公开(公告)号：JP2011180159A

公开(公告)日：2011-09-15

申请号：JP2011140088

申请日：2011-06-24

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YAMAGUCHI ATSUKO ,  FUKUDA HIROSHI ,  KOMURO OSAMU ,  KAWADA HIROKI

IPC: G01B15/04 ,  G01B15/00

Abstract: PROBLEM TO BE SOLVED: To accurately and rapidly evaluate the degree of edge roughness from an SEM observation image of a fine line pattern with much noise, by calculating the contribution of the random noise of an apparatus, of a measured index of roughness, based on one image data item and calculating the degree of edge roughness actually existing in a pattern by subtracting the roughness caused by the apparatus from a measurement value of the edge roughness index. SOLUTION: A quantity (dispersion value) of a distribution of an edge position due to random noise is reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：通过计算装置的随机噪声的贡献，通过测量的粗糙度的粗糙度来准确和快速地评估来自具有大量噪声的细线图案的SEM观察图像的边缘粗糙度的程度 基于一个图像数据项，并且通过从边缘粗糙度指数的测量值减去由该装置引起的粗糙度来计算实际存在于图案中的边缘粗糙度的程度。 解决方案：当N个边缘位置数据项被平均时，由随机噪声引起的边缘位置分布的数量（色散值）在统计上减小到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2011107167A

公开(公告)日：2011-06-02

申请号：JP2011048475

申请日：2011-03-07

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YAMAGUCHI ATSUKO ,  FUKUDA HIROSHI ,  KOMURO OSAMU ,  KAWADA HIROKI

IPC: G01B15/04 ,  G01B15/00

Abstract: PROBLEM TO BE SOLVED: To provide a method and an apparatus of calculating and evaluating the level of roughness actually present in a pattern, for precisely and quickly evaluating the level of edge roughness from a SEM observation image of a fine line pattern having many noises, by calculating contribution of random noise of the apparatus on the basis of image data of one image and subtracting the roughness originated in the apparatus from a measurement value of an edge roughness index, from among the measured edge roughness indexes.
SOLUTION: A quantity (or dispersion value) of fluctuation of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined to be due to noise.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种计算和评估实际存在于图案中的粗糙度水平的方法和装置，用于从具有以下特征的细线图案的SEM观察图像精确且快速地评估边缘粗糙度的水平来精确和快速地评估： 通过根据一个图像的图像数据计算装置的随机噪声的贡献，并从测量的边缘粗糙度指标中减去来自边缘粗糙度指标的测量值的装置中产生的粗糙度的许多噪声。

解决方案：当N个边缘位置数据项被平均时，由于随机噪声引起的边缘位置的波动的量（或色散值）预期在统计上减小到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为噪声。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2009223414A

公开(公告)日：2009-10-01

申请号：JP2008064565

申请日：2008-03-13

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： TAGUCHI JUNICHI ,  IKEDA KOJI ,  KOMURO OSAMU ,  SUGIYAMA AKIYUKI

IPC: G06T7/00 ,  G01B11/00 ,  G06T1/00 ,  H01L21/66

CPC classification number: G06T7/001 ,  G06K9/6206 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: PROBLEM TO BE SOLVED: To compute a matching degree with which it is possible to correctly detect an object (it is possible to decide whether the object has been detected) even when the object corresponding region of an input image is deformed compared with the object region of a template image, or even when a noise is superimposed on the input image. SOLUTION: A matching degree computing device is configured to compare an input image with the template image of an object, and to compute a matching degree between the input image and the template image, and provided with: a deforming means for deforming the input image so as to be matched to the template object region; and a means for computing a matching degree between the deformed input image and the template image. The deforming means is provided with: a means for shaping a non-background region to the form of the template object region in the object corresponding region of the input image; and a processing means for setting the non-background region contacting with the template object corresponding region so that the non-background region has no substantial impact on the matching degree in the object non-corresponding region of the input image. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了计算即使当输入图像的对象对应区域与...相比变形时，可以正确地检测对象的匹配度（可以判定对象是否被检测到） 模板图像的对象区域，或者甚至当噪声叠加在输入图像上时。 解决方案：配对度计算装置被配置为将输入图像与对象的模板图像进行比较，并且计算输入图像和模板图像之间的匹配度，并且具有：变形装置，用于使 输入图像以便与模板对象区域匹配; 以及用于计算变形输入图像和模板图像之间的匹配度的装置。 变形装置设置有用于将非背景区域成形为输入图像的对象对应区域中的模板对象区域的形式的装置; 以及处理装置，用于设置与模板对象对应区域接触的非背景区域，使得非背景区域对输入图像的对象非对应区域中的匹配度没有实质影响。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2007212473A

公开(公告)日：2007-08-23

申请号：JP2007098324

申请日：2007-04-04

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YAMAGUCHI ATSUKO ,  OTAKA TADASHI ,  IIIZUMI TAKASHI ,  KOMURO OSAMU

