公开(公告)号：JPH1196953A

公开(公告)日：1999-04-09

申请号：JP25296297

申请日：1997-09-18

Applicant: HITACHI LTD

Inventor： ENDO JUNJI ,  KUBOTA SHIGEO

IPC: H01J37/20

Abstract: PROBLEM TO BE SOLVED: To achieve a wide temperature range from very low temperatures to, for example, the order of 100 K, and low coolant consumption, in the case of a device for observing a specimen in a cooled state. SOLUTION: This device has a heat shield part 3 on a specimen jogging stage 12 with a heat insulating support member 32 interposed therebetween and a specimen cooling part 21, within the heat shield part 3, incorporating a heater 23 with a heat insulating support member 22 interposed therebetween, and a liquid coolant container 4 is connected to the heat shield part 3 via highly heat-conductive members 33 while the specimen cooling part 21 is connected directly to a gaseous coolant channel 5 in a highly heat-conductive manner. Gaseous coolant 50 is led from the liquid coolant container 4 to the gaseous coolant channel 5, cools the specimen cooling part 21, and is discharged through a flow control valve 51.

公开(公告)号：JPH1140097A

公开(公告)日：1999-02-12

申请号：JP19674997

申请日：1997-07-23

Applicant: HITACHI LTD

Inventor： ENDO JUNJI ,  KUBOTA SHIGEO ,  SAITO SAKAE

IPC: H01J37/295

Abstract: PROBLEM TO BE SOLVED: To provide an electron beam interference device suitable to stripe scanning processes. SOLUTION: An electron beam interference device is adapted to rotate in whole on a biprism holder 12 about the electron optic axis as a result of a structure, where grounding electrodes 10 and one gear of a rotating mechanism 11 are joined together, a holder 2 that holds thereon a wire electrode 1 is placed between upper insulating support members 3' and lower insulating support members 3" fixed on a rotary base 7 and is then coupled thereto by the engagement of threads cut in the outer periphery of the grounding electrodes 10 and in the inner periphery of a cap 8, and a piezoelectric element (4) is fixed at its one end to the base 7 with a support part 5 and is brought into contact at the other with the periphery of the holder 2 or with one upper or lower support member 3' or 3" so as to deform the support members 3' and 3" elastically and thus vibrate the wire electrode 1 finely.

公开(公告)号：JPH0963528A

公开(公告)日：1997-03-07

申请号：JP21570195

申请日：1995-08-24

Applicant: JAPAN RES DEV CORP ,  HITACHI LTD ,  HAMAMATSU PHOTONICS KK

Inventor： OSAGABE NOBUYUKI ,  ENDO JUNJI ,  KODAMA TETSUJI ,  URAGAMI TSUNEYUKI ,  TSUCHIYA KOJI ,  OSUGA SHINJI

IPC: H01J37/22 ,  H01J37/244

Abstract: PROBLEM TO BE SOLVED: To determine precisely the exposure time to fit for a desired image part and to provide a satisfactory photographed picture, by providing a means for detecting brightness of an arbitrary part of a charged particle microscope image. SOLUTION: A charged particle beam from a charged particle source 1 irradiates, via an irradiation lens system 2, a specimen held by a specimen holding means 3, and an image formed by charged particles scatteredly transmitted by and emitted from the specimen is, via magnifying/image-forming system lenses 4, 4', converted into an optical image of the specimen on a fluorescent screen 5. A charged particle detector 6 comprizing an avalanche photodiode is installed behind a central part of the fluorescent screen 5 and charged particles thereby detected through a relatively small sized opening 5a for taking out charged particles are counted by a counter 10. An operator operates a deflecting system so that an arbitrary part of a microscope image may agree with a position of the opening 5a and a control device 13, determining appropreate exposure time from data of the counter 10, controls a shutter 11.

公开(公告)号：JPH01319236A

公开(公告)日：1989-12-25

申请号：JP14810588

申请日：1988-06-17

Applicant: HITACHI LTD

Inventor： KAWASAKI TAKESHI ,  ENDO JUNJI ,  ISAGOZAWA SHIGETO ,  TOMITA MASAHIRO ,  TONOMURA AKIRA

IPC: H01J29/48 ,  H01J37/073 ,  H01J37/145

Abstract: PURPOSE:To obtain the operability that can maintain the radiating conditions constant when the operating conditions of an electron gun are changed by providing a means to interlock the voltage. CONSTITUTION:The extracting voltage V1 is applied across a field emission electron source 5 and magnetic field type lenses 1-3 by an extracting power source 22, a current I is fed to a coil 3 by a lens power source 21. The voltage is applied to the first accelerating electrode 10 by a V2 power source 23 so that the potential as viewed from the field emission electron source 5 becomes V2. The lens power source 21 and the V2 power source 23 are interlocked with the output of the extracting power source 22 through a control circuit 24 to keep IN/V1 (N is the number of turns of the coil 3) and V2/V1 at the preset values. When V2 and I are interlocked with V1, so as to keep V2/V1 and IN/V1 at the preset values, both the electrostatic focusing action and the magnetic focusing action are not changed, a constant radiating system is obtained. When it is used for an electron microscope or the like, no realignment of the focal point is required, thus its operability is good.

