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公开(公告)号：EP0979412B1
公开(公告)日：2002-11-13
申请号：EP97932419.1
申请日：1997-07-02
申请人： A-TECH Corporation
发明人： LAUGHLIN, Darren, R.
IPC分类号： G01P9/00
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2.发明授权
公开(公告)号：EP0704705B1
公开(公告)日：2000-01-19
申请号：EP95402045.9
申请日：1995-09-11
申请人： Aerospatiale Matra
发明人： Benes, Christian
IPC分类号： G01P9/00
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公开(公告)号：EP0472717B1
公开(公告)日：1997-06-04
申请号：EP91906925.2
申请日：1991-03-14
发明人： GREIFF, Paul
CPC分类号： G01C19/5719
摘要： A semiconductor chip gyroscopic transducer (10) is disclosed in which a semiconductor element (47) is supported in an outer element by a flexible linkage system which is in turn supported in a frame of semiconductor material (16) by another flexible linkage system which permits the element to vibrate about two axes relative to the frame. Balanced torque forces are provided by a system of buried (50, 52, 54, 56) and bridge (58, 60, 62, 64) electrodes. The stress and tension resulting from doping of these elements are released by a flexure beam (20, 22, 36, 38). The inertial mass of the inner element is balanced by formation in a central pit and on-chip electronics avoids the capacitive loading effects of long runs from high impedance sources. Flexure footings are integrated with the structure adding stability to flexures connecting the supported gyroscopic resonator element to the supporting structure, offsetting a rippling effect inherent in the oxide structure. Flexure grooves provide selective stiffness in the flexure. The bridge electrodes (58, 60, 62, 64) are additionally electrically isolated for electrical compatibility with gyroscope electronics.
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公开(公告)号：EP0674180A3
公开(公告)日：1997-01-08
申请号：EP95301949.4
申请日：1995-03-23
发明人： Nishio, Tomoyuki, c/o Honda R&D Co., Ltd. , Kuriyama, Nariaki, c/o Honda R&D Co., Ltd. , Fueki, Nobuhiro, c/o Honda R&D Co., Ltd.
IPC分类号： G01P9/00
CPC分类号： G01P9/00
摘要： A multiple-axis gas flow type angular velocity sensor (1) which can accurately and stably detect the magnitude and direction of angular velocities acting in two or more directions is comprised of a plurality of semiconductor substrates (2-5) on which are formed thermosensitive resistor elements (H W-R , H W-L ; H W-U , H W-D ) and gas passage portions (7,9,11,13) by performing precision processing using a photo-engraving process from the semiconductor production field. The semiconductor substrates (2-5) are laminated together to provide a sensor having a plurality of pairs of resistor elements (H W-R , H W-L ; H W-U , H W-D ) in a gas passage (7,9,11,13).
摘要翻译： 能够准确且稳定地检测作用于两个或更多方向的角速度的大小和方向的多轴气流型角速度传感器（1）由多个半导体基板（2-5）构成，在所述多个半导体基板上形成热敏 通过使用来自半导体生产领域的光刻工艺进行精密加工，电阻元件（HW-R，HW-L; HW-U，HW-D）和气体通道部分（7,9,11,13）。 将半导体衬底（2-5）层叠在一起以提供在气体通道（7,9,11）中具有多对电阻元件（HW-R，HW-L; HW-U，HW-D）的传感器 ，13）。
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公开(公告)号：EP0674180A2
公开(公告)日：1995-09-27
申请号：EP95301949.4
申请日：1995-03-23
发明人： Nishio, Tomoyuki, c/o Honda R&D Co., Ltd. , Kuriyama, Nariaki, c/o Honda R&D Co., Ltd. , Fueki, Nobuhiro, c/o Honda R&D Co., Ltd.
IPC分类号： G01P9/00
CPC分类号： G01P9/00
摘要： A multiple-axis gas flow type angular velocity sensor (1) which can accurately and stably detect the magnitude and direction of angular velocities acting in two or more directions is comprised of a plurality of semiconductor substrates (2-5) on which are formed thermosensitive resistor elements (H W-R , H W-L ; H W-U , H W-D ) and gas passage portions (7,9,11,13) by performing precision processing using a photo-engraving process from the semiconductor production field. The semiconductor substrates (2-5) are laminated together to provide a sensor having a plurality of pairs of resistor elements (H W-R , H W-L ; H W-U , H W-D ) in a gas passage (7,9,11,13).
