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公开(公告)号:US20090038346A1
公开(公告)日:2009-02-12
申请号:US12248527
申请日:2008-10-09
IPC分类号: C03B37/018
CPC分类号: C03B37/01486 , C03B37/01406 , C03B37/0142 , C03B2207/36 , C03B2207/66 , C03B2207/70 , C03B2207/80
摘要: A deposition system for depositing a chemical vapor onto a workpiece, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
摘要翻译: 一种用于将化学蒸气沉积到工件上的沉积系统,包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮,用于将多个部件和工件从围绕沉积系统的空气密封,外表皮包围内皮,并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板,以及用于控制气体面板和沉积室中的部件的操作的计算机。
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公开(公告)号:US07451624B2
公开(公告)日:2008-11-18
申请号:US10981180
申请日:2004-11-04
IPC分类号: C03B37/07
CPC分类号: C03B37/01486 , C03B37/01406 , C03B37/0142 , C03B2207/36 , C03B2207/66 , C03B2207/70 , C03B2207/80
摘要: A deposition system for depositing a chemical vapor onto a workpiece is disclosed, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
摘要翻译: 公开了一种用于将化学蒸气沉积到工件上的沉积系统,包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮,用于将多个部件和工件从围绕沉积系统的空气密封,外表皮包围内皮,并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板,以及用于控制气体面板和沉积室中的部件的操作的计算机。
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公开(公告)号:US20050166641A1
公开(公告)日:2005-08-04
申请号:US11050461
申请日:2005-02-01
申请人: Arnab Sarkar , Bedros Orchanian
发明人: Arnab Sarkar , Bedros Orchanian
IPC分类号: C03B37/014 , C03B37/018
CPC分类号: C03B37/01406 , C03B37/01413 , C03B37/0142 , C03B37/0144 , C03B2207/50 , C03B2207/52 , C03B2207/64 , C03B2207/81
摘要: An outside chemical vapor deposition apparatus is disclosed for depositing porous glass-forming material onto a target rod to form a cylindrical body, with substantially higher efficiency than could prior apparatus. The apparatus includes two separate burner arrays, one array optimized for depositing the material during an initial stage of the process, when the cylindrical body has a relatively small diameter, and the other array optimized for depositing the material during a later stage of the process, when the cylindrical body has a relatively large diameter. In addition, each burner array can include a plurality of burners, with each burner azimuthally angled relative to the apparatus' air-flow axis, and with adjacent burners angled in opposite directions relative to that axis, to minimize the density gradient within the deposited porous material.
摘要翻译: 公开了用于将多孔玻璃形成材料沉积到目标棒上以形成圆柱形主体的外部化学气相沉积装置,其效率比现有装置高得多。 该装置包括两个单独的燃烧器阵列,当圆柱体具有相对较小的直径时,优选用于在该过程的初始阶段期间沉积材料的一个阵列,并且针对在该过程的稍后阶段期间沉积材料而优化的另一个阵列, 当圆柱体具有相对大的直径时。 此外,每个燃烧器阵列可以包括多个燃烧器,其中每个燃烧器相对于装置的气流轴线方位角成角度,并且具有相对于该轴线相反方向成角度的相邻燃烧器,以使沉积的多孔体内的密度梯度最小化 材料。
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公开(公告)号:US08635888B2
公开(公告)日:2014-01-28
申请号:US12248724
申请日:2008-10-09
申请人: Franklin W Dabby , Bedros Orchanian
发明人: Franklin W Dabby , Bedros Orchanian
IPC分类号: C03B37/018
CPC分类号: C03B37/01486 , C03B37/01406 , C03B37/0142 , C03B2207/36 , C03B2207/66 , C03B2207/70 , C03B2207/80
摘要: A deposition system for depositing a chemical vapor onto a workpiece is disclosed, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
摘要翻译: 公开了一种用于将化学蒸气沉积到工件上的沉积系统,包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮,用于将多个部件和工件从围绕沉积系统的空气密封,外表皮包围内皮,并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板,以及用于控制气体面板和沉积室中的部件的操作的计算机。
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公开(公告)号:US20110100064A1
公开(公告)日:2011-05-05
申请号:US11722691
申请日:2005-12-22
申请人: Arnab Sarkar , Bedros Orchanian , Heikki Ihalainen
发明人: Arnab Sarkar , Bedros Orchanian , Heikki Ihalainen
IPC分类号: C03B37/012
CPC分类号: C03B37/0124 , C03B37/0126 , C03B37/01446 , C03B37/0146 , C03B37/01473 , C03B37/01486
摘要: A multi-functional method and apparatus are disclosed for producing a low hydroxyl ion-containing core rod from a tube suitable for the production of low-water optical fibers. The method and apparatus combine the use of process steps of (1) hermetically sealing a tubular quartz handle of a tubular porous core preform to a tube used to feed the porous preform into a sintering furnace, (2) dehydration and sintering, and (3) elongation of the sintered preform under vacuum, all without exposing the preform's central aperture surface to ambient atmosphere.
