公开(公告)号：EP0833135B1

公开(公告)日：2003-06-04

申请号：EP97307356.2

申请日：1997-09-22

Applicant: Varian, Inc.

Inventor： Chien, Ring-Ling

IPC: G01J3/04 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/189

公开(公告)号：EP0833135A1

公开(公告)日：1998-04-01

申请号：EP97307356.2

申请日：1997-09-22

Applicant: VARIAN ASSOCIATES, INC.

Inventor： Chien, Ring-Ling

IPC: G01J3/04 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/189

Abstract: An improved spectrometer comprises a slit in light blocking plate, an echelle grating, and a detector array. The slit is shaped and oriented to align an image of a light beam projected through the slit, onto the echelle grating and onto the detector in a desired orientation and shape relative to the detector array. Precise adjustment of the shape and orientation of the slit is dependent on the orientation of the detector with respect to the dispersion direction of the echelle grating. The spectrometer provides high detector resolution with reduced read-out time.

Abstract translation: 改进的电子光谱仪包括遮光板中的狭缝，梯形光栅和检测器阵列。 狭缝被成形并定向成使得通过狭缝投射的光束的图像以相对于检测器阵列的期望的取向和形状对准到梯形栅格和检测器上。 狭缝的形状和取向的精确调整取决于检测器相对于梯形光栅的分散方向的取向。 梯形光谱仪提供高检测分辨率，减少读出时间。