스퍼터링 타겟 및 그 제조방법
    94.
    发明公开
    스퍼터링 타겟 및 그 제조방법 有权
    스퍼터링타겟및그제조방법

    公开(公告)号:KR1020130069839A

    公开(公告)日:2013-06-26

    申请号:KR1020137011409

    申请日:2012-07-06

    Abstract: Provided are: a sputtering target having superior machine workability and being able to produce a compound film primarily containing Cu and Ga; and a method for producing the sputtering target. The sputtering target has an elemental composition containing, with respect to all the metal elements in the sputtering target, 15-40 atom% of Ga and 0.1-5 atom% of Bi, the remainder comprising Cu and unavoidable impurities. The method for producing the sputtering target has a step for melting at least the elements Cu, Ga, and Bi as elemental substances or alloys containing at least two of said elements at 1050°C or higher to produce an ingot. Alternately, the method has: a step for producing a starting material powder having at least the elements Cu, Ga, and Bi as a powder of the elementary substances or of alloys containing at least two of said elements; and a step for hot working the starting material powder in a vacuum, an inert atmosphere, or a reducing atmosphere.

    Abstract translation: 本发明提供一种溅射靶,其具有优良的机械加工性并能够制造主要含有Cu和Ga的化合物膜; 以及用于制造溅射靶的方法。 溅射靶具有相对于溅射靶中的全部金属元素含有15〜40原子%的Ga和0.1〜5原子%的Bi,余量由Cu和不可避免的杂质构成的元素组成。 用于制造溅射靶的方法具有如下步骤:将至少元素Cu,Ga和Bi作为元素物质或包含至少两种所述元素的合金在1050℃或更高温度下熔化以制备锭。 可选地,该方法具有:用于制备至少具有元素Cu,Ga和Bi作为元素物质的粉末或含有至少两种所述元素的合金的原料粉末的步骤; 以及在真空,惰性气氛或还原性气氛中热处理原料粉末的步骤。

    스퍼터링 타겟 및 그 제조 방법
    100.
    发明授权
    스퍼터링 타겟 및 그 제조 방법 有权
    喷射目标及其生产工艺

    公开(公告)号:KR101099416B1

    公开(公告)日:2011-12-27

    申请号:KR1020117022659

    申请日:2010-11-04

    Abstract: 스퍼터링법에의해알맞게 Na 가첨가된 Cu-Ga 필름을형성가능한스퍼터링타겟및 그제조방법을제공하는것. 스퍼터링타겟의불소 (F) 를제외하는금속성분으로서 20 ~ 40 at% 의 Ga 및 0.05 ~ 1 at% 의 Na 가함유되고, 나머지부분은 Cu 및불가피불순물로이루어진성분조성을가지며, Na 는 NaF 화합물상태로함유되어있는스퍼터링타겟이제공된다. 또한, 스퍼터링타겟을제작하는방법은 NaF 분말과 Cu-Ga 분말과의혼합분말또는 NaF 분말, Cu-Ga 분말및 Cu 분말의혼합분말로이루어진성형체를형성하는단계; 그리고진공대기, 불활성가스대기또는환원대기중에서상기성형체를소결하는단계를포함한다.

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