中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

21 records (took 0.015 seconds)

    APPARATUS FOR MEASURING ABSORPTION ENERGY DISTRIBUTION
    16.
    发明专利
    APPARATUS FOR MEASURING ABSORPTION ENERGY DISTRIBUTION 失效

    公开(公告)号：JPS6097289A

    公开(公告)日：1985-05-31

    申请号：JP20534983

    申请日：1983-11-01

    Applicant: KOGYO GIJUTSUIN

    Inventor： TOMIMASU TAKIO ,  MISUMI TOMOHISA ,  YAMAZAKI TETSUO

    IPC: G01T1/29 ,  G01T1/12 ,  G01T3/04

    Abstract: PURPOSE:To make it possible to measure an absorption dose or absorption energy distribution with high accuracy without being affected by radioactive rays or an electromagnetic wave, by surrounding a heat sensor by an isolation film. CONSTITUTION:A heat sensor 1 for detecting the rising in the temp. of a liquid is surrounded by an isolation film 2. This isolation film is one inferior to heat conductivity and withstanding heat such as a Kapton film and, at the same time, it is necessary to constitute said film 2 from a substance having radiation resistance stronger than that of said Kapton film and hot corroded even by a liquid. In addition in order to reduce the disturbance of a radiation field in a liquid caused by the presence of the isolation film, a substance near to a liquid in an effective atomic number and capable of being made thin as possible is desirably used.

    X-RAY GENERATOR
    17.
    发明专利
    X-RAY GENERATOR 失效

    公开(公告)号：JPS6068538A

    公开(公告)日：1985-04-19

    申请号：JP17551783

    申请日：1983-09-22

    Applicant: KOGYO GIJUTSUIN

    Inventor： TOMIMASU TAKIO ,  NOGUCHI TSUTOMU ,  YANO HIROSHI

    IPC: G21K1/093 ,  H01J35/00 ,  H01L21/027 ,  H05H7/00 ,  H05H13/04

    Abstract: PURPOSE:To enable homogeneous stable irradiation of X-rays to be performed over a wide area by installing a variable-field-producing variable electromagnet which scans the electronic orbit in vertical direction with respect to time. CONSTITUTION:A variable electromagnet (diode) 11 used to change the optical path and having a lateral field component (Hh) is installed in the immediate back of a lateral-focusing tetraode electromagnet 9. At this point, an electron flux longitudinally focused with a longitudinal-focusing tetrode electromagnet 10 is slightly shifted in longitudinal direction by the lateral field component of the variable electromagnet 11. This shift is then amplified with the lateral focusing tetrode electromagnet 9 (for lateral focusing and longitudinal divergence) thereby greatly shifting the orbital surface of electrons traveling in a deflecting diode electromagnet 8 is vertical direction (Y direction). Consequently, synchrotron radiation (soft X-ray) 2 traveling over a wafer 4 moves in vertical direction.

Patent Agency Ranking