公开(公告)号：EP0202630A3

公开(公告)日：1990-01-10

申请号：EP86106728.8

申请日：1986-05-16

申请人： DISCO ABRASIVE SYSTEMS, LTD.

发明人： Sekiya, Shinji

IPC分类号： H01L21/68 ,  G01B21/00 ,  H01L21/304

CPC分类号： G05B19/404 ,  B23D59/002 ,  B23Q11/0007 ,  G01B5/0014 ,  G05B2219/37096 ,  G05B2219/45044 ,  G05B2219/49207

摘要： A precision device comprising a holding means (86) for holding an object and a supporting means (4, 6, 8, 10) for supporting an operating element (48), one of which is movable in a predetermined direction. The precision device includes a detecting means (52, 54) for detecting the amount of movement of one of the holding member (86) and the supporting member (10) in said predetermined direction, and the detecting means (52, 54) includes a scale (58, 68) formed of a material having a coefficient of linear expansion, in a temperature range of -20 to 100°C, of not more than 10 x 10 7/1Cas an absolute value. The precision device further comprises a detecting means (76, 80, 84) for detecting the amount of thermal expansion of at least a part (10) of the supporting means in said predetermined direction.

公开(公告)号：EP0262313A1

公开(公告)日：1988-04-06

申请号：EP87109898.4

申请日：1987-07-09

申请人： Dr. Johannes Heidenhain GmbH

发明人： Miller, Walter, Dr.

IPC分类号： G05B19/18

CPC分类号： B23Q11/0007 ,  G05B19/404 ,  G05B2219/37096 ,  G05B2219/49207 ,  Y10T408/175 ,  Y10T409/3098

摘要： Bei einer Fräsmaschine (1) treten an der Arbeitsspindel (7) erhöhte Temperaturen gegenüber dem Spindelschlitten (3) auf, die zu temperaturbedingten Verlagerungen der Arbeitsspindelachse (7a) führen. Dies führt zu Meßfehlern, da die Position der Arbeitsspindel (7) mit einer Positionsmeßeinrichtung (2) am Spindelschlitten (3) ermittelt wird. Mit Hilfe einer zusätzlichen Abtasteinrichtung (5a), die mit einer Schubstange (9) aus Material mit kleinem Temperaturkoeffizienten am Gehäuse (8) der Arbeitsspindel (7) angekoppelt ist, wird diese temperaturbedingte Verlagerung direkt nach Richtung und Betrag gemessen und in einer Auswerteeinrichtung (NC) mit dem Positionswert der Positionsmeßeinrichtung (2) verrechnet. Die temperaturbedingte Verlagerung der Arbeitsspindelachse (7a) wird dadurch kompensiert.

摘要翻译： 在研磨机（1）发生在工作主轴（7）至升高的温度相对于所述主轴滑件（3），从而导致在工作主轴轴线温度引起的位移（图7a）。 这导致测量误差，因为在工作主轴（7）的与位置测量装置的位置（2）在主轴滑架（3）来确定。 与另外的感测装置（图5a），其在壳体连接到具有小的温度系数材料的推杆（9）的帮助下（8）在工作主轴（7），直接在方向和量，并测定该温度相关的位移（在评估装置NC ）装入的位置（2）的位置值。 工作主轴轴线（7a）的温度引起的偏移进行补偿。

公开(公告)号：EP0202630A2

公开(公告)日：1986-11-26

申请号：EP86106728.8

申请日：1986-05-16

申请人： DISCO ABRASIVE SYSTEMS, LTD.

发明人： Sekiya, Shinji

IPC分类号： H01L21/68 ,  G01B21/00 ,  H01L21/304

CPC分类号： G05B19/404 ,  B23D59/002 ,  B23Q11/0007 ,  G01B5/0014 ,  G05B2219/37096 ,  G05B2219/45044 ,  G05B2219/49207

摘要： A precision device comprising a holding means (86) for holding an object and a supporting means (4, 6, 8, 10) for supporting an operating element (48), one of which is movable in a predetermined direction. The precision device includes a detecting means (52, 54) for detecting the amount of movement of one of the holding member (86) and the supporting member (10) in said predetermined direction, and the detecting means (52, 54) includes a scale (58, 68) formed of a material having a coefficient of linear expansion, in a temperature range of -20 to 100°C, of not more than 10 x 10 7/1Cas an absolute value. The precision device further comprises a detecting means (76, 80, 84) for detecting the amount of thermal expansion of at least a part (10) of the supporting means in said predetermined direction.

公开(公告)号：EP0202630B1

公开(公告)日：1992-03-25

申请号：EP86106728.8

申请日：1986-05-16

申请人： DISCO ABRASIVE SYSTEMS, LTD.

