公开(公告)号：EP3923313B1

公开(公告)日：2023-09-27

申请号：EP20843228.6

申请日：2020-07-13

发明人： YASUDA, Hiroshi ,  OOAE, Yoshihisa ,  SHIBAOKA, Tatsuya ,  MURATA, Hidekazu

IPC分类号： H01J1/05 ,  H01J37/065 ,  H01J37/305 ,  H01J1/06 ,  H01J1/10 ,  H01J35/06 ,  H01J9/04

公开(公告)号：EP3923313A1

公开(公告)日：2021-12-15

申请号：EP20843228.6

申请日：2020-07-13

申请人： Param Corporation

发明人： YASUDA, Hiroshi ,  OOAE, Yoshihisa ,  SHIBAOKA, Tatsuya ,  MURATA, Hidekazu

IPC分类号： H01J37/06 ,  H01J37/305 ,  H01J1/05 ,  H01J1/06 ,  H01J1/10

摘要： An electron gun device according to the present invention emits an electron beam by means of heating to a high temperature in a vacuum. According to the present invention, the surface of a material (108, 125), which emits an electron beam, is a hydrogenated metal that is melted and in a liquid state during a high-temperature operation; the liquid hydrogenated metal is contained in a hollow cover tube container (102, 124), which is in a solid state during the high-temperature operation, in the form of a hydrogenated liquid metal or in the form of a liquid metal before hydrogenation, and heated together with the cover tube container (102, 124) to a high temperature; subsequently, the hydrogenated liquid metal is exposed from the cover tube container (102, 124) and forms a liquid surface where gravity, the electric field and the surface tension of the liquid surface are balanced; and an electron beam is emitted from the exposed surface of the hydrogenated liquid metal.