公开(公告)号：JPS6378440A

公开(公告)日：1988-04-08

申请号：JP21945286

申请日：1986-09-19

Applicant: HITACHI LTD

Inventor： MIZUNO HIROYUKI ,  KOUCHI TOSHIO ,  ENDO JUNJI

IPC: H01J37/073 ,  H01J37/248

Abstract: PURPOSE:To further simplify the structure of a high-voltage power supply, reduce the cost, and improve the operability and performance by feeding the heating current to an electric field emitting cathode FE-TiP via a heating insulation transformer consisting of the primary and secondary coils installed in electromagnetic coupling on the inside and outside of an electron microscope body. CONSTITUTION:The high voltage V1 generated by the first anode power supply 17 in a relay tank 16 is applied to an electron extracting electrode 12 via a line in a cable 21. An electron beam 15 is emitted from an FE-TiP 14 and further accelerated by the high voltage applied to an accelerating electrode 13. The high voltage V0 of the accelerating electrode 13 is generated by the second anode power supply 18 and applied via the relay tank 16 through the line in the cable 21. When the FE-TiP 14 is to be heated for an extremely short time, a pulse is generated by an FE-TiP momentary heating power supply 22 and fed to the primary coil 23 of a heating transformer provided on the outside of an electron microscope body 11. The momentary voltage proportional to the number of windings is induced in the secondary coil of the heating transformer provided in the electron microscope body 11, thus the tip is heated and refreshed.

公开(公告)号：JPS6332847A

公开(公告)日：1988-02-12

申请号：JP17365286

申请日：1986-07-25

Applicant: HITACHI LTD

Inventor： ENDO JUNJI ,  TONOMURA AKIRA ,  MATSUDA TSUYOSHI ,  OSAGABE NOBUYUKI ,  KAWASAKI TAKESHI ,  HASEGAWA SHUJI

IPC: H01J37/20

Abstract: PURPOSE:To prevent a sample from being contaminated by residual gases absorbed to the sample, by making the residual gas elements such as oxygen, nitrogen, hydrogen carbide, and inert gases, all of which are not absorbed to the third cooling member cooled down to liquid-nitrogen temperature, absorbed to the second cooling member cooled down to liquid-helium temperature and then by cooling the first cooling member. CONSTITUTION:While a sample and a sample holder are kept at temperature in excess of room temperature by using a heater or the like, liquid nitrogen is first put into a liquid nitrogen container 3 to cool the third cooling member. Water and hydrogen carbide group, which exist in residual gases inside a vacuum electron microscope, are then partially absorbed to the surface of the third cooling member. Successively, liquid helium is put into a liquid-helium container 4 to cool the second cooling member, and then the other residual gas elements are absorbed to the surface of the second cooling member. After the vicinity of the sample is highly vacuumized in this way, liquid helium is put into a liquid-helium container 5 to cool the sample through the first cooling member. Hence, contamination in the process of cooling the sample can be suppressed.

公开(公告)号：JPH10199464A

公开(公告)日：1998-07-31

申请号：JP611797

申请日：1997-01-17

Applicant: HITACHI LTD

Inventor： ENDO JUNJI ,  OSAGABE NOBUYUKI

IPC: H01J37/26 ,  H01J37/295

Abstract: PROBLEM TO BE SOLVED: To provide an electronic interference measuring device which can measure an unmeasurable sample with high accuracy even under an measurable condition. SOLUTION: An electron beam byprism 22 is arranged between an inspection object sample 25 of an electron microscope or a similar device and an irradiating lens 21, and the same part of the inspection object sample 25 is irradiated by electron beams 11 and 12 divided into two pieces. This sample image is defocused in either direction on an observing surface 29, or lateral dislocation is caused by using a second electron beam biprism 24 arranged between the inspection object sample and the observing surface, and a shearing interference diagram is formed. A first or second electron beam biprism is slowly moved in a step shape so that an interference fringe shifts 1/M by 1/M of its interval, and an interference diagram is taken in a calculator 31 every its step, and the phase distribution of the electron beams passing through a sample inspection object part is calculated from interference diagrams of M sheets in total.

