FLAT FIELD TELECENTRIC SCANNER WITH DIFFRACTION LIMITED PERFORMANCE
    3.
    发明授权
    FLAT FIELD TELECENTRIC SCANNER WITH DIFFRACTION LIMITED PERFORMANCE 有权
    具有有限衍射性能的平场望远镜扫描仪

    公开(公告)号:EP2691803B1

    公开(公告)日:2017-05-10

    申请号:EP12711874.3

    申请日:2012-03-30

    发明人: DE LOOR, Ronny

    摘要: The present invention provides a scanning system (100) comprising a first port for receiving or emitting a stationary beam (60) of electromagnetic radiation, a second port for emitting or receiving a scanning beam of electromagnetic radiation, the scanning beam scanning in a main scanning direction, a scanning element (61) for relaying the stationary beam (60) into the scanning beam or vice versa, an optical system between the scanning element (61) and the second port, wherein the optical system comprises at least a first mirror (63) and a second mirror (64) having a rotationally symmetric curved mirror surface around their optical axis, at least one of the first and the second curved mirror surface having an aspheric shape, and wherein the first and the second mirror (63, 64) have an off-axis decentered aperture and are offset in position in a direction perpendicular to the main scanning direction.

    摘要翻译: 本发明提供了一种扫描系统(100),其包括用于接收或发射电磁辐射的固定光束(60)的第一端口,用于发射或接收电磁辐射的扫描光束的第二端口,扫描光束在主扫描 用于将固定光束(60)中继到扫描光束中或反之亦然的扫描元件(61),在扫描元件(61)和第二端口之间的光学系统,其中光学系统至少包括第一反射镜 和第二反射镜(64),所述第二反射镜具有围绕它们的光轴旋转对称的曲面镜面,所述第一和第二曲面镜面中的至少一个具有非球面形状,并且其中所述第一和第二反射镜(63,64 )具有偏轴偏心开口并且在垂直于主扫描方向的方向上偏移位置。

    F-THETA LENS AND LASER PROCESSING DEVICE FOR FAR-INFRARED LASER PROCESSING
    5.
    发明公开
    F-THETA LENS AND LASER PROCESSING DEVICE FOR FAR-INFRARED LASER PROCESSING 有权
    F-THETA-LINSE UND LASERBEARBEITUNGSVORRICHTUNGFÜRFERNINFRAROT-LASERVERARBEITUNG

    公开(公告)号:EP2908163A1

    公开(公告)日:2015-08-19

    申请号:EP12887391.6

    申请日:2012-10-31

    IPC分类号: G02B13/00 B23K26/02

    摘要: An Fθ lens and a laser processing device for far-infrared laser processing are provided. The Fθ lens for far-infrared laser processing comprises a first lens (L1), a second lens (L2) and a third lens (L3) which are coaxially arranged successively along a transmission direction of incident light beams, wherein the first lens is a negative meniscus lens, and the second lens and the third lens are positive meniscus lenses; and all the middle parts of the first lens, the second lens and the third lens protrude towards the transmission direction of incident light beams. The Fθ lens can improve the imaging quality and the resolution distance, effectively calibrate the astigmatism and distortion of the lens, reduce the influence of high-order aberrations, and has a high degree of energy concentration of laser focus points and high processing accuracy, thereby meeting the requirements for cutting or drilling. The Fθ lens is miniaturized, so that the volume of the lens is effectively controlled, and costs are reduced.

    摘要翻译: 提供了一种用于远红外激光加工的F¸透镜和激光加工装置。 用于远红外激光处理的F¸透镜包括沿入射光束的透射方向连续布置的第一透镜(L1),第二透镜(L2)和第三透镜(L3),其中第一透镜 负弯月透镜,第二透镜和第三透镜是正弯月透镜; 并且第一透镜,第二透镜和第三透镜的所有中间部分朝向入射光束的透射方向突出。 F¸镜头可以提高成像质量和分辨距离,有效校准镜片的散光和失真,降低高阶像差的影响,激光焦点的能量集中度高,加工精度高, 从而满足切割或钻孔的要求。 F¸透镜小型化,从而有效地控制透镜的体积,降低成本。

    OPTICAL SYSTEM FOR FORMING NON-CIRCULAR IMAGE OF LIKEWISE-SHAPED LIGHT SOURCE ON WORKPIECE LOCATED IN WAIST OF LASER BEAM
    6.
    发明公开
    OPTICAL SYSTEM FOR FORMING NON-CIRCULAR IMAGE OF LIKEWISE-SHAPED LIGHT SOURCE ON WORKPIECE LOCATED IN WAIST OF LASER BEAM 审中-公开
    用于在激光束中间的工件上产生光源的非结构化图像的光学系统