摘要翻译： 可以准确且稳定地检测作用在两个或更多个方向上的角速度的大小和方向的多轴气流式角速度传感器（1）由多个半导体衬底（2-5）组成，其上形成热敏 电阻元件（HW-R，HW-L，HW-U，HW-D）和气体通路部分（7,9,11,13）。 半导体基板（2-5）层叠在一起，以提供在气体通路（7,9,11）中具有多对电阻元件（HW-R，HW-L; HW-U，HW-D）的传感器 ，13）。
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6.发明公开
公开(公告)号：EP0669536A1
公开(公告)日：1995-08-30
申请号：EP95102183.1
申请日：1995-02-16
发明人： Doi, Mizuho, c/o Kabushiki Kaisha Honda , Nishio, Tomoyuki, c/o Kabushiki Kaisha Honda , Fueki, Nobuhiro, c/o Kabushiki Kaisha Honda
摘要： A gas flow type angular velocity sensor which is capable of reliably sensing an angular velocity while accurately controlling the working gas flow with temperature compensation by using a pair of heat wires as a gas flow sensor without providing any additional gas flow sensor in the sensor body wherein a an angular velocity sensing bridge circuit is provided at its current supply source with a connected in series therewith temperature compensating circuit which is composed of a pair of series or parallel resistance elements: one is a thermosensitive resistance element disposed in a gas path and the other is a reference resistance element disposed outside the gas path.
摘要翻译： 一种气流式角速度传感器，其能够可靠地感测角速度，同时通过使用一对热导线作为气体流量传感器来精确地控制工作气体流量，同时在传感器体中不提供任何额外的气体流量传感器， 在其电流源上提供一个角速度感测桥接电路，其串联连接温度补偿电路，其由一对串联或并联电阻元件组成：一个是设置在气路中的热敏电阻元件，另一个 是设置在气体通路外的基准电阻元件。
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公开(公告)号：EP0669521A2
公开(公告)日：1995-08-30
申请号：EP95102349.8
申请日：1995-02-20
发明人： Hosoi, Takashi , Doi, Mizuho, c/o K.K. Honda Gijyutsu Kenkyusho , Kuriyama, Nariaki c/o K.K.Honda Gijyutsu Kenkyusho
CPC分类号： G01F1/6845
摘要： A gas flow type sensor with a heat-wire bridge having an excellent performance which is attained by optimizing a sputtering process and a heat treatment process for forming a three-layer film (SiN-Pt-SiN) on a semiconductor substrate and improving interfacial adhesion of the three layers and, at the same time, effectively reducing an interfacial stress produced therein. The process comprises a film forming process for sequentially depositing by sputtering SiN, Pt and SiN in three layers on a semiconductor substrate and a heat treatment process for heat treatment of the coated films at a temperature up to 600°C.
摘要翻译： 一种具有优良性能的热线桥式气体传感器，其通过优化溅射工艺和在半导体衬底上形成三层膜（SiN-Pt-SiN）并改善界面粘附性的热处理工艺而获得 的三层，同时有效地减少其中产生的界面应力。 该方法包括用于通过在半导体衬底上溅射SiN，Pt和SiN三层而顺序沉积的成膜方法和用于在高达600℃的温度下热处理涂膜的热处理工艺。
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公开(公告)号：EP0445778B1
公开(公告)日：1994-06-08
申请号：EP91103421.3
申请日：1991-03-06
发明人： Ikegami, Masayuki , Takahashi, Fumitaka , Iiboshi, Akira , Nishio, Tomoyuki , Tomiyama, Sinichi , Tsuchida, Hirotatsu , Tsuchiya, Ryoichi
IPC分类号： G01P9/00
CPC分类号： G01P9/00
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公开(公告)号：EP0569706A3
公开(公告)日：1994-01-26
申请号：EP93105795.4
申请日：1993-04-07
发明人： Yamakawa, Hiroshi, c/o Kabushiki Kaisha , Ikegami, Masayuki, c/o Kabushiki Kaisha , Hano, Tsuyoshi, c/o Kabushiki Kaisha
IPC分类号： G01P9/00
摘要： The specification discloses an angular velocity sensor of the type wherein a flow of gas forced by a pump into a gas path in the sensor body (9) through a nozzle hole and directed toward a pair of thermosensitive resistance elements provided in the gas path is deflected by the action of an angular velocity and the deflection of the gas flow is sensed by means of the thermosensitive resistance elements, and which is further provided with a thermostatically-controlled gas path (10) with heating means (11) for keeping the gas flow at a constant temperature with no affection of ambient temperature variations and also provided with a gas path for absorbing pulsations of the gas flow caused by pumping operations.
摘要翻译： 该说明书公开了一种类型的角速度传感器，其中通过喷嘴孔将泵强制进入传感器主体（9）中的气体路径并且朝向设置在气体路径中的一对热敏电阻元件的气体的流动被偏转 通过角速度的作用并且通过热敏电阻元件检测气流的偏转，并且还设置有具有加热装置（11）的恒温控制气路（10），用于保持气流 在恒定温度下不受环境温度变化的影响，并且还设有用于吸收由泵送操作引起的气流脉动的气路。
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