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    PRESSURE SENSOR RESISTOR CONFIGURATION FOR STRESS COMPENSATION
    1.
    发明公开
    PRESSURE SENSOR RESISTOR CONFIGURATION FOR STRESS COMPENSATION 审中-实审

    公开(公告)号：EP4421468A1

    公开(公告)日：2024-08-28

    申请号：EP23158904.5

    申请日：2023-02-27

    申请人： Melexis Technologies NV

    发明人： MAES, Ben ,  VAN DER WIEL, Appo ,  VERGAUWEN, Johan

    IPC分类号： G01L9/00 ,  G01L19/00 ,  G01L19/04

    CPC分类号： G01L9/0054 ,  G01L19/04 ,  G01L19/0092

    摘要： A semiconductor pressure sensor (100) comprising a membrane (110), delineated by an edge (120), and a group of neighboring piezo resistors: a first pair of piezo resistors near the edge of the membrane (a first piezo resistor RTmemb, a second piezo resistor RLmemb) ; a second pair of piezo resistors (a third piezo resistor RTref, a fourth piezo resistor RLref) at a position where applied pressure causes reduced surface stress compared to surface stress at the position of the first and the second piezo resistor. A signal from the first piezo resistor and a signal from the second piezo resistor, corrected with a signal from the third piezo resistor and a signal from the fourth piezo resistor, are used as a measure of a pressure on the membrane.

    DIAPHRAGM PRESSURE GAUGE AND COMPOUND PRESSURE GAUGE
    4.
    发明公开
    DIAPHRAGM PRESSURE GAUGE AND COMPOUND PRESSURE GAUGE 审中-公开

    公开(公告)号：EP4261514A3

    公开(公告)日：2023-11-15

    申请号：EP22213007.2

    申请日：2022-12-13

    申请人： Vacuum Products Corporation

    发明人： HOJOH, Hisao

    IPC分类号： G01L9/00 ,  G01L19/04 ,  G01L19/06 ,  G01L19/14 ,  G01L21/30

    摘要： A diaphragm pressure gauge 10 includes: a structure 40 disposed under pressure to be measured (Pm); two diaphragms 20 attached to the structure so as to oppose each other; and a detection element 30 that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space 40A to be kept in a reference vacuum (Pr), and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.

    DIAPHRAGM PRESSURE GAUGE AND COMPOUND PRESSURE GAUGE
    5.
    发明公开
    DIAPHRAGM PRESSURE GAUGE AND COMPOUND PRESSURE GAUGE 审中-公开

    公开(公告)号：EP4261514A2

    公开(公告)日：2023-10-18

    申请号：EP22213007.2

    申请日：2022-12-13

    申请人： Vacuum Products Corporation

    发明人： HOJOH, Hisao

    IPC分类号： G01L9/00 ,  G01L19/04 ,  G01L19/06 ,  G01L19/14 ,  G01L21/30

    摘要： A diaphragm pressure gauge 10 includes: a structure 40 disposed under pressure to be measured (Pm); two diaphragms 20 attached to the structure so as to oppose each other; and a detection element 30 that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space 40A to be kept in a reference vacuum (Pr), and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.