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公开(公告)号：EP0445778B1
公开(公告)日：1994-06-08
申请号：EP91103421.3
申请日：1991-03-06
发明人： Ikegami, Masayuki , Takahashi, Fumitaka , Iiboshi, Akira , Nishio, Tomoyuki , Tomiyama, Sinichi , Tsuchida, Hirotatsu , Tsuchiya, Ryoichi
IPC分类号： G01P9/00
CPC分类号： G01P9/00
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公开(公告)号：EP0445778A1
公开(公告)日：1991-09-11
申请号：EP91103421.3
申请日：1991-03-06
发明人： Ikegami, Masayuki , Takahashi, Fumitaka , Iiboshi, Akira , Nishio, Tomoyuki , Tomiyama, Sinichi , Tsuchida, Hirotatsu , Tsuchiya, Ryoichi
IPC分类号： G01P9/00
CPC分类号： G01P9/00
摘要： An angular velocity sensor according to the present invention, wherein an internal temperature of the sensor body is sensed by a temperature sensor and adjusted to be equal to a preset value; an offset value is obtained from an output of the angular velocity sensor at the preset internal temperature with no angular velocity acting thereon and an angular velocity signal at the preset internal temperature is compensated for the obtained offset value; and also an angular velocity detection signal obtained before the internal temperature reaching to the preset value is compensated for an offset value determined on the base of a value readout from a memory table storing therein characteristic offset values varying with the internal temperature of the sensor body.
摘要翻译： 根据本发明的角速度传感器，其中，传感器主体的内部温度由温度传感器感测并且被调节为等于预设值; 从预先设定的内部温度下的角速度传感器的输出得到偏移值，而不作用角速度，并且对所获得的偏移值补偿预设内部温度下的角速度信号; 并且在内部温度达到预设值之前获得的角速度检测信号被补偿了基于从存储表中读出的值确定的偏移值，该存储表中存储有随传感器主体的内部温度变化的特征偏移值。
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公开(公告)号：EP0405452A2
公开(公告)日：1991-01-02
申请号：EP90112140.0
申请日：1990-06-26
IPC分类号： G01P9/00
CPC分类号： G01P9/00
摘要： A gas flow type angular velocity sensor comprising two semiconductor substrates with all components formed thereon by use of a semiconductor technology and an IC technology, which are coupled with each other to form therein a pair of heat wires, a gas path and a nozzle holes for injecting a gas flow toward the paired heat wires in the gas path. Two heat wires of the pair changes their resistance-temperature characteristics in accordance with a deflection of the gas flow due to the action of angular velocity and a difference between two changed values is picked up and amplified by a resistance bridge circuit and an amplifier circuit formed on the semiconductor substrates to produce an output signal proportional to the angular velocity to be measured. A miniature pump formed on semiconductor substrates and drivable by a piezoelectric element provides a stabilized gas flow in the sensor. Thus constructed sensor is compact, accurate and suitable for mass-production and free from disadvantages of conventional sensors.
摘要翻译： 一种气流式角速度传感器，包括通过使用半导体技术和IC技术在其上形成的所有部件的两个半导体基板，它们彼此耦合以在其中形成一对热丝，气路和喷嘴孔 向气体路径中的成对热丝喷射气流。 该对中的两根热丝根据角速度的作用而根据气流的偏转而改变它们的电阻温度特性，并且两个改变值之间的差被拾取并通过电阻桥电路和形成的放大器电路放大 在半导体衬底上产生与要测量的角速度成比例的输出信号。 形成在半导体基板上并由压电元件驱动的微型泵在传感器中提供稳定的气流。 这样构造的传感器是紧凑的，准确的并且适合于批量生产并且没有常规传感器的缺点。
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公开(公告)号：EP0664456B1
公开(公告)日：1999-07-07
申请号：EP95300345.6
申请日：1995-01-20
发明人： Hosoi, Takashi , Hiyama, Satoshi , Shinotuka, Sukeyuki , Doi, Mizuho , Yamakawa, Hiroshi , Kuriyama, Nariaki , Nishio, Tomoyuki , Inaba, Atsushi , Fueki, Nobuhiro
CPC分类号： G01P15/18 , G01P15/008 , G01P15/12
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公开(公告)号：EP0302736B1
公开(公告)日：1992-06-03
申请号：EP88307240.7
申请日：1988-08-05
IPC分类号： G09B29/10
CPC分类号： G01C21/30 , G09B29/106
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公开(公告)号：EP0324620A1
公开(公告)日：1989-07-19
申请号：EP89300266.7
申请日：1989-01-12
CPC分类号： G01P9/00
摘要： Disclosed is a gas rate sensor system which provides an output signal, representing an angular velocity of the gas rate sensor, when the gas flows more on one of its thermal sensing elements (14a or 14b) than on the other (14a and 14b), due to the effect of the angular velocity on the gas flow. The gas rate sensor system can carry out an arithmetic operation for correction of the gas rate sensor output signal, using and updatable offset value to account for the instantaneous temperature change in the gas rate sensor.