摘要翻译: 公开了一种用于从适于生产低水光纤的管生产含低羟基离子的芯棒的多功能方法和装置。 该方法和装置结合使用(1)将管状多孔芯预制件的管状石英手柄气密地密封到用于将多孔预成型件进料到烧结炉中的管的工艺步骤,(2)脱水和烧结,和(3) )烧结预型体在真空下的伸长率,所有这些都不会使预成型件的中心孔表面暴露于环境气氛。
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公开(公告)号:US20050109066A1
公开(公告)日:2005-05-26
申请号:US10981180
申请日:2004-11-04
申请人: Franklin Dabby , Bedros Orchanian
发明人: Franklin Dabby , Bedros Orchanian
IPC分类号: C03B37/014 , C03B37/018
CPC分类号: C03B37/01486 , C03B37/01406 , C03B37/0142 , C03B2207/36 , C03B2207/66 , C03B2207/70 , C03B2207/80
摘要: A deposition system for depositing a chemical vapor onto a workpiece is disclosed, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
摘要翻译: 公开了一种用于将化学蒸气沉积到工件上的沉积系统,包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮,用于将多个部件和工件从围绕沉积系统的空气密封,外表皮包围内皮,并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板,以及用于控制气体面板和沉积室中的部件的操作的计算机。
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公开(公告)号:US07451623B2
公开(公告)日:2008-11-18
申请号:US10897784
申请日:2004-07-23
IPC分类号: C03B37/07
CPC分类号: C03B37/01486 , C03B37/01406 , C03B37/0142 , C03B2207/36 , C03B2207/66 , C03B2207/70 , C03B2207/80
摘要: A deposition system for depositing a chemical vapor onto a workpiece, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
摘要翻译: 一种用于将化学蒸气沉积到工件上的沉积系统,包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮,用于将多个部件和工件从围绕沉积系统的空气密封,外表皮包围内皮,并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板,以及用于控制气体面板和沉积室中的部件的操作的计算机。
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公开(公告)号:US20060162390A1
公开(公告)日:2006-07-27
申请号:US11316323
申请日:2005-12-21
申请人: Arnab Sarkar , Bedros Orchanian
发明人: Arnab Sarkar , Bedros Orchanian
IPC分类号: C03B37/10 , C03B37/012
CPC分类号: C03B37/01486 , C03B37/0146
摘要: An improved method and apparatus is disclosed for sintering large, cylindrical, porous bodies used in the manufacture of high-quality optical fiber preforms. The apparatus has a compact, simplified structure, as compared to comparable apparatus of the prior art. The apparatus includes two separate support/slide assemblies that support the porous body throughout the sintering process. A first support/slide assembly engages a special handle for the porous body during a first stage of the process, in which the body is lowered into a furnace muffle. A second support/slide assembly then engages the porous body's handle during a second stage of the process, in which the body is controllably moved through a hot zone of the furnace, for dehydration and sintering of the body into a dense glass optical fiber preform. The body's handle is specially configured to allow both support/slide assemblies to be engaged with it simultaneously, whereby the sintering process can be carried out without the need for separate support structure during the switchover from the first support/slide assembly to the second support/slide assembly.
摘要翻译: 公开了用于烧结用于制造高质量光纤预制棒的大的圆柱形多孔体的改进的方法和装置。 与现有技术的可比设备相比,该装置具有紧凑的简化结构。 该设备包括在整个烧结过程中支撑多孔体的两个单独的支撑/滑动组件。 第一支撑/滑动组件在该过程的第一阶段期间接合用于多孔体的特殊手柄,其中主体下降到炉膛中。 然后,第二支撑/滑动组件在该过程的第二阶段期间与多孔体的把手接合,其中主体被可控地移动通过炉的热区,用于将本体脱水和烧结成密实的玻璃光纤预制件。 身体的手柄被特别地构造成允许两个支撑/滑动组件同时与其接合,从而可以在从第一支撑/滑动组件切换到第二支撑/滑动组件期间不需要单独的支撑结构来执行烧结过程, 滑动组件。
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公开(公告)号:US20050000251A1
公开(公告)日:2005-01-06
申请号:US10897784
申请日:2004-07-23
申请人: Franklin Dabby , Bedros Orchanian
发明人: Franklin Dabby , Bedros Orchanian
IPC分类号: C03B37/014 , C03B19/01 , C03B37/018
CPC分类号: C03B37/01486 , C03B37/01406 , C03B37/0142 , C03B2207/36 , C03B2207/66 , C03B2207/70 , C03B2207/80
摘要: A deposition system for depositing a chemical vapor onto a workpiece, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
摘要翻译: 一种用于将化学蒸气沉积到工件上的沉积系统,包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮,用于将多个部件和工件从围绕沉积系统的空气密封,外表皮包围内皮,并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板,以及用于控制气体面板和沉积室中的部件的操作的计算机。
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公开(公告)号:US20090038543A1
公开(公告)日:2009-02-12
申请号:US12248724
申请日:2008-10-09
IPC分类号: B05C11/00
CPC分类号: C03B37/01486 , C03B37/01406 , C03B37/0142 , C03B2207/36 , C03B2207/66 , C03B2207/70 , C03B2207/80
摘要: A deposition system for depositing a chemical vapor onto a workpiece is disclosed, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
摘要翻译: 公开了一种用于将化学蒸气沉积到工件上的沉积系统,包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮,用于将多个部件和工件从围绕沉积系统的空气密封,外表皮包围内皮,并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板,以及用于控制气体面板和沉积室中的部件的操作的计算机。
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