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公开(公告)号:JPH0832650B2
公开(公告)日:1996-03-29
申请号:JP18381289
申请日:1989-07-18
IPC分类号: B01J25/02 , C07B61/00 , C07C45/00 , C07C45/62 , C07C49/04 , C07C49/16 , C07C49/213 , C07C49/223 , C07C49/233 , C07C49/235 , C07C49/237 , C07C49/327 , C07C49/567 , C07C49/80 , C07C49/807 , C07C49/813 , C07C67/00
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公开(公告)号:JPH07508737A
公开(公告)日:1995-09-28
申请号:JP50289193
申请日:1993-06-28
IPC分类号: A01N43/653 , B01J31/02 , C07C45/63 , C07C45/68 , C07C49/233 , C07D249/08 , C07D521/00
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公开(公告)号:JPH04271139A
公开(公告)日:1992-09-28
申请号:JP3114191
申请日:1991-02-27
申请人: FUJI ELECTRIC CO LTD
发明人: HOSOOKA SATORU
IPC分类号: H01L21/02 , A01N35/10 , C07C49/215 , C07C49/233 , C07C249/16 , C07C251/08 , C07C251/86 , C07C257/02 , C07C257/06 , C07C257/22 , C07C281/04 , C07C281/14 , C07C303/30 , C07C303/40 , C07C309/65 , C07C309/66 , C07C309/73 , C07C311/08 , C07C311/49 , C07C319/20 , C07C323/48 , C07C323/65 , C07F7/18 , C07F9/09 , H01L21/677 , H01L21/68
摘要: PURPOSE:To improve the throughput of a single wafer semiconductor manufacturing equipment while restraining the equipment cost, which is equipped with the atmosphere side load lock chamber delivering wafers to a carrier cassette in the atmosphere and a reaction chamber side load lock chamber including a vacuum transfer robbot. CONSTITUTION:The title equipment is constituted by using the atmosphere side load lock chamber 101 accommodating a wafer stage on which wafers before and after treatment are mounted, and a first and a second load lock chambers which include the respective vacuum transfer robbots 5. The wafers circulate in the order through the atmosphere side load lock chamber, the first load lock chamber, a reaction chamber, the second load lock chamber and the atmosphere side load lock chamber. The wafers before treatment can always be kept waiting in the first load lock chamber. Time necessary to evacuate the inside of the atmosphere side load lock chamber as required in the conventional case, in order to take out the wafers from the atmosphere side load lock chamber can be prevented from being added to the processing time in the reaction chamber.
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公开(公告)号:JPH02121944A
公开(公告)日:1990-05-09
申请号:JP27245088
申请日:1988-10-28
发明人: MUKOYAMA MITSUAKI , ISAYAMA SHIGERU , KATOU KOUJI , INOKI SATORU , YAMADA TORU , TAKAI TOSHIHIRO
IPC分类号: B01J31/22 , C07B61/00 , C07C45/34 , C07C49/04 , C07C49/175 , C07C49/213 , C07C49/233 , C07C49/255 , C07C49/303 , C07C49/327 , C07C49/35 , C07C67/29 , C07C69/716 , C07C69/78 , C07C231/12 , C07C233/76 , C07C235/72 , C07C319/20 , C07C323/22
摘要: PURPOSE:To produce ketones in high conversion ratio by reacting an olefinic compound with an oxygen-containing gas in the presence of a secondary alcohol using a cobalt complex as a catalyst. CONSTITUTION:A compound expressed by formula II (R is alkyl, aryl, cycloalkyl, etc.; R is H, alkyl, etc.) (e.g., 4-phenyl-1-butene) is oxidized with an oxygen-containing gas in the presence of a secondary alcohol using a cobalt complex expressed by formula I (R , R , R and R are H, 1-10C alkyl, substituted aryl, lower alkoxymethyl, aryl lower alkyl, etc.; R and R are H, lower alkyl, halogen, etc., except that all the R , R , R and R are CF3 and R and R are H) [e.g., bis(2,6-dimethyl-3,5-heptanedionato)cobalt(II)] to afford ketones expressed by formulas III and/IV (e.g., 4-phenyl-2-butanone).
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公开(公告)号:JPH0273033A
公开(公告)日:1990-03-13
申请号:JP18381189
申请日:1989-07-18
申请人: BAYER AG
IPC分类号: C07C45/00 , C07C45/62 , C07C45/73 , C07C45/74 , C07C45/78 , C07C45/82 , C07C49/223 , C07C49/233 , C07C49/235 , C07C67/00
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公开(公告)号:JPH0273032A
公开(公告)日:1990-03-13
申请号:JP18381289
申请日:1989-07-18
申请人: BAYER AG
IPC分类号: B01J25/02 , C07B61/00 , C07C45/00 , C07C45/62 , C07C49/04 , C07C49/16 , C07C49/213 , C07C49/223 , C07C49/233 , C07C49/235 , C07C49/237 , C07C49/327 , C07C49/567 , C07C49/80 , C07C49/807 , C07C49/813 , C07C67/00
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公开(公告)号:JPS6419033A
公开(公告)日:1989-01-23
申请号:JP17394787
申请日:1987-07-14
申请人: NIPPON KAYAKU KK
IPC分类号: C07C49/233 , C07C45/00 , C07C45/29 , C07C49/80 , C07C67/00
摘要: PURPOSE:To obtain the title compound which is a synthetic intermediate of a compound having muscle relaxant action, without problems on bad small, industrial waste and operability, by allowing a specific oxidizing agent to act on 1-(4-trifluoromethylphenyl)-1-propanol. CONSTITUTION:The subject compound is prepared by oxidizing 1-(4- trifluoromethylphenyl)-1-propanol with an oxidizing agent of the formula (M is alkali metal, alkaline earth metal; X is halogen; n is 1-3), preferably sodium hypochlorite, calcium hypochlorite, sodium hypobromite from an industrial point of view, in a solvent such as acetone at 0-50 deg.C. The amount of the oxidizing agent used is 0.8-10, preferably 1-6 equivalents based on the starting substance. If is preferred that the addition of a phosphate or acetic acid is added to effect the reaction, after the oxidizing agent is added to the starting material in the solvent.
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公开(公告)号:JPS6338338B2
公开(公告)日:1988-07-29
申请号:JP7586184
申请日:1984-04-17
申请人: UBE INDUSTRIES
发明人: ENOMYA TAKUJI , SHIRAISHI HIROSHI
IPC分类号: C07D317/54 , C07C45/00 , C07C45/65 , C07C49/20 , C07C49/213 , C07C49/233 , C07C49/245 , C07C49/255 , C07C67/00 , C07C225/22 , C07D521/00
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公开(公告)号:JPS638938B2
公开(公告)日:1988-02-25
申请号:JP15079979
申请日:1979-11-22
申请人: BAYER AG
IPC分类号: A61K31/40 , A61K31/41 , A61K31/415 , A61P31/04 , C07C29/40 , C07C33/46 , C07C49/233 , C07C49/813 , C07D233/60 , C07D249/08 , C07D521/00
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公开(公告)号:JPS612051B2
公开(公告)日:1986-01-22
申请号:JP11918577
申请日:1977-10-03
申请人: Kuraray Co
IPC分类号: C07C43/23 , C07C27/00 , C07C29/42 , C07C33/30 , C07C33/48 , C07C41/00 , C07C43/166 , C07C43/20 , C07C45/00 , C07C45/51 , C07C47/52 , C07C49/20 , C07C49/217 , C07C49/233 , C07C49/235 , C07C49/255 , C07C49/76 , C07C67/00 , C07D317/54
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