公开(公告)号：JP2001176746A

公开(公告)日：2001-06-29

申请号：JP2000311494

申请日：2000-10-12

Applicant: LUCENT TECHNOLOGIES INC

Inventor： CHU JEROME TSU-RONG

IPC: H01F41/04 ,  H01F17/00 ,  H01L21/02 ,  H01L21/71 ,  H01L21/822 ,  H01L27/04 ,  H01L27/08

Abstract: PROBLEM TO BE SOLVED: To provide a method by which a lateral high-Q inductor can be formed in a semiconductor device. SOLUTION: This method of manufacturing the semiconductor device, having the inductor which is formed of a plurality of adjacent loops connected in series along the lateral axis of the semiconductor device, with each loop having a pair of bottom and top legs, comprises a step of forming the lower legs on a first surface, a step of depositing a second substrate layer over the first substrate, and a step of forming the pair of side legs for each loop through the second substrate layer. The method also comprises a step of forming upper legs connecting pairs of side legs which extend from adjacent bottom legs.