ANISOTROPIC ETCH OF COPPER USING PASSIVATION
    10.
    发明公开

    公开(公告)号:EP3161861A4

    公开(公告)日:2018-07-18

    申请号:EP15815902

    申请日:2015-06-04

    发明人: CHEN LEE ZHANG YING

    IPC分类号: C23F4/00 C23G5/00 H01J37/32

    摘要: A method for anisotropically etching a feature in a Cu-containing layer includes providing a substrate having a Cu-containing layer and a patterned etch mask formed on the Cu-containing layer such that on exposed Cu-containing layer is exposed to processing through the patterned etch mask, passivating a first surface of the exposed Cu-containing layer, and inhibiting passivation of a second surface of the Cu-containing layer. A Cu compound is formed on said second surface of the Cu-containing layer, and the Cu compound is removed from the second surface of the Cu-containing layer to anisotropically etch a feature in the Cu-containing layer.