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    Parallel filament electron gun
    4.
    发明公开
    Parallel filament electron gun 失效
    Fäden的Elektronenkanone mit parallelen。

    公开(公告)号：EP0549113A1

    公开(公告)日：1993-06-30

    申请号：EP92309885.9

    申请日：1992-10-28

    申请人： ENERGY SCIENCES INC.

    发明人： Avnery, Tzvi ,  Van de Stadt, Willem ,  Sousa, Michael John

    IPC分类号： H01J33/00 ,  H01J3/02

    CPC分类号： H01J33/00

    摘要： A novel parallel-filament type electron gun for electron beam irradiation accelerators or generators and the like having a plurality of longitudinally extending parallel transversely spaced substantially co-planar similar filaments (F) for generating electrons and disposed between a lower co-extensive extractor grid (G) and an upper co-extensive electrostatic lens surface (ESL) for shaping the electron beam profile, and with constructional features that enable variable width and extremely wide guns to be achieved and with improved beam uniformity.

    摘要翻译： 一种用于电子束照射加速器或发生器等的新颖的平行长丝型电子枪，具有多个纵向延伸的并行横向间隔开的基本上共同平行的类似细丝（F），用于产生电子并且设置在下部共同抽取器栅格 G）和用于成形电子束轮廓的上部共同广泛静电透镜表面（ESL），以及具有实现可变宽度和极宽枪的结构特征并且具有改善的光束均匀性。

    High power window and support structure for electron beam processors
    5.
    发明公开
    High power window and support structure for electron beam processors 失效
    高能量的帧和它的身体结构的电子枪。

    公开(公告)号：EP0195153A2

    公开(公告)日：1986-09-24

    申请号：EP85304632.4

    申请日：1985-06-28

    申请人： Energy Sciences Inc.

    发明人： Avnery, Tzvi

    IPC分类号： H01J33/04

    CPC分类号： H01J33/04

    摘要： A high power window for an evacuated electron beam generator and the like which comprises one or more pluralities of conductive successive fins parallely and closely spaced arcuately extending transversely across the electron beam foil window and held by the vacuum pressure to the inner surface thereof, with the fin cross-section preferably tapering in thickness inwardly.

    ELECTRON BEAM APPARATUS WITH ADJUSTABLE AIR GAP
    9.
    发明公开
    ELECTRON BEAM APPARATUS WITH ADJUSTABLE AIR GAP 审中-公开

    公开(公告)号：EP3341504A1

    公开(公告)日：2018-07-04

    申请号：EP16840085.1

    申请日：2016-08-25

    申请人： Energy Sciences Inc.

    发明人： RANGWALLA, Imtiaz, J. ,  ALEXY, Rich ,  MAGUIRE, Edward

    IPC分类号： C23C14/30

    CPC分类号： G21K5/00 ,  G21K5/02

    摘要： An electron beam processing apparatus for treating a substrate is provided. The apparatus has an electron beam generating assembly housed in a chamber that includes a filament for generating a plurality of electrons upon heating. The apparatus may also have a foil support assembly that is configured to direct the plurality of electrons through a thin foil out of the chamber. The apparatus may further have a processing assembly that is configured to pass the substrate by the thin foil so that the plurality of electrons penetrates the substrate and cause a chemical reaction. A distance of an air gap between the thin foil and the substrate may be adjustable.

    ELECTRON BEAM WINDOW TILE HAVING NON-UNIFORM CROSS-SECTIONS
    10.
    发明公开
    ELECTRON BEAM WINDOW TILE HAVING NON-UNIFORM CROSS-SECTIONS 审中-公开

    公开(公告)号：EP3234979A4

    公开(公告)日：2018-07-04

    申请号：EP15871202

    申请日：2015-12-18

    申请人： ENERGY SCIENCES INC

    发明人： ALEXY RICH ,  RANGWALLA IMTIAZ ,  BAROUD JONATHAN

    IPC分类号： H01J33/04 ,  G21K1/00 ,  H01J5/18 ,  H01J33/00

    CPC分类号： H01J37/147 ,  H01J5/18 ,  H01J33/04 ,  H01J37/09 ,  H01J2237/18

    摘要： Window tiles for electron beam systems are provided. The window tiles can comprise a first surface and a second surface, and one or more features extending from the first surface to the second surface. The one or more features can have a non-uniform or tapered cross-section between the first surface and the second surface. The first surface can be configured to be exposed to vacuum conditions and can be configured to receive electrons accelerated from an electron beam generator. The second surface can be configured to allow electrons to pass through to a foil. The window tiles can improve electron beam processing systems for example by increasing electron throughput, lowering power consumption, reducing heat absorption to the foil, improving and increasing foil life, and potentially allowing for use of smaller and cheaper machines in electron beam processing.