善基底（12）的涂层均匀性。