发明人： Sekiya, Shinji

IPC分类号： H01L21/68 ,  G01B21/00 ,  H01L21/304

CPC分类号： G05B19/404 ,  B23D59/002 ,  B23Q11/0007 ,  G01B5/0014 ,  G05B2219/37096 ,  G05B2219/45044 ,  G05B2219/49207

公开(公告)号：EP0262313B1

公开(公告)日：1991-09-04

申请号：EP87109898.4

申请日：1987-07-09

申请人： Dr. Johannes Heidenhain GmbH

发明人： Miller, Walter, Dr.

IPC分类号： G05B19/18

CPC分类号： B23Q11/0007 ,  G05B19/404 ,  G05B2219/37096 ,  G05B2219/49207 ,  Y10T408/175 ,  Y10T409/3098

公开(公告)号：EP0343517A3

公开(公告)日：1991-03-20

申请号：EP89108974.0

申请日：1989-05-18

申请人： TOYODA KOKI KABUSHIKI KAISHA

发明人： Yoshimi, Takani ,  Matsuura, Akihiro ,  Takashima, Toshiharu ,  Nakano, Hiroyuki

IPC分类号： G05B19/18

CPC分类号： G05B19/404 ,  G05B2219/37096 ,  G05B2219/41164 ,  G05B2219/41165 ,  G05B2219/49207 ,  Y10T408/172 ,  Y10T408/175 ,  Y10T409/309352

摘要： A thermal displacement comensating apparatus capable of compensating for the thermal displacement of the main spindle of a machine tool is disclosed. A feed back scale and a measuring head are provided in order to detect the actual position of the front end portion of the spindle head. Furthermore, a distance sensor is provided for detecting the thermal extention of the main spindle with respect to the spindle head. The output signal from the distance sensor is used for modifying the present position detected by the measuring head or modifying a commanded target position. With this arrangement, a tool attached to the front end portion of the main spindle is moved to the commanded position regardless of the thermal displacement of the spindle head and the main spindle. Another type of compensation apparatus is also disclosed, wherein the measuring head is mounted on a mounting rod, and the mounting rod is automatically moved so as to maintain the distance between the measuring head and the front end surface of the main spindle at a constant distance. With this arrangement, actual position of the front end surface of the main spindle can directly be detected regardless of the thermal displacement of the spindle head and the main spindle.

公开(公告)号：EP0343517A2

公开(公告)日：1989-11-29

申请号：EP89108974.0

申请日：1989-05-18

申请人： TOYODA KOKI KABUSHIKI KAISHA

发明人： Yoshimi, Takani ,  Matsuura, Akihiro ,  Takashima, Toshiharu ,  Nakano, Hiroyuki

IPC分类号： G05B19/18

CPC分类号： G05B19/404 ,  G05B2219/37096 ,  G05B2219/41164 ,  G05B2219/41165 ,  G05B2219/49207 ,  Y10T408/172 ,  Y10T408/175 ,  Y10T409/309352

摘要： A thermal displacement comensating apparatus capable of compensating for the thermal displacement of the main spindle of a machine tool is disclosed. A feed back scale and a measuring head are provided in order to detect the actual position of the front end portion of the spindle head. Furthermore, a distance sensor is provided for detecting the thermal extention of the main spindle with respect to the spindle head. The output signal from the distance sensor is used for modifying the present position detected by the measuring head or modifying a commanded target position. With this arrangement, a tool attached to the front end portion of the main spindle is moved to the commanded position regardless of the thermal displacement of the spindle head and the main spindle. Another type of compensation apparatus is also disclosed, wherein the measuring head is mounted on a mounting rod, and the mounting rod is automatically moved so as to maintain the distance between the measuring head and the front end surface of the main spindle at a constant distance. With this arrangement, actual position of the front end surface of the main spindle can directly be detected regardless of the thermal displacement of the spindle head and the main spindle.

摘要翻译： 能够补偿的机床的主轴的热位移的热位移comensating装置游离缺失盘。 为了检测主轴头的前端部的实际位置提供一个反馈规模和测量头。 进一步，距离传感器被设置用于相对于所述主轴头检测所述主轴的热推广。 从距离传感器的输出信号被用于修改由测量头检测的当前位置或修改命令的目标位置。 利用这种布置，连接到主轴的前端部的工具移动到所命令的位置，而不管所述主轴头的热位移和主轴的。 这样补偿装置的另一种类型的光盘游离缺失，worin测量头被安装在一个安装杆，和安装杆自动地移动，以便保持在一个恒定的距离测量头和主轴的前端表面之间的距离 ， 利用这种布置，该主轴的前端表面的实际位置可以直接不管主轴头的热位移和主轴的检测。