CMOS-COMPATIBLE DEW POINT SENSOR DEVICE AND METHOD OF DETERMINING A DEW POINT
    2.
    发明公开
    CMOS-COMPATIBLE DEW POINT SENSOR DEVICE AND METHOD OF DETERMINING A DEW POINT 审中-公开
    与CMOS兼容的露点传感器装置和确定露点的方法

    公开(公告)号:EP3211404A1

    公开(公告)日:2017-08-30

    申请号:EP16157384.5

    申请日:2016-02-25

    申请人: ams AG

    IPC分类号: G01N25/68

    CPC分类号: G01N25/68

    摘要: The dew point sensor device comprises a semiconductor substrate (1), a Peltier element (2), which may be integrated in the substrate (1), a temperature sensor (3), a capacitor (4) at an exposed surface (9) above the substrate (1) and in the vicinity of the temperature sensor (3), and an electronic circuit (5), which may also be integrated in the substrate (1). The capacitor (4) comprises a plurality of capacitor elements (40) each having a capacitance, and the electronic circuit (5) is provided for an individual determination of the capacitances. The dew point is determined by a measurement of the variation of the capacitances at decreasing temperatures and a measurement of the relevant temperature.

    摘要翻译: 露点传感器装置包括半导体衬底(1),可集成在衬底(1)中的珀耳帖元件(2),温度传感器(3),暴露表面(9)处的电容器(4) (1)上方并且在温度传感器(3)附近;以及电子电路(5),其也可以集成在衬底(1)中。 电容器(4)包括多个电容器元件(40),每个电容器元件具有电容,并且电子电路(5)被提供用于单独确定电容。 露点是通过测量温度下降时电容的变化以及相关温度的测量来确定的。

    VERFAHREN ZUR DETEKTION VON KONDENSATIONEN AN OBERFLÄCHEN
    3.
    发明授权
    VERFAHREN ZUR DETEKTION VON KONDENSATIONEN AN OBERFLÄCHEN 失效
    方法冷凝在表面上检测

    公开(公告)号:EP1021704B1

    公开(公告)日:2006-07-05

    申请号:EP98967119.3

    申请日:1998-02-27

    IPC分类号: G01N25/68

    CPC分类号: G01N27/223

    摘要: The object of the invention is to provide a process and sensor arrangement for detecting condensations on surfaces characterised by a simple design and simple signal evaluation, and which avoid errors caused by dirt or dew formation delays. This object is attained by a process in which the temperature is measured at the capacitor by an electric resistance sensor which at the same time heats the arrangement, so that when the arrangement cools down a detectable water film is already formed a few Kelvin degrees below the dew point, which causes the arrangement to generate a signal that can be evaluated. A process and sensor arrangement are disclosed for detecting condensations on surfaces by means of a stray field capacitor arranged on a support layer.

    SENSOREINHEIT, VORRICHTUNG UND VERFAHREN ZUR VERMEIDUNG VON KONDENSATION AUF EINER OBERFL CHE
    4.
    发明公开
    SENSOREINHEIT, VORRICHTUNG UND VERFAHREN ZUR VERMEIDUNG VON KONDENSATION AUF EINER OBERFL CHE 审中-公开
    传感器单元的设备和方法避凝结在其表面CHE

    公开(公告)号:EP1521693A1

    公开(公告)日:2005-04-13

    申请号:EP03762484.8

    申请日:2003-06-10

    申请人: Bartec GmbH

    IPC分类号: B60S1/02 G01N25/68

    CPC分类号: G01N25/68 B60S1/02

    摘要: The invention relates to a sensor unit for a device for avoiding condensation of a gas, in particular water vapour, on a surface of an object, comprising a temperature measuring device, for measuring an object temperature, a dew-point determining device for determining a dew-point temperature of the gas in an atmosphere surrounding said object and a regulation and control device which cooperates with the temperature measuring device and the dew-point determining device and by means of which an actuator for increasing a temperature difference between the object temperature and the dew-point temperature may be controlled a function of the data obtained from the temperature measuring device and the dew-point determining device such that a dropping of the object temperature to or below the dew-point temperature is avoided. According to the invention, the sensor unit is characterised in that the dew-point determining device is embodied as a dew-point sensor for the direct determination of the dew point and the temperature measuring device is embodied as a contactless temperature sensor. The invention further relates to a device and a method for avoiding the condensation of a gas, in particular water vapour, on a surface of an object.

