公开(公告)号：EP1437569A4

公开(公告)日：2010-05-05

申请号：EP02783619

申请日：2002-11-26

申请人： PANASONIC CORP

发明人： OUCHI SATOSHI ,  NOZOE TOSHIYUKI ,  NOMURA KOJI ,  TAJIKA HIROFUMI

IPC分类号： G01P9/04 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H03H9/21 ,  H03H9/24 ,  G01C19/56 ,  G01C21/00 ,  H03H9/17

CPC分类号： G01C19/5607 ,  H03H9/21 ,  H03H9/2484 ,  H03H2003/0492

摘要： A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.

公开(公告)号：EP1217735B1

公开(公告)日：2007-11-14

申请号：EP00204720.7

申请日：2000-12-21

申请人： ETA SA Manufacture Horlogère Suisse

发明人： Giousouf, Metin ,  Kück, Heinz ,  Platz, Rainer

IPC分类号： H03H9/21

CPC分类号： H03H9/2484 ,  H03H9/21 ,  H03H2009/02299

公开(公告)号：EP2245738A4

公开(公告)日：2014-03-12

申请号：EP09703126

申请日：2009-01-23

申请人： MURATA ELECTRONICS OY

发明人： KAAJAKARI VILLE

IPC分类号： H03H9/02 ,  B81B3/00 ,  H03H3/007 ,  H03H9/24

CPC分类号： H03H9/2463 ,  H02N1/008 ,  H03H3/0076 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2478 ,  H03H9/2484 ,  H03H2009/02299

公开(公告)号：EP1437569B1

公开(公告)日：2012-04-04

申请号：EP02783619.6

申请日：2002-11-26

申请人： Panasonic Corporation

发明人： OUCHI, Satoshi ,  NOZOE, Toshiyuki ,  NOMURA, Koji ,  TAJIKA, Hirofumi

IPC分类号： G01C19/56 ,  G01C21/00 ,  H03H9/17 ,  H01L41/08

CPC分类号： G01C19/5607 ,  H03H9/21 ,  H03H9/2484 ,  H03H2003/0492

摘要： A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.

摘要翻译： 公开了具有改进的驱动效率的薄膜微机械谐振器（谐振器），具有改进的角速度灵敏度的谐振器陀螺仪，使用该谐振器陀螺仪的导航系统和汽车。 谐振器包括由非压电材料制成的音叉以及设置在音叉臂的主表面的内部和外部的第一和第二电极。 第三和第四电极设置在设置在第一和第二电极上的第一和第二压电薄膜上。 相位相反的交流电压被施加到第三和第四电极。 音叉谐振，在垂直于中心线的方向上振动。 谐振器陀螺仪具有由另一个电极和另一个压电薄膜组成的感测部分，用于感测与施加到谐振器的角速度相对应的科里奥利力。

公开(公告)号：EP2245738B1

公开(公告)日：2015-06-17

申请号：EP09703126.4

申请日：2009-01-23

申请人： Murata Electronics Oy

发明人： KAAJAKARI, Ville

IPC分类号： H03H9/02 ,  H03H9/24 ,  B81B3/00 ,  H03H3/007 ,  H02N1/00

CPC分类号： H03H9/2463 ,  H02N1/008 ,  H03H3/0076 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2478 ,  H03H9/2484 ,  H03H2009/02299

公开(公告)号：EP2539999A1

公开(公告)日：2013-01-02

申请号：EP11744325.9

申请日：2011-02-18

申请人： VTI Technologies Oy

发明人： KAAJAKARI, Ville

IPC分类号： H03H9/02 ,  H03H9/24 ,  B81B3/00 ,  G01C19/56

CPC分类号： G01C19/5621 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2484 ,  H03H9/2494

摘要： The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element.

公开(公告)号：EP2539999A4

公开(公告)日：2018-01-10

申请号：EP11744325

申请日：2011-02-18

申请人： MURATA ELECTRONICS OY

发明人： KAAJAKARI VILLE

IPC分类号： H03H9/02 ,  B81B3/00 ,  G01C19/56 ,  H03H9/24

CPC分类号： G01C19/5621 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2484 ,  H03H9/2494

摘要： The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element.

公开(公告)号：EP2245738A1

公开(公告)日：2010-11-03

申请号：EP09703126.4

申请日：2009-01-23

申请人： VTI TECHNOLOGIES OY

发明人： KAAJAKARI, Ville

IPC分类号： H03H9/02 ,  H03H9/24 ,  B81B3/00

CPC分类号： H03H9/2463 ,  H02N1/008 ,  H03H3/0076 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/2478 ,  H03H9/2484 ,  H03H2009/02299

摘要： The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectro- mechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator in which the width of the spring elements (3), (23-24), (27- 30) is greater than the width of the electrode fingers (5-9), (25-26), (31-34), said widths specifically dimensioned so that the sensitivity of the resonant frequency change with respect to dimensional manufacturing variations Formula approaches zero. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.

公开(公告)号：EP1437569A1

公开(公告)日：2004-07-14

申请号：EP02783619.6

申请日：2002-11-26

申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

发明人： OUCHI, Satoshi ,  NOZOE, Toshiyuki ,  NOMURA, Koji ,  TAJIKA, Hirofumi

IPC分类号： G01C19/56 ,  G01P9/04 ,  G01C21/00 ,  H03H9/17 ,  H01L41/08

CPC分类号： G01C19/5607 ,  H03H9/21 ,  H03H9/2484 ,  H03H2003/0492

摘要： A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.

摘要翻译： 一种具有提高的驱动效率的薄膜微机械谐振器（谐振器），一种在检测角速度时具有改进的灵敏度的谐振陀螺仪，以及一种使用谐振陀螺仪的导航系统和汽车。 谐振器包括由非压电材料制成的音叉结构以及分别设置在音叉臂的内侧和外侧的第一电极和第二电极。 在第一和第二电极上分别设置第一压电膜和第二压电膜，在其上分别设置第三电极和第四电极。 当以彼此相反的相位向第三和第四电极施加交流电压时，音叉在垂直于中心线的方向上谐振。 谐振器陀螺仪在由另一个电极和另一个压电膜形成的感测部分处检测与给予谐振器的角速度成比例产生的科里奥利力。

公开(公告)号：EP1217735A1

公开(公告)日：2002-06-26

申请号：EP00204720.7

申请日：2000-12-21

申请人： Eta SA Fabriques d'Ebauches

发明人： Giousouf, Metin ,  Kück, Heinz ,  Platz, Rainer

IPC分类号： H03H9/21

CPC分类号： H03H9/2484 ,  H03H9/21 ,  H03H2009/02299

摘要： There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate in a plane substantially parallel to the substrate. The tuning fork resonator comprises a base member (5) extending substantially perpendicularly from the substrate, a free-standing oscillating structure (6) connected to the base member and including at least a first pair of substantially parallel fork tines (7, 8) and an electrode structure (9) disposed adjacent to the fork tines and connected to the integrated electronic circuit.

摘要翻译： 描述了包括谐振器（4）和集成电子电路（3）的时基，用于将谐振器驱动到振荡中，并且响应于该振荡而产生具有确定频率的信号。 谐振器是支撑在衬底（2）上并且适于在基本上平行于衬底的平面中振荡的集成微机械音叉谐振器（4）。 音叉谐振器包括从基板基本上垂直延伸的基座构件（5），连接到基座构件并且至少包括第一对基本上平行的叉齿（7,8）的独立摆动结构（6）和 电极结构（9），其布置成与叉齿相邻并连接到集成电子电路。