MICRO ELECTROMECHANICAL DEVICE
    2.
    发明专利

    公开(公告)号:JP2000090802A

    公开(公告)日:2000-03-31

    申请号:JP25744999

    申请日:1999-09-10

    Abstract: PROBLEM TO BE SOLVED: To provide a micro electromechanical device which is operated at a low biasing voltage, and has a switching operation independent of the stiffness of a beam. SOLUTION: This device 20 is provided with two parallel interconnecting lines 24a, 24b that are respectively shielded with gaps, a base 22 having two primary control electrodes, a cantilever beam 28 that is arranged orthogonally to the interconnecting lines 24a, 24b with width between the crossing positions larger than each gap, a flexible anchor 36 for supporting this beam 28 at the center of the beam 28, secondary control electrodes 40a, 40b fixed to the lower surface of the beam facing the primary control electrodes, and contact pads 30a, 30b fixed to the lower surface of the beam facing the interconnecting lines 24a, 24b. When voltage is supplied to one corresponding to the primary control electrodes and the secondary control electrodes, the beam is moved to short-circuit the corresponding gap by one of the contact pads 30a, 30b.

    SINGLE-POLE AND SINGLE-THROW MICRO ELECTROMECHANICAL SWITCH PROVIDED WITH ACTIVE ON/OFF CONTROL FUNCTION

    公开(公告)号:JP2000057927A

    公开(公告)日:2000-02-25

    申请号:JP22132199

    申请日:1999-08-04

    Abstract: PROBLEM TO BE SOLVED: To prevent the adhesion at a contact while securing the opening condition, and to prolong the service life while improving the reliability by utilizing the repulsion Coulomb electrostatic force between a cantilever beam and a contact electrode for active turn-off condition. SOLUTION: In the case of turning on a switch 10, switches 34, 42 of a control circuit 30 are closed, and the control voltage 32 is supplied to control electrodes 14, 18 through a computing amplifier 36 so as to supply the differential voltage. When the control voltage is increased and the differential voltage reaches the threshold value, a cantilever 16 is deformed to come into contact with a contact electrode 20 to turn on the switch 10. In the case of turning off the switch 10, the control voltage 32 is reduced to zero, and after opening the switches 34, 42, the power source voltage 44 is raised so that the control electrodes 14, 18 have the same polarity and the same electrical potential, and the Coulomb force repulsing each other is thereby generated in both the electrodes 14, 18 so as to separate a beam 16 and an electrode 20 with the force larger than the adhesive force between both the elements 16, 20. With this structure, instability due to the mechanical operation is eliminated, and the turn-off operation is secured.

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