公开(公告)号：EP4356413A1

公开(公告)日：2024-04-24

申请号：EP21735593.2

申请日：2021-06-16

申请人： Carl Zeiss MultiSEM GmbH

发明人： ZEIDLER, Dirk ,  SCHMID, Thomas

IPC分类号： H01J37/147 ,  H01J37/153

CPC分类号： H01J2237/150420130101 ,  H01J2237/153620130101 ,  H01J37/1477 ,  H01J37/153 ,  H01J2237/151820130101 ,  H01J2237/151620130101

公开(公告)号：EP4354486A1

公开(公告)日：2024-04-17

申请号：EP22201402.9

申请日：2022-10-13

申请人： ASML Netherlands B.V.

发明人： KONING, Johan, Joost ,  DEL TIN, Laura

IPC分类号： H01J37/24 ,  H01J37/244

CPC分类号： H01J37/24 ,  H01J2237/150420130101 ,  H01J2237/120220130101 ,  H01J37/244 ,  H01J2237/043720130101

摘要： A charged particle-optical element for a charged particle-optical module configured to direct charged particles along at least one beam path, the charged particle-optical element comprising: a substrate comprising at least one aperture for passage therethrough of the at least one beam path; at least one electronic component so as to provide a component surface of the substrate; and an electrical connector electrically connected to the at least one electronic component and extending through the substrate; wherein the substrate comprises a thicker portion and a thinner portion that is thinner than the thicker portion, and the electrical connector extends through the thinner portion.