    公开(公告)号:EP2855076A4

    公开(公告)日:2015-08-12

    申请号:EP13837131

    申请日:2013-05-29

    发明人: EVBATYROV TIMUR

    摘要: An optical system for forming a final image of a non-circular light source on a workpiece with a desired non-circular cross-section and desired size B includes a plurality of spaced leases. The plurality of lenses are arranged with spaced upstream and downstream lenses which are configured to transmit the beam emitted by the light source. The optical system is configured with an F-theta lens spaced downstream from the downstream lens and converging the beam incident thereon so that the beam has a final waist. The F-theta and downstream lenses are spaced apart so that -, wherein F4 a positive focal length of the downstream lens, Fth is the negative focus of the F-theta lens, B is the desired size of the final image, and A is a size of a preliminary noncircular image of the source different from the desired size B.

    Scanning optical system, optical scanning apparatus, and radiation image readout apparatus
    7.
    发明公开
    Scanning optical system, optical scanning apparatus, and radiation image readout apparatus 审中-公开
    扫描光学系统,光学扫描设备和辐射图像读取设备

    公开(公告)号:EP2876477A1

    公开(公告)日:2015-05-27

    申请号:EP14193973.6

    申请日:2014-11-20

    IPC分类号: G02B9/56 G02B13/00 G03B42/00

    摘要: [Objective]
    To obtain a scanning optical system capable of being configured to be compact and of sufficiently decreasing the beam diameter of light on a scanning target surface.
    [Constitution]
    A scanning optical system includes: a galvanometer mirror that reflects and deflects a light beam emitted from a light source with a mirror (4a), and an fθ lens that focuses the deflected light beam on a scanning target surface. The fθ lens is constituted by a first lens (L1), which is a spherical lens having a positive refractive power, a second lens (L2), which is a spherical lens having a negative refractive power, a third lens (L3), which is a spherical lens having a negative refractive power, and a fourth lens (L4), which is a spherical lens having a positive refractive power, provided in this order from the side of the galvanometer mirror. The scanning optical system satisfies Conditional Formula (1) below: 2.529 ≤ f / f ⁢ 1 ≤ 8.437
    wherein f is the focal length of the entire fθ lens, and f1 is the focal length of the first lens (L1).

    摘要翻译: [本发明的目的]为了获得能够构造成紧凑并且能够充分减小扫描目标表面上的光束直径的扫描光学系统。 [构成]一种扫描光学系统包括:检流计反射镜,其用反射镜(4a)反射和偏转从光源发射的光束;以及fθ透镜,其将被偏转的光束聚焦在扫描目标表面上。 fθ透镜由具有正光焦度的球面透镜即第一透镜(L1),具有负光焦度的球面透镜即第二透镜(L2),第三透镜​​(L3)构成,该第三透镜 是具有负折射光焦度的球面透镜,并且从检流计反射镜侧依次设置有作为具有正折射光焦度的球面透镜的第四透镜(L4)。 扫描光学系统满足下面的条件公式(1):2.529≤f/f1≤8.437其中,f是整个fθ透镜的焦距,并且f1是第一透镜(L1)的焦距。

    Optical scanning device and image forming apparatus using same
    9.
    发明公开
    Optical scanning device and image forming apparatus using same 审中-公开
    光学扫描装置及使用其的图像形成装置

    公开(公告)号:EP2631694A1

    公开(公告)日:2013-08-28

    申请号:EP13000948.3

    申请日:2013-02-25

    发明人: Nakano, Issei

    IPC分类号: G02B13/00

    摘要: An optical scanning device includes a light source (20) which emits a light beam, a deflector (26), an incident optical system (23,24) and one scanning lens (28). The deflector reflects and then deflects/scans the light beam emitted from the light source. The scanning lens includes a first face (281) facing the deflector and a second face (282) on an opposite side to the first face, and performs imaging of the deflected/scanned light beam on a surface to be scanned. When a curvature radius of the first face in a main scanning direction cross section is R1, a curvature radius of the second face in a main scanning direction cross section is R2, a lens thickness in an optical axis direction at a center of the scanning lens in the main scanning direction is d, and a refractive index of the scanning lens is n, following Formula (1) and Formula (2) are satisfied:

    摘要翻译: 光学扫描装置包括发射光束的光源(20),偏转器(26),入射光学系统(23,24)和一个扫描透镜(28)。 偏转器反射然后偏转/扫描从光源发射的光束。 扫描透镜包括面对偏转器的第一面(281)和与第一面相对的第二面(282),并且将偏转/扫描的光束成像在待扫描的表面上。 当主扫描方向截面中的第一面的曲率半径为R1时,主扫描方向截面中第二面的曲率半径为R2,扫描透镜中心处的光轴方向上的透镜厚度 在主扫描方向上是d,并且扫描透镜的折射率是n,满足下面的公式(1)和公式(2):