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公开(公告)号:JP2004034277A
公开(公告)日:2004-02-05
申请号:JP2002198775
申请日:2002-07-08
Applicant: Unisoku Co Ltd , 株式会社ユニソク
Inventor: NAGAMURA TOSHIHIKO
IPC: B81B3/00 , B81C99/00 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q70/00 , G01Q70/12 , G01Q80/00 , B81C5/00 , G01N13/14 , G01N13/16 , G12B21/02
Abstract: PROBLEM TO BE SOLVED: To provide a device by which superfine machining applying a cantilever using a medium except electro-magnetic waves is carried out, and also to provide a method by which the cantilever provided with a micro-opening of a superfine bore is manufactured easily.
SOLUTION: A micro-machining device 1 is provided which is characterized in that a fluid 4 is made to flow out through the micro-opening 15 from the inside of a projection 13 in the device provided with a cantilever 3a having a cantilever portion 12 supported at one end, the projection 13 projectingly provided from the cantilever portion 12 and the micro-opening 15 formed penetratingly in the projection 13 in its projecting direction.
COPYRIGHT: (C)2004,JPO
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