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5 条记录 (耗时 0.007 秒)

    PRESSURE SENSOR MODULE
    1.
    发明公开
    PRESSURE SENSOR MODULE 审中-公开
    压力传感器模块

    公开(公告)号：EP3279630A1

    公开(公告)日：2018-02-07

    申请号：EP16182611.0

    申请日：2016-08-03

    申请人： ams AG

    发明人： Daamen, Roel ,  Vijayakumar, Kailash ,  Bouman, Hendrik ,  Pijnenburg, Remco Henricus Wilhelmus ,  van Lippen, Twan

    IPC分类号： G01L9/00 ,  B81C1/00

    CPC分类号： G01L9/0048 ,  B81B2201/0264 ,  B81C1/00039 ,  G01L9/0072

    摘要： A pressure sensor module (10) comprises a base electrode (14) surrounding at least a part of a bottom electrode (15), and an anchor arrangement (20) on top of the base electrode (14) comprising at least two electrically conductive walls (19) that both surround at least a part of the bottom electrode (15). The pressure sensor module (10) further comprises an electrically conductive layer (18) that covers at least the bottom electrode (15) and the anchor arrangement (20) such that a cavity (17) is formed between the bottom electrode (15), the anchor arrangement (20) and the electrically conductive layer (18). The proportionate area of the electrically conductive walls (19) in a cross section extending from the surface (32) of the inner wall of the anchor arrangement (20) facing the cavity (17) to the surface (33) of the outermost wall of the anchor arrangement (20) facing away from the cavity (17) in a plane parallel to the plane of the bottom electrode (15) is equal to or less than 10 %.

    摘要翻译： 一种压力传感器模块（10），包括围绕底部电极（15）的至少一部分的底部电极（14）和位于底部电极（14）顶部上的锚定装置（20），该锚定装置包括至少两个导电壁 （19），其均包围所述底部电极（15）的至少一部分。 所述压力传感器模块（10）还包括导电层（18），所述导电层至少覆盖所述底部电极（15）和所述锚定装置（20），使得在所述底部电极（15），所述底部电极 锚定装置（20）和导电层（18）。 导电壁（19）在从锚定装置（20）的内壁的面向空腔（17）的表面（32）延伸到空腔（17）的最外壁的表面（33）的横截面中的比例区域 在平行于底部电极（15）的平面的平面中远离空腔（17）的锚定装置（20）等于或小于10％。

    CMOS-COMPATIBLE DEW POINT SENSOR DEVICE AND METHOD OF DETERMINING A DEW POINT
    3.
    发明授权
    CMOS-COMPATIBLE DEW POINT SENSOR DEVICE AND METHOD OF DETERMINING A DEW POINT 有权

    公开(公告)号：EP3211404B1

    公开(公告)日：2018-08-22

    申请号：EP16157384.5

    申请日：2016-02-25

    申请人： ams AG

    发明人： Soccol, Dimitri ,  Nguyen Hoang, Viet ,  Van Steenwinckel, David ,  Daamen, Roel ,  Bancken, Pascal

    IPC分类号： G01N25/68

    CPC分类号： G01N25/68

    摘要： The dew point sensor device comprises a semiconductor substrate (1), a Peltier element (2), which may be integrated in the substrate (1), a temperature sensor (3), a capacitor (4) at an exposed surface (9) above the substrate (1) and in the vicinity of the temperature sensor (3), and an electronic circuit (5), which may also be integrated in the substrate (1). The capacitor (4) comprises a plurality of capacitor elements (40) each having a capacitance, and the electronic circuit (5) is provided for an individual determination of the capacitances. The dew point is determined by a measurement of the variation of the capacitances at decreasing temperatures and a measurement of the relevant temperature.

    CMOS-COMPATIBLE DEW POINT SENSOR DEVICE AND METHOD OF DETERMINING A DEW POINT
    4.
    发明公开
    CMOS-COMPATIBLE DEW POINT SENSOR DEVICE AND METHOD OF DETERMINING A DEW POINT 审中-公开
    与CMOS兼容的露点传感器装置和确定露点的方法

    公开(公告)号：EP3211404A1

    公开(公告)日：2017-08-30

    申请号：EP16157384.5

    申请日：2016-02-25

    申请人： ams AG

    发明人： Soccol, Dimitri ,  Nguyen Hoang, Viet ,  Van Steenwinckel, David ,  Daamen, Roel ,  Bancken, Pascal

    IPC分类号： G01N25/68

    CPC分类号： G01N25/68

    摘要： The dew point sensor device comprises a semiconductor substrate (1), a Peltier element (2), which may be integrated in the substrate (1), a temperature sensor (3), a capacitor (4) at an exposed surface (9) above the substrate (1) and in the vicinity of the temperature sensor (3), and an electronic circuit (5), which may also be integrated in the substrate (1). The capacitor (4) comprises a plurality of capacitor elements (40) each having a capacitance, and the electronic circuit (5) is provided for an individual determination of the capacitances. The dew point is determined by a measurement of the variation of the capacitances at decreasing temperatures and a measurement of the relevant temperature.

    摘要翻译： 露点传感器装置包括半导体衬底（1），可集成在衬底（1）中的珀耳帖元件（2），温度传感器（3），暴露表面（9）处的电容器（4） （1）上方并且在温度传感器（3）附近;以及电子电路（5），其也可以集成在衬底（1）中。 电容器（4）包括多个电容器元件（40），每个电容器元件具有电容，并且电子电路（5）被提供用于单独确定电容。 露点是通过测量温度下降时电容的变化以及相关温度的测量来确定的。