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公开(公告)号：JP5800149B2
公开(公告)日：2015-10-28
申请号：JP2011519814
申请日：2010-06-16
Applicant: JSR株式会社
IPC: G01N33/543 , G01N21/47 , G01N33/53
CPC classification number: G01N33/5047 , G01N33/54313 , G01N15/12 , G01N15/1459 , G01N2015/008 , G01N2015/1062 , G01N2015/1477 , G01N2015/1486
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