摘要翻译： 公开了一种气体速率传感器系统，当气体在其热传感元件（14a或14b）中的一个上流动比在另一个（14a和14b）上流动更多时提供表示气体速率传感器的角速度的输出信号， 由于角速度对气流的影响。 气体速率传感器系统可以执行用于校正气体速率传感器输出信号的算术运算，使用和可更新的偏移值来考虑气体速率传感器中的瞬时温度变化。
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公开(公告)号：EP0664456A1
公开(公告)日：1995-07-26
申请号：EP95300345.6
申请日：1995-01-20
发明人： Hosoi, Takashi , Hiyama, Satoshi , Shinotuka, Sukeyuki , Doi, Mizuho , Yamakawa, Hiroshi , Kuriyama, Nariaki , Nishio, Tomoyuki , Inaba, Atsushi , Fueki, Nobuhiro
CPC分类号： G01P15/18 , G01P15/008 , G01P15/12
摘要： An acceleration sensor, incorporating a gas-filled closed space in which are disposed resistor elements for heating and/or sensing temperature, is fabricated on a semiconductor or insulating substrate through photoengraving to provide a small, accurate and reliable sensor. Various arrangements of heaters, temperature-sensing resistors and heating and temperature-sensing resistors are described, which detect acceleration direction as well as strength, and are advantageously but not necessarily fabricated using semiconductor technology. In the shown arrangement, heater (12) heats gas in a space (4). An acceleration leftwards causes gas to move to the right, so that resistor (14) heats up and increases its resistance, whilst resistor (13) cools and reduces its resistance. Thus, detection of resistance changes gives acceleration amount and direction. One of the temperature-sensing elements (13,14) may be removed. All three elements (12-14) may be replaced by two elements which both heat the gas and sense temperature.
摘要翻译： 通过照相制造在半导体或绝缘衬底上制造加入了充气封闭空间的加速度传感器，在所述充气封闭空间中设置用于加热和/或感测温度的电阻元件，以提供小型，精确和可靠的传感器。 描述了加热器，温度感测电阻器以及加热和温度感测电阻器的各种布置，其检测加速度方向以及强度，并且有利但不一定使用半导体技术制造。 在所示的布置中，加热器（12）加热空间（4）中的气体。 加速度向左导致气体向右移动，以使电阻器（14）加热并增加其电阻，同时电阻器（13）冷却并降低其电阻。 因此，电阻变化的检测给出加速度量和方向。 其中一个温度感测元件（13,14）可以被移除。 所有三个元件（12-14）都可以由两个加热气体和感测温度的元件代替。
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公开(公告)号：EP0405452A3
公开(公告)日：1991-03-27
申请号：EP90112140.0
申请日：1990-06-26
IPC分类号： G01P9/00
CPC分类号： G01P9/00
摘要： A gas flow type angular velocity sensor comprising two semiconductor substrates with all components formed thereon by use of a semiconductor technology and an IC technology, which are coupled with each other to form therein a pair of heat wires, a gas path and a nozzle holes for injecting a gas flow toward the paired heat wires in the gas path. Two heat wires of the pair changes their resistance-temperature characteristics in accordance with a deflection of the gas flow due to the action of angular velocity and a difference between two changed values is picked up and amplified by a resistance bridge circuit and an amplifier circuit formed on the semiconductor substrates to produce an output signal proportional to the angular velocity to be measured. A miniature pump formed on semiconductor substrates and drivable by a piezoelectric element provides a stabilized gas flow in the sensor. Thus constructed sensor is compact, accurate and suitable for mass-production and free from disadvantages of conventional sensors.
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