摘要:
A pyroelectric detector (200) includes a pyroelectric detection element (220), a support member (210), a fixing part (100) and a first reducing gas barrier layer (140, 280). A first side of the support member faces a cavity (102) and the pyroelectric detection element is mounted and supported on a second side opposite from the first side. An opening part (102A) communicated with the cavity is formed on a periphery of the support member in plan view from the second side of the support member. The fixing part supports the support member. The first reducing gas barrier layer covers a first surface of the support member on the first side, a side surface (211C) of the support member facing the opening part, and a part of a second surface (220A) of the support member on the second side and the pyroelectric detection element exposed as viewed from the second side of the support member.
摘要:
PROBLEM TO BE SOLVED: To provide an infrared sensor whose support part having an infrared detector is positioned at a place facing to a recess and is prevented from adhering to a bottom of the recess.SOLUTION: An infrared sensor includes: a substrate 2; an insulating film 14 which is installed on the substrate 2 and which includes a recess 15 surrounding a cavity 17; a support part 23 which is supported by a beam 22 whose one end is fixed to the substrate 2 and which is positioned at a place facing to the cavity 17; and an infrared detector 4 which is installed on the support part 23 and which detects infrared. The recess 15 is covered by a water-repellent film 16 including polysilicon, and the beam 22 and the support part 23 include a silicon nitride or a silicon carbonitride.
摘要:
PROBLEM TO BE SOLVED: To provide a pyroelectric photodetector having a structure in which reducing gas does not readily penetrate, although light is incident on a pyroelectric photodetection element, and a method for manufacturing the pyroelectric photodetector, and to provide a pyroelectric photodetection device and an electronic instrument.SOLUTION: The pyroelectric photodetector 200 includes: a pyroelectric photodetection element 200; a support member 210 for mounting the pyroelectric photodetection element; a fixing part 100 supporting the support member by arranging a cavity 102 at a position facing the pyroelectric photodetection element; an opening part 102A communicated with the cavity being formed on a periphery of the support member in plan view from the side of the pyroelectric photodetection element; and first reducing gas barrier layers 140, 280 covering a first surface of the support member, a side surface 211C of the support member facing the opening part, an outer surface 220A of the support member and the pyroelectric photo detection element exposed in plan view.
摘要:
PROBLEM TO BE SOLVED: To solve a problem wherein a protective coating dissolves quickly and can no longer provide optimum protection for an optical fiber after a short time in a conventional measuring apparatus using the optical fiber. SOLUTION: The molten metal temperature measuring apparatus supports the optical fiber directly or indirectly connected to a measuring instrument, by a support body. The immersion end of the optical fiber is led into a consumable body consumed in the molten metal. The consumable body exhibits a consumption rate of at most 10 cm/min, and the consumption rate is approximately equal to or greater than the rate at which the immersion end of the optical fiber is destroyed. COPYRIGHT: (C)2011,JPO&INPIT