公开(公告)号：JPH0963530A

公开(公告)日：1997-03-07

申请号：JP21746595

申请日：1995-08-25

Applicant: JAPAN RES DEV CORP ,  HITACHI LTD ,  HAMAMATSU PHOTONICS KK

Inventor： OSAGABE NOBUYUKI ,  ENDO JUNJI ,  KODAMA TETSUJI ,  URAGAMI TSUNEYUKI ,  TSUCHIYA KOJI ,  OSUGA SHINJI

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/26

Abstract: PROBLEM TO BE SOLVED: To provide information about the motion at high speed of the structure of a sample by detecting changes in charged particles on an imaging surface at one or plural sites, and processing their signals. SOLUTION: A charged-particle beam from a charged particle source 1 illuminates a sample 3 via an illuminating lens system 2, and an image formed by the charged particles emitted while being transmitted or scattered is focused via magnifying imaging system lenses 4, 4' onto a fluorescent screen 5, where it is converted into an optical image. Two small-size openings 6, 6' are formed in the fluorescent screen 5, and charged particle detectors 7, 7' each constructed of an avalanche photodiode are installed behind the openings. If a specific structure of the sample 3 is put into motion, its image causes a time difference when passing through the two openings 6. 6'. Based on the correlation on a time base between signals which the charged particle detectors 7, 7' output, a correlator 9 calculates a time difference between the signals, and calculates the moving speed of the specific structure of the sample 3 from the time difference and the distance between the openings 6, 6'.

公开(公告)号：JPH04322015A

公开(公告)日：1992-11-12

申请号：JP8810891

申请日：1991-04-19

Applicant: HITACHI LTD

Inventor： ENDO JUNJI ,  KASAI HIROTO ,  KAWASAKI TAKESHI

IPC: H01B17/66 ,  H01J37/073 ,  H01J37/248 ,  H05H9/00

Abstract: PURPOSE:To prevent any microdischarge from developing into a big discharge by forming a contact part to become relatively negative in a salient shape while providing a groove on the salient step part in the depth direction of an electric field. CONSTITUTION:In an acceleration tube, the sectional shape of a top junction part, located on the reletively negative side, is made salient and the cylindrical insulating members 10 are soldered on a salient top surface part, a salient projection part side surface, and on the inside and the bottom surfaces of a groove. These insulating members 10, in which each one part of them is in contact with a high-voltage side conductive member and the other part of them is in contact with a low-voltage conductive member, have conductive coatings 12 while being piled up through conductive members 11. The inner diameter and the outer diameter of the member 11 are eccentric, and an acceleration electrode 3 is mounted on its vacuum inside while a discharge preventive electrode is mounted on its outside. Further, divided resistances 9 are mounted in a wide interval between this member 10 and the electrode 4 so as to impress divided acceleration voltages on respective stages of an ecceleration tube. Then, a generated microcurrent passes through a part on which an electric field in the inverse direction is imposed in order to pass the surface of the member 10 to reach the other end. Thereby, the microcurrent is prevented from developing in a big dis-charge.

公开(公告)号：JPS6465762A

公开(公告)日：1989-03-13

申请号：JP22022887

申请日：1987-09-04

Applicant: HITACHI LTD

Inventor： HASEGAWA SHUJI ,  ENDO JUNJI ,  OSAGABE NOBUYUKI ,  TONOMURA AKIRA

IPC: G01Q30/02 ,  G03H5/00 ,  H01J37/04 ,  H01J37/22 ,  H01J37/26

Abstract: PURPOSE:To form a stereophonic image with high precision and in a short time by electron beam divided into objective wave and reference waves are overlapped after the relative phase difference is varied by a specified method. CONSTITUTION:Electron beam of an electron microscope 101 is divided into an objective wave passing through a specimen 104 and other reference waves by an electron beam biprism 12, and the relative phase difference between the two waves is varied by a phase control device 13 to be superposed over an image sensing device 15. Alteration of the relative phase difference between the two waves is made by either (a) changing the magnetic flux 7 penetrating between the reference wave 5 and objective wave 6, (b) accelerating/decelerating by electric field through an electrostatic phase shifter 9 to the reference wave 5, or (c) inserting a phase shifter plate 10 to the reference wave 5. The objective wave 6 is superposed over the reference wave 5 with the relative phase difference altered specifically, and thus the phase distribution of the objective wave 6 can be measured three-dimensionally with high precision in a short time.