    AN INSTRUMENT TO MEASURE THE AMOUNT OF CONDENSATION DURING A GASEOUS STERILISATION PROCESS
    6.
    发明公开
    AN INSTRUMENT TO MEASURE THE AMOUNT OF CONDENSATION DURING A GASEOUS STERILISATION PROCESS 审中-公开
    CHAMBER用于测量缩合度在腔室内的燃气灭菌过程

    公开(公告)号:EP1266205A1

    公开(公告)日:2002-12-18

    申请号:EP01914014.4

    申请日:2001-03-20

    发明人: MARTIN, Anthony

    IPC分类号: G01N21/55 G01N25/68

    CPC分类号: G01N21/552 G01V8/14

    摘要: The disclosure relates to a condensation monitor for measuring condensation on one side of a window (10) from the other side thereof, the window being located in an enclosure (23) mounted on a chamber wall with a part opening with the interior of the chamber. The monitor comprises a pair of optical prisms (14, 20) positioned on the other side of the window at spaced apart locations to provide transmission of an obliquely angled beam of light into the window and transmission of an obliquely angled beam of light out of the window. A light source (12, 13) adjacent one of the devices provides a parallel beam of light to be transmitted by said device into the window to travel along the window by reflection from side to side to the other device from where the light beam emerges and a ligth sensor (22) measures the amount of light emerging from the window. The amount of light transmitted along the portion between the optical devices depends on the amount of condensation on said one side of the window, condensation facilites losses of the light through said one side by refraction reducing the amount of light transmitted along the window to the light sensor.

    DEW POINT HYGROMETERS AND DEW SENSORS
    7.
    发明公开
    DEW POINT HYGROMETERS AND DEW SENSORS 有权
    露点和结露

    公开(公告)号:EP1125115A1

    公开(公告)日:2001-08-22

    申请号:EP99952776.5

    申请日:1999-10-29

    申请人: Optiguide Ltd.

    发明人: ZLOCHIN, Igor

    IPC分类号: G01N25/68

    CPC分类号: G01N25/68

    摘要: The invention concerns dew point hygrometers based on condensation of dew on ends of optical fibers, or on surfaces of an optical prism. The invention also concerns a dew sensor for determining the natural dew condensation by optical means and a dew sensor capable of detecting dew by detecting a change in capacitance.

    VERFAHREN UND SENSORANORDNUNG ZUR DETEKTION VON KONDENSATIONEN AN OBERFLÄCHEN
    8.
    发明公开
    VERFAHREN UND SENSORANORDNUNG ZUR DETEKTION VON KONDENSATIONEN AN OBERFLÄCHEN 失效
    方法冷凝在表面上检测

    公开(公告)号:EP1021704A1

    公开(公告)日:2000-07-26

    申请号:EP98967119.3

    申请日:1998-02-27

    IPC分类号: G01N25/68

    CPC分类号: G01N27/223

    摘要: The object of the invention is to provide a process and sensor arrangement for detecting condensations on surfaces characterised by a simple design and simple signal evaluation, and which avoid errors caused by dirt or dew formation delays. This object is attained by a process in which the temperature is measured at the capacitor by an electric resistance sensor which at the same time heats the arrangement, so that when the arrangement cools down a detectable water film is already formed a few Kelvin degrees below the dew point, which causes the arrangement to generate a signal that can be evaluated. A process and sensor arrangement are disclosed for detecting condensations on surfaces by means of a stray field capacitor arranged on a support layer.

    Dew-point sensor
    9.
    发明公开
    Dew-point sensor 审中-公开
    Taupunktsensor

    公开(公告)号:EP1001259A2

    公开(公告)日:2000-05-17

    申请号:EP99309042.2

    申请日:1999-11-12

    IPC分类号: G01N25/68

    摘要: A dewpoint sensor comprises (100) a pressure vessel (104) having an entry port (106), an exit port (108), and a temperature controlled plate (110). A quartz crystal resonator (112) is housed within the pressure vessel (104) and disposed in intimate contact with the temperature controlled plate (110). A temperature sensor (114) is disposed to generate signals representative of the quartz crystal resonator temperature. Circuitry (116) is coupled to the quartz crystal resonator (112) and the temperature sensor (114), which circuitry is configured to control the temperature of the quartz crystal resonator, to measure the frequency of the quartz crystal resonator and to monitor the frequency of the quartz crystal resonator when exposed to a flow (118) between the entry port (106) and the exit port (108) so as to calculate a dewpoint value of the flow.

    摘要翻译: 露点传感器包括(100)具有入口(106),出口(108)和温度控制板(110)的压力容器(104)。 石英晶体谐振器(112)容纳在压力容器(104)内并与温度控制板(110)紧密接触。 设置温度传感器(114)以产生表示石英晶体谐振器温度的信号。 电路(116)耦合到石英晶体谐振器(112)和温度传感器(114),该电路被配置为控制石英晶体谐振器的温度,以测量石英晶体谐振器的频率并监视频率 当暴露于进入端口(106)和出口(108)之间的流(118)时,以便计算流量的露点值。