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公开(公告)号:EP4179130A1
公开(公告)日:2023-05-17
申请号:EP20945151.7
申请日:2020-07-13
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公开(公告)号:EP3959764A1
公开(公告)日:2022-03-02
申请号:EP20794850.6
申请日:2020-03-25
发明人: HERLE, Subramanya P.
IPC分类号: H01M4/134 , H01M4/62 , H01M4/66 , H01M4/38 , H01M10/0562 , C23C28/04 , C23C28/00 , C23G5/00 , H01M10/052
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公开(公告)号:EP2954076B1
公开(公告)日:2021-11-24
申请号:EP13712601.7
申请日:2013-02-06
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公开(公告)号:EP3444380B1
公开(公告)日:2021-04-14
申请号:EP17782736.7
申请日:2017-02-14
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公开(公告)号:EP2783762B1
公开(公告)日:2021-04-07
申请号:EP12850922.1
申请日:2012-11-20
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公开(公告)号:EP3557173B1
公开(公告)日:2020-12-02
申请号:EP17881498.4
申请日:2017-08-24
申请人: POSCO
发明人: LIM, Seung Ho , KIM, Goo Hwa , NAM, Kyung Hoon , PARK, Yeong Seon
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公开(公告)号:EP3631049A1
公开(公告)日:2020-04-08
申请号:EP18732489.2
申请日:2018-05-24
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公开(公告)号:EP3394321A1
公开(公告)日:2018-10-31
申请号:EP16898086.0
申请日:2016-04-04
发明人: CHANG, Chi-Hao , WU, Kuan-Ting , LIN, Yu-Ling
CPC分类号: B29C45/0053 , B29C45/14 , B29C2045/0079 , C25D11/024 , C25D11/026 , C25D11/06
摘要: The present subject matter relates to fabrication of micro-arc oxidation (MAO) based insert-molded components. In an example implementation, a method of fabricating a MAO based insert-molded component comprises forming an insert-molded component and oxidizing the insert-molded component through MAO. The insert-molded component has a metal body molded with a plastic body. On oxidation of the insert-molded component through MAO an oxide layer is formed on the metal body.
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公开(公告)号:EP3161861A4
公开(公告)日:2018-07-18
申请号:EP15815902
申请日:2015-06-04
申请人: TOKYO ELECTRON LTD
发明人: CHEN LEE , ZHANG YING
CPC分类号: C23F1/02 , C23F1/08 , C23F4/00 , C23G5/00 , H01J37/32862 , H01J2237/334
摘要: A method for anisotropically etching a feature in a Cu-containing layer includes providing a substrate having a Cu-containing layer and a patterned etch mask formed on the Cu-containing layer such that on exposed Cu-containing layer is exposed to processing through the patterned etch mask, passivating a first surface of the exposed Cu-containing layer, and inhibiting passivation of a second surface of the Cu-containing layer. A Cu compound is formed on said second surface of the Cu-containing layer, and the Cu compound is removed from the second surface of the Cu-containing layer to anisotropically etch a feature in the Cu-containing layer.
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