IPC: G01B15/04 ,  G01B11/24 ,  G01B11/26

Abstract: PROBLEM TO BE SOLVED: To provide a pattern measuring technique capable of measuring nondestructively, accurately and quantitatively a cross-sectional shape, over from a normal taper to a reverse taper, even in any type of patterns. SOLUTION: A distribution of a reflection electron or secondary electron intensity is processed from a control system of a scanning microscope and an adjacent terminal, and a shape of an area expressing the vicinity of an edge is digitalized to calculate a tapering tendency based on a result thereof. A shape of an area in the vicinity of a pattern edge is digitized, based on an image data of a sky photograph obtained by the scanning microscope, to evaluate the tapering tendency of the cross-sectional shape. The tendency of the edge in the reverse, vertical or normal taper, or the like, can be evaluated, based only a sky observation result. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：即使在任何类型的图案中，提供一种能够以非破坏性，准确和定量的方式测量从正常锥度到反向锥度的横截面形状的图案测量技术。 解决方案：从扫描显微镜和相邻端子的控制系统处理反射电子的分布或二次电子强度，并且将表示边缘附近的区域的形状数字化以计算渐缩趋势 对其结果。 基于由扫描显微镜获得的天空照片的图像数据，将图案边缘附近的区域的形状数字化，以评估横截面形状的倾斜趋势。 可以仅基于天空观测结果来评估边缘在相反，垂直或正常锥度等中的趋势。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2005283139A

公开(公告)日：2005-10-13

申请号：JP2004092987

申请日：2004-03-26

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： SASAJIMA JIDAI ,  KIMURA YOSHIHIRO ,  KOMURO OSAMU

IPC: G01B15/00 ,  G01N23/00 ,  G01N23/225 ,  G21K7/00 ,  H01J37/28

CPC classification number: H01J37/222 ,  G01N23/225 ,  G03F7/70625 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2814

Abstract: PROBLEM TO BE SOLVED: To readily measure in distinction from local roughness, by stably measuring a line width.
SOLUTION: From a plurality of same patterns existing in a screen a mean pattern shape is calculated, and pattern information at each position and the mean pattern information are compared.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：通过稳定地测量线宽来容易地测量与局部粗糙度的区别。 解决方案：从存在于屏幕中的多个相同图案计算平均图案形状，并且比较每个位置处的图案信息和平均图案信息。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2013054908A

公开(公告)日：2013-03-21

申请号：JP2011192266

申请日：2011-09-05

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： DOI TAKASHI ,  KOMURO OSAMU ,  SHIRAI MASUMI

IPC: H01J37/147 ,  H01J37/22

Abstract: PROBLEM TO BE SOLVED: To provide a method and a device of observing or measuring a specimen at high speed with high accuracy while limiting the impact of beam diameter increase of an electron beam due to image shift.SOLUTION: When scanning a region smaller than a predetermined scanning width with an electron beam, scrolling is performed using image shift when a target irradiation position of the electron beam on a specimen is within a second range smaller than a first range capable of controlling the image shift, otherwise stage movement is performed. Since the scrolling amount can be increased by relative image shift for stage movement under conditions not affected by the beam diameter, observation and measurement of a specimen can be carried out at high speed with high accuracy.

Abstract translation: 要解决的问题：提供一种以高精度高速观察或测量试样的方法和装置，同时限制由于图像偏移引起的电子束的光束直径增大的影响。 解决方案：当利用电子束扫描小于预定扫描宽度的区域时，当试样上的电子束的目标照射位置在小于能够测量的第一范围的第二范围内时，使用图像偏移进行滚动 控制图像偏移，否则执行舞台移动。 由于可以在不受光束直径影响的条件下通过相位移动来增加滚动量，因此可以高精度地进行试样的观察和测量。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2012151053A

公开(公告)日：2012-08-09

申请号：JP2011010351

申请日：2011-01-21

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： SHIRAI MASUMI ,  KOMURO OSAMU

IPC: H01J37/22 ,  H01J37/28

CPC classification number: G06T7/0004 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/24528 ,  H01J2237/24578 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/2817 ,  H01J2237/2826

Abstract: PROBLEM TO BE SOLVED: To specify the cause simply and accurately using an SEM image when a failure occurs in the SEM image due to the influence of a magnetic field or a vibration in an apparatus or from the outside of the apparatus in a scanning electron microscope, and to obtain a measurement method where the roughness of the pattern of an SEM image has no impact on the measurement accuracy.SOLUTION: One dimensional scanning is performed in the scanning line direction (X direction) by nullifying the scanning gain in the Y direction when acquiring the SEM image, and a two-dimensional image is created by arranging the image information obtained by the scanning in the Y direction in time series. A magnetic field, a vibration, or the like, included in the image is measured by acquiring the deviation amount data of the two-dimensional image by a correlation function, and then performing frequency analysis of that data.

