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19 条记录 (耗时 0.01 秒)

    SCANNING PROBE MICROSCOPE HAVING SUPPORT STAGE INCORPORATING A KINEMATIC FLEXURE ARRANGEMENT
    1.
    发明公开
    SCANNING PROBE MICROSCOPE HAVING SUPPORT STAGE INCORPORATING A KINEMATIC FLEXURE ARRANGEMENT 审中-公开
    有进阶段收购探针显微镜时的运动FLEX铀ORDER

    公开(公告)号：EP2494367A4

    公开(公告)日：2014-06-25

    申请号：EP10830497

    申请日：2010-10-29

    申请人： BRUKER NANO INC

    发明人： MASSER CARL

    IPC分类号： G01Q10/04 ,  G01Q70/04

    CPC分类号： B82Y35/00 ,  G01Q10/04 ,  G01Q10/065 ,  G01Q70/04

    摘要： A scanning probe microscope (SPM) has a piezoelectric actuator-based tube scanner to which a probe is attached and which is moveable in three planes by the application of a voltage to the piezoelectric tube. A set of flexures flex with the displacement of the tube and strain gauges attached to the flexures measure the flex of the flexures to provide feedback as to the displacement of the tube during the scanning of an object. The strain gauges and flexures form a kinematic sensing frame or arrangement in which a single constraint is provided for each degree of freedom and in which the constraints are at least substantially orthogonal to one another.

    CANTILEVER EXCITATION DEVICE AND SCANNING PROBE MICROSCOPE
    4.
    发明公开
    CANTILEVER EXCITATION DEVICE AND SCANNING PROBE MICROSCOPE 有权
    TRAGARMAKTIVIERUNGSVORRICHTUNG UND ABTASTSONDENMIKROSKOP

    公开(公告)号：EP2463665A1

    公开(公告)日：2012-06-13

    申请号：EP10806256.3

    申请日：2010-08-06

    申请人： National University Corporation Kanazawa University

    发明人： ASAKAWA, Hitoshi ,  FUKUMA, Takeshi

    IPC分类号： G01Q70/04 ,  G01Q10/00 ,  G01Q30/14 ,  G01Q60/24 ,  G01Q70/02

    CPC分类号： G01Q30/14 ,  G01Q60/32 ,  G01Q70/04 ,  Y10T29/42

    摘要： Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).

    摘要翻译： 提供了能够通过简单的结构来防止谐振特性的复杂化的悬臂励磁装置。 悬臂激励装置（1）设置有悬臂（7），用于保持悬臂（7）的悬臂支架（3）和附接到悬臂支架（3）的压电振动器（5）。 悬臂支架（3）包括具有与用于通过弹性变形传递压电振动器的振动的压电振动器（5）的声阻抗不同的保持器主体部（11）（第一部分）和附件（13）（ 第二部分）具有不同于用于形成材料边界的第一部分的声阻抗，以阻止声波在其与第一部分之间的传播。 第一和第二部分介于压电振动器（5）和悬臂（7）之间。

    METHOD AND APPARATUS TO COMPENSATE FOR DEFLECTION ARTIFACTS IN AN ATOMIC FORCE MICROSCOPE
    6.
    发明公开
    METHOD AND APPARATUS TO COMPENSATE FOR DEFLECTION ARTIFACTS IN AN ATOMIC FORCE MICROSCOPE 审中-公开
    VERFAHREN UND VORRICHTUNG ZUR KOMPENSATION VON ABLENKUNGSARTEFAKTEN IN EINEM ATOMKRAFTMIKROSKOP

    公开(公告)号：EP3111239A1

    公开(公告)日：2017-01-04

    申请号：EP15754661.5

    申请日：2015-03-02

    申请人： Bruker Nano, Inc.

    发明人： SU, Chanmin ,  HU, Shuiqing

    IPC分类号： G01Q70/04 ,  G01Q30/06

    CPC分类号： G01Q40/00 ,  G01Q30/06 ,  G01Q60/34 ,  G01Q60/58

    摘要： A method of compensating for an artifact in data collected using a standard atomic force microscope (AFM) operating in an oscillating mode. The artifact is caused by deflection of the probe not related to actual probe-sample interaction and the method includes compensating for thermal induced bending of the probe of the AFM by measuring a DC component of the measured deflection. The DC component of deflection is identified by calibrating the optical deflection detection apparatus and monitoring movement of the mean deflection, thereby allowing the preferred embodiments to minimize the adverse effect due to the artifact. Notably, plotting the DC deflection profile yields a corresponding temperature profile of the sample.

    摘要翻译： 使用以振荡模式操作的标准原子力显微镜（AFM）收集的数据中补偿伪影的方法。 该伪影是由与探头 - 样品相互作用无关的探针偏转引起的，该方法包括通过测量测得的偏转的直流分量补偿AFM的探针的热诱导弯曲。 通过校准光学偏转检测装置和监测平均偏转的运动来识别偏转的直流分量，从而允许优选实施例将由于伪像引起的不利影响最小化。 值得注意的是，绘制直流偏转曲线得到样品的相应温度曲线。

    BALANCED MOMENTUM PROBE HOLDER
    8.
    发明公开
    BALANCED MOMENTUM PROBE HOLDER 审中-公开
    PULSE BALANCE探头支架

    公开(公告)号：EP1362230A4

    公开(公告)日：2008-04-02

    申请号：EP02704237

    申请日：2002-01-18

    申请人： VEECO INSTR INC

    发明人： MASSIE JAMES R

    IPC分类号： G01B21/00 ,  G01Q10/00 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q60/24 ,  G01Q70/00 ,  G01Q70/02 ,  G01Q70/04 ,  G01N13/16

    CPC分类号： G01Q70/04 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q70/02

    摘要： A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members (146, 150) each having extensible and retractable distal ends (148, 152). The distal ends extend or retract substantially simultaneously in response to a signal from a detector (190) thus balancing the momentums of the first and second members and reducing the net momemtum of the probe holder (114B) to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.