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公开(公告)号:JP4908778B2
公开(公告)日:2012-04-04
申请号:JP2005158097
申请日:2005-05-30
Applicant: キヤノン株式会社
CPC classification number: H01M4/8871 , H01M4/8605 , H01M4/8825 , H01M4/90 , H01M4/921 , H01M4/926 , H01M8/1007 , H01M2008/1095 , Y02P70/56
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公开(公告)号:JP3697257B2
公开(公告)日:2005-09-21
申请号:JP2004058674
申请日:2004-03-03
Applicant: キヤノン株式会社
CPC classification number: B82Y30/00 , B82Y10/00 , B82Y40/00 , C01B32/162 , C23C16/0281 , C23C16/26 , D01F9/1275 , H01J2201/30469 , H01J2209/0223 , Y10T428/2913
Abstract: In a method for manufacturing carbon fibers by means of a thermal CVD method through catalysts, the method capable of obtaining a uniform film thickness regardless of a growth position and a growth area on a substrate is provided. The substrate on which a catalyst layer is formed is disposed in a reaction container. An atmosphere in the reaction container is set to be a reduced pressure atmosphere including a carbon containing gas having a partial pressure of 10 Pa or less, and the substrate is heated in the atmosphere to grow carbon fibers on the catalyst layer.
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