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    LASER INTERFEROMETER
    7.
    发明公开
    LASER INTERFEROMETER 审中-公开

    公开(公告)号：EP4095482A1

    公开(公告)日：2022-11-30

    申请号：EP22175286.8

    申请日：2022-05-25

    申请人： Seiko Epson Corporation

    发明人： YAMADA, Kohei ,  SHIMIZU, Takeshi

    IPC分类号： G01B9/02 ,  G01B9/02002 ,  G01H9/00 ,  G01P3/36 ,  G01S17/58

    摘要： Provided is a laser interferometer including a light source configured to emit laser light, an optical divider configured to divide the laser light into a first optical path and a second optical path, the laser light being emitted from the light source, an optical modulator being provided on the first optical path or the second optical path, including an oscillator that oscillates when a current is applied, and being configured to modulate the laser light by using the oscillator, a photoreceptor configured to receive the laser light and output a photoreception signal, the laser light being reflected by an object to be measured that is provided on the first optical path or the second optical path, and a demodulation circuit configured to demodulate, from the photoreception signal, a Doppler signal derived from the object to be measured, based on a reference signal and a modulation signal, wherein Iq/f ≤ 1×10 -7 is satisfied, where an amplitude value of the current applied to the oscillator that is oscillating is Iq [A] and an oscillation frequency of the oscillator is f [Hz].