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    산화이트륨 소결체 및 그 제조방법
    2.
    发明公开
    산화이트륨 소결체 및 그 제조방법 失效
    氧化钇烧结体，具有良好的耐等离子体和透明度及其制造方法。

    公开(公告)号：KR1020040074014A

    公开(公告)日：2004-08-21

    申请号：KR1020040010042

    申请日：2004-02-16

    申请人： 도시바세라믹스가부시키가이샤

    发明人： 이소무라게이이치로 ,  이케다다카유키 ,  무라타유키타카

    IPC分类号： C04B35/505

    CPC分类号： C04B35/505 ,  C04B35/62625 ,  C04B35/6263 ,  C04B35/62655 ,  C04B35/63 ,  C04B35/632 ,  C04B35/63424 ,  C04B2235/449 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/602 ,  C04B2235/6022 ,  C04B2235/6027 ,  C04B2235/604 ,  C04B2235/6582 ,  C04B2235/72 ,  C04B2235/77 ,  C04B2235/786 ,  C04B2235/96 ,  C04B2235/9653 ,  H01J37/32477

    摘要： PURPOSE: Provided is a Y2O3 sintered body which is dense and has excellent plasma-resistance and transparency and is used as a member of semiconductor processing equipment. And its manufacturing method is also provided. CONSTITUTION: The method for casting Y2O3 comprises the steps of: adding an acid to liquid containing at least a ceramic material having an average diameter of 2 micrometer or less, 99 wt% or more of Y2O3, water, a binder and a dispersant to adjust pH to 8.5-10.5; and injecting the liquid into a mold to cast. The Y2O3 sintered body is manufactured by the steps of: molding a Y2O3 material having a purity of 99 wt% or more and an average particle diameter of 2 micrometer or less; and firing the obtained molded product at a temperature ranging from 1710 deg.C to 1850 deg.C in a hydrogen atmosphere so that Y2O3 crystal having an average crystalline diameter of 10-800 micrometer is formed.

    摘要翻译： 目的：提供致密的并具有优异的耐等离子体性和透明性的Y2O3烧结体，并用作半导体加工设备的一部分。 并提供其制造方法。 构成：Y2O3铸造方法包括以下步骤：将至少含有平均粒径为2微米或更小的陶瓷材料的酸添加至Y2O3，水，粘合剂和分散剂的99重量％以上以进行调节 pH至8.5-10.5; 并将液体注入模具铸造。 通过以下步骤制造Y 2 O 3烧结体：将纯度为99重量％以上且平均粒径为2微米以下的Y 2 O 3材料成型; 在氢气氛中，在1710℃〜1850℃的温度下烧成所得成型体，形成平均结晶直径为10-800微米的Y2O3晶体。