公开(公告)号：JP2012028438A

公开(公告)日：2012-02-09

申请号：JP2010163912

申请日：2010-07-21

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： HAYASHI MIZUE ,  MAEDA KAZUYA ,  NITTA YOSHIRO

IPC: H01L21/304

Abstract: PROBLEM TO BE SOLVED: To provide a method for making a laminated wafer into multiple sheets quite easily by an automatic process.SOLUTION: A wafer aggregate 6 made of multiple sheets of wafer laminated is immersed in water with microscopic bubbles with both surfaces of each wafer 6a facing sideways. Thus, the wafer aggregate 6 only has to be immersed in water to be made into multiple sheets. Compared to the previous technology in which a wafer is made into sheets one by one by manual labor or by using a suction pad, this method is more effective because a whole lot can be processed at once and a certain processing capacity can be kept without depending on the skills of an operator. Moreover, it is possible to reduce careless breakage or damage of the wafer 6a more greatly compared to the previous technology. Further, this method can be applied easily to the previous wafer manufacturing process and can be realized with water and inactive gas, so environmental loads can be reduced.

Abstract translation: 要解决的问题：提供一种通过自动处理非常容易地将层压晶片制成多个片材的方法。 解决方案：将由多片晶片层叠的晶片聚集体6浸入具有微小气泡的水中，每个晶片6a的两个表面朝向侧面。 因此，晶片聚集体6只需要浸入水中才能制成多个片材。 与以前的技术相比，通过人工劳动或通过使用吸盘将晶片制成片材，这种方法更有效，因为可以一次处理一大批，并且可以保持一定的处理能力而不依赖 关于操作员的技能。 此外，与以前的技术相比，可以更大幅度地减少晶片6a的粗心断裂或损坏。 此外，该方法可以容易地应用于以前的晶片制造工艺，并且可以用水和惰性气体来实现，因此可以减少环境负荷。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2014104378A

公开(公告)日：2014-06-09

申请号：JP2012257054

申请日：2012-11-26

Applicant: Air Water Inc ,  エア・ウォーター株式会社

Inventor： UMETSU JUNICHI ,  NITTA YOSHIRO ,  MORI KOICHI ,  KUNIYA SHINGO

IPC: C02F1/78 ,  B01F3/04 ,  B01F5/02 ,  B01F5/06

Abstract: PROBLEM TO BE SOLVED: To provide an effluent treatment apparatus capable of realizing the size reduction and space conservation of a facility and a significant maintenance cost reduction.SOLUTION: The provided apparatus includes a treatment tank 1 for stocking and treating an effluent and ozone feeding means for feeding an ozone gas into the effluent stocked within the treatment tank; a precipitate discharge unit 26 for precipitating and discharging a generated precipitate is configured on the bottom portion of the treatment tank; a barrier member 25 is configured within the treatment tank for zoning the latter into an upper space 15a for treatment for ozone-treating the effluent upon the reception of the ozone gas fed therein and a lower space 15b for precipitation for precipitating the generated precipitate; the barrier member not only secures a peripheral gap 25a between itself and the treatment tank inner wall but also zones the region on the inner side of the gap into the upper space for treatment and lower space for precipitation. Since pipelines, valves, etc. for transporting liquids between two tanks are dispensed with, goals of size reduction and space conservation are realized while the need for maintenance is obliterated.

Abstract translation: 要解决的问题：提供能够实现设备的尺寸减小和空间节约以及显着的维护成本降低的废水处理设备。解决方案：所提供的设备包括：处理槽1，用于储存和处理废水和臭氧进料装置 用于将臭氧气体供给储存在处理槽内的废水中; 在处理槽的底部配置有用于使生成的沉淀物析出的排出单元26， 在处理槽内配置阻挡构件25，用于将后者分配成上部空间15a，用于在接收供给的臭氧气体时对流出物进行臭氧处理，以及用于沉淀以产生沉淀物的下部空间15b; 阻挡构件不仅在其自身和处理槽内壁之间固定周边间隙25a，而且还将间隙内侧的区域分隔成上部空间用于处理和降低沉淀空间。 由于不需要在两个罐之间输送液体的管道，阀等，因此在维护的需要被消除的同时实现尺寸减小和空间节约的目标。