CONTROLLING MIXING CONCENTRATION
    1.
    发明公开

    公开(公告)号:EP3409347A1

    公开(公告)日:2018-12-05

    申请号:EP18167612.3

    申请日:2013-11-15

    申请人: Entegris, Inc.

    IPC分类号: B01F15/04 B01F15/00 G05D11/13

    摘要: A method for controlled mixing of a plurality of substances to produce a first mixture, the method comprising: receiving a first target concentration range of a first substance in the mixture of the plurality of substances; supplying the plurality of substances to a first mixing zone (112), the plurality of substances mixing in the first mixing zone to produce the first mixture; determining a concentration value of the first substance in the first mixture while continuing to supply the plurality of substances to the first mixing zone; comparing the concentration value of the first substance to the first target concentration range; and upon determining that the concentration value of the first substance falls outside the first target concentration range, automatically adjusting a flow rate of the first substance to the first mixing zone by adjusting an opening size of a control valve (122) provided at a first conduit (110) for supplying the first substance to the first mixing zone (112), the opening size of the control valve (122) adjusted based on the concentration value of the first substance in the first mixture and based on one or more physical characteristics of at least one of the plurality of substances, wherein the one or more physical characteristics are selected from a group comprising viscosity, density, specific gravity, chemical composition, temperature and pressure wherein the method comprises recalibrating and adjusting the control valve by: determining a difference value between the concentration value of the first substance and the first target concentration range; creating an adjusted control parameter after determining that the post-mixing concentration is outside the first target concentration range, determining a feedback control value based on the difference value and the adjusted control parameter; and adjusting the control valve (122) based on the feedback control value. A mixing system (100) is also described.

    Method of, and apparatus for, providing a gas mixture
    3.
    发明授权
    Method of, and apparatus for, providing a gas mixture 有权
    用于提供气体混合物的方法和设备

    公开(公告)号:EP2667277B1

    公开(公告)日:2017-12-27

    申请号:EP12169396.4

    申请日:2012-05-24

    摘要: There is provided a gas mixer arrangement comprising a first gas source for supplying a first gas; a second gas source for supplying a second gas different from said first gas; first and second flow regulation devices for regulating the respective flow of the first gas and second gases from the first and second gas sources; a mixer; and an outlet. The mixer is located downstream of the first and second flow regulation devices and arranged, in use, to mix the first and second gases to provide a mixed gas to the outlet. The gas mixer arrangement further comprises a meter comprising a first sensor assembly operable to determine the average molecular weight of the mixed gas and including a high-frequency planar piezoelectric crystal oscillator in contact with the mixed gas, a second sensor assembly operable to determine the pressure of the gas downstream of one of the first or second flow regulation devices, and a controller operable, in response to the average molecular weight of the mixed gas and said gas pressure, to control automatically said first and second flow regulation devices to control the relative proportion of the first and second gases in said mixed gas and the pressure or mass flow rate of the mixed gas from the outlet.

    INDIVIDUALIZED FLOW REGULATION SYSTEM AND METHOD
    5.
    发明公开
    INDIVIDUALIZED FLOW REGULATION SYSTEM AND METHOD 审中-公开
    系统和方法的个性化流量控制

    公开(公告)号:EP3074117A2

    公开(公告)日:2016-10-05

    申请号:EP14865711.7

    申请日:2014-11-29

    IPC分类号: B01F5/04

    摘要: A liquid dispenser for dispensing an effluent mixture comprises a manifold inlet connectable to a pressurized liquid source, at least one individual diluent outlet in fluid communication with the manifold inlet, and at least one backflow preventer and eductor system in fluid communication with the at least one individual diluent outlet. A flow regulator is in fluid communication with the at least one individual diluent outlet and the at least one backflow preventer and eductor system, located upstream of the at least one backflow preventer and eductor system and downstream of the at least one individual diluent outlet. The flow regulator is preferably individualized for the at least one backflow preventer and eductor system and interchangeable within the dispenser to facilitate a plurality of volumetric flow rates to the at least one respective backflow preventer and eductor system.