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公开(公告)号:JP6208897B2
公开(公告)日:2017-10-04
申请号:JP2016561451
申请日:2015-10-16
Applicant: 株式会社日立製作所
Inventor: 土井 俊哉 , 堀井 滋 , 楠 敏明
IPC: H01L39/24 , C01B35/04 , C01G1/00 , H01B12/06
CPC classification number: H01F6/06 , C01B35/04 , H01F10/10 , H01F41/14 , H01L39/24 , C01P2006/40 , Y02E40/642