Abstract translation: 要解决的问题：为了在SEM图像中由于磁场或振动在设备中或从设备外部的影响而在SEM图像中简单准确地指定原因 扫描电子显微镜，并且获得SEM图像的图案的粗糙度对测量精度没有影响的测量方法。 解决方案：通过在获取SEM图像时使Y方向上的扫描增益无效地在扫描线方向（X方向）上进行一维扫描，并且通过布置由图像信息获得的图像信息来创建二维图像 按时间顺序沿Y方向扫描。 包括在图像中的磁场，振动等通过相关函数获取二维图像的偏差量数据，然后对该数据进行频率分析来测量。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2012053989A

公开(公告)日：2012-03-15

申请号：JP2010193075

申请日：2010-08-31

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： SETOGUCHI KATSUMI ,  KOMURO OSAMU

IPC: H01J37/22 ,  H01L21/027

CPC classification number: H04N7/18 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/2826

Abstract: PROBLEM TO BE SOLVED: To provide an image formation device and a computer program capable of extracting information on distortion of charged particle beam in a scanning area.SOLUTION: An image formation device integrates image data obtained by a charged particle beam device. The image formation device calculates a first information on an amount of change in the feature amount that changes according to the beam irradiation time of charged particle beam, a second information on an amount of change in the feature amount before and after the change in the beam's scanning direction, and/or a third information on a pattern displacement in a plurality of images before and after the change in the beam's scanning direction, from the plurality of images with different scanning directions in the charged particle beam device. In addition, a computer program for causing an arithmetic unit to execute the above-described processing is provided.

Abstract translation: 要解决的问题：提供一种能够提取扫描区域中带电粒子束失真的信息的图像形成装置和计算机程序。 解决方案：图像形成装置将通过带电粒子束装置获得的图像数据进行积分。 图像形成装置计算关于根据带电粒子束的束照射时间而变化的特征量的变化量的第一信息，关于束的变化前后的特征量的变化量的第二信息 扫描方向，和/或关于在束扫描方向上的变化之前和之后的多个图像中的图案位移的第三信息，从带电粒子束装置中的不同扫描方向的多个图像。 此外，提供了一种用于使算术单元执行上述处理的计算机程序。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2014016174A

公开(公告)日：2014-01-30

申请号：JP2012152008

申请日：2012-07-06

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： YAMAGUCHI SATOSHI ,  SAKAI KEI ,  INOUE OSAMU ,  HIRAO KAZUYUKI ,  KOMURO OSAMU

IPC: G01B15/00 ,  G01B15/04

CPC classification number: G01B15/00 ,  G03F7/70633 ,  H01J37/26 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/2817 ,  H01L22/12

Abstract: PROBLEM TO BE SOLVED: To provide an overlay error measurement device capable of accurately measuring an overlay error even in a case where a lower-layer pattern is disposed under a thin film and unable to secure an adequate amount of signal quantity.SOLUTION: An overlay error measurement device includes an arithmetic processing unit for measuring a pattern formed on a specimen on the basis of a signal waveform obtained by a charged particle beam device. Further, the arithmetic processing unit performs: using a partial waveform obtained on the basis of partial extraction of a signal waveform to calculate correlation therewith; forming a correlation profile 501 indicating the correlation; and measuring an overlay error using the correlation profile 501.

Abstract translation: 要解决的问题：提供即使在下层图案设置在薄膜下方并且不能确保足够量的信号量的情况下也能够精确地测量覆盖误差的覆盖误差测量装置。解决方案：覆盖层 误差测量装置包括：运算处理单元，用于根据由带电粒子束装置得到的信号波形，测量在样本上形成的图案。 此外，算术处理单元执行：使用基于信号波形的部分提取而获得的部分波形来计算与其的相关性; 形成指示相关性的相关特征501; 以及使用相关轮廓501测量重叠误差。

公开(公告)号：JP2011014299A

公开(公告)日：2011-01-20

申请号：JP2009155745

申请日：2009-06-30

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： DOI TAKASHI ,  KOMURO OSAMU

IPC: H01J37/21 ,  H01J37/09

Abstract: PROBLEM TO BE SOLVED: To provide a scanning electron microscope which realizes highly precise focus adjustment even under an observation condition with a great depth of focus.SOLUTION: A plurality of aperture holes of different diameters are formed on an aperture plate that eliminates an unnecessary area of a primary electron beam, and the aperture holes are switched to control an aperture angle of the primary electron beam that passes through the aperture holes without changing lens conditions of a converging lens and an objective lens. A condition is set to determine a resolution to be high and a depth of focus to be small. In this manner, focus adjustment precision is improved.

Abstract translation: 要解决的问题：提供一种扫描电子显微镜，即使在具有大的聚焦深度的观察条件下也能实现高精度的聚焦调节。解决方案：在孔板上形成多个不同直径的孔眼，消除不必要的区域 的一次电子束，并且孔眼被切换以控制通过孔眼的一次电子束的孔径角度，而不改变会聚透镜和物镜的透镜条件。 设置条件以确定分辨率高并且聚焦深度小。 以这种方式，改善了焦点调整精度。