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公开(公告)号：US11993532B2
公开(公告)日：2024-05-28
申请号：US16577045
申请日：2019-09-20
IPC分类号： C03B37/014
CPC分类号： C03B37/01486 , C03B37/0142 , C03B2207/52 , C03B2207/66 , C03B2207/70
摘要： A deposition system for depositing a chemical vapor onto a workpiece is disclosed, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The workpiece is held by a lathe that rotates the workpiece relative to chemical burners that deposit silica soot on the workpiece. The deposition system has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber. Multiple sets of chemical burners are disposed longitudinally along the length of the workpiece. Each set of burners is separated from other sets, such that each set of burners deposit silica particles onto generally different portions of a workpiece. The respective portions include an overlap segment in which one or more burners from one burner set will deposit silica particles on the same portion of the workpiece as one or more burners from another set.
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公开(公告)号：US20160060155A1
公开(公告)日：2016-03-03
申请号：US14938069
申请日：2015-11-11
申请人： j-plasma GmbH
发明人： Lothar Brehm , Frank Coriand , Wolfgang Schmidt , Ulrich Strobel
IPC分类号： C03B19/14
CPC分类号： C03B19/14 , C03B19/1407 , C03B19/1415 , C03B37/01884 , C03B2201/21 , C03B2201/23 , C03B2207/66
摘要： A method for producing rod lenses with an enveloping diameter of the rod lens face of up to 200 mm and an edge length of at least 800 mm. The method is characterized in that fabrication is performed from a cylindrical rod lens element made from synthetic quartz glass material configured as a fused silica ingot. This is performed using a flame hydrolysis method with a direct one stage deposition process of SIOx particles from a flame stream onto die that rotates and is moveable in a linear manner with respect to the flame stream.
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公开(公告)号：US07823418B2
公开(公告)日：2010-11-02
申请号：US11443062
申请日：2006-05-31
IPC分类号： C03B37/07
CPC分类号： C03B37/0142 , C03B37/01202 , C03B37/01406 , C03B37/01486 , C03B2207/36 , C03B2207/52 , C03B2207/66 , C03B2207/70
摘要： A glass base material manufacturing apparatus for manufacturing a glass base material comprising: a plurality burners, arranged in a row at a predetermined intervals along the longitudinal direction of a starting base material of the glass base material, for forming a deposit, which is a base material of the glass base material by depositing glass soot on the starting base material while moving reciprocatory over a section of the entire length of the starting base material along the longitudinal direction of the starting base material; a plurality of flow rate regulators, at least one of which is connected to the plurality of burners, respectively, for regulating a flow rate of raw material gas of the glass soot, which is supplied to the plurality of burners; and a control unit connected to each of the plurality of flow rate regulators for controlling individually the plurality of flow rate regulators.
摘要翻译： 一种用于制造玻璃基材的玻璃基材制造装置，包括：多个燃烧器，沿着玻璃基材的起始基材的长度方向以预定间隔排成一列，以形成作为基材的沉积物 通过在起始基材上沿着起始基材的整个长度的一部分沿着起始基材的长度方向往复运动而将玻璃烟灰沉积在起始基材上; 多个流量调节器，其至少一个分别连接到多个燃烧器，用于调节供给到多个燃烧器的玻璃烟炱的原料气体的流量; 以及连接到所述多个流量调节器中的每一个的控制单元，用于单独地控制所述多个流量调节器。
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公开(公告)号：US20090038346A1
公开(公告)日：2009-02-12
申请号：US12248527
申请日：2008-10-09
IPC分类号： C03B37/018
CPC分类号： C03B37/01486 , C03B37/01406 , C03B37/0142 , C03B2207/36 , C03B2207/66 , C03B2207/70 , C03B2207/80
摘要： A deposition system for depositing a chemical vapor onto a workpiece, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.
摘要翻译： 一种用于将化学蒸气沉积到工件上的沉积系统，包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮，用于将多个部件和工件从围绕沉积系统的空气密封，外表皮包围内皮，并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板，以及用于控制气体面板和沉积室中的部件的操作的计算机。
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5.发明授权Device for manufacturing a preform for optical fibers through chemical deposition 有权用于通过化学沉积制造光纤预制棒的装置公开(公告)号：US07481077B2
公开(公告)日：2009-01-27
申请号：US10481770
申请日：2002-06-12
IPC分类号： C03B37/018
CPC分类号： C03B37/0144 , C03B37/01202 , C03B37/01406 , C03B37/0142 , C03B37/01486 , C03B2207/62 , C03B2207/66 , Y02P40/57
摘要： A device including at least one gripping member, rotatably mounted about an axis Z-Z, adapted to hold at least one end of at least one elongated element for chemical vapour deposition for forming a preform. The device includes at least one burner being mobile along a direction substantially parallel to the axis Z-Z and adapted to deposit, on the elongated element, a chemical substance for forming a preform, and at least one suction element arranged on the opposite side of the burner on a portion of a wall of the device on the opposite side of the gripping member from the burner. At least one air suction member, mobile along direction Z, is provided with motion synchronous with respect to the burner. The wall with the air suction member has a pair of respective upper and lower tapes rigidly associated with the burner.
摘要翻译： 一种装置，包括至少一个夹持构件，其围绕轴线Z-Z可旋转地安装，适于保持用于化学气相沉积的至少一个细长元件的至少一端以形成预制件。 该装置包括至少一个燃烧器，其沿着基本上平行于轴线ZZ的方向移动，并且适于在细长元件上沉积用于形成预制件的化学物质，以及布置在燃烧器的相对侧上的至少一个吸入元件 在装置的壁的与夹持构件的与燃烧器相反的一侧的一部分上。 沿方向Z移动的至少一个吸气构件相对于燃烧器具有运动同步。 具有吸气构件的壁具有与燃烧器刚性相关联的一对相应的上和下带。
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公开(公告)号：USRE40586E1
公开(公告)日：2008-11-25
申请号：US11880424
申请日：2007-07-20
CPC分类号： B82Y10/00 , B82Y40/00 , C03B19/1446 , C03B19/1484 , C03B2201/42 , C03B2207/62 , C03B2207/66 , C03C3/06 , C03C4/0085 , C03C2201/42 , C03C2203/40 , G03F1/24 , G03F7/70958
摘要： Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.
摘要翻译： 公开了含有二氧化钛的二氧化硅玻璃体和具有低水平条纹的极紫外线元件。 还公开了用于制造和测量玻璃元件和极紫外元件中的条纹的方法和装置。
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公开(公告)号：US20070283721A1
公开(公告)日：2007-12-13
申请号：US11665600
申请日：2005-10-20
申请人： Tetsuya Nakanishi , Masaaki Hirano
发明人： Tetsuya Nakanishi , Masaaki Hirano
IPC分类号： C03B37/018
CPC分类号： C03B37/01823 , C03B2207/66 , Y02P40/57
摘要： Glass can be synthesized and deposited at a high rate by the inside CVD method using a plasma burner in a manner such that unconsolidated portions or bubbles are little generated. The method includes a step of depositing a glass film on the inner wall surface of a starting pipe. In a first aspect, temperature the pipe is controlled not to exceed (1800+100×d)° C., a temperature of (1100+100×d)° C. or higher being continued for 20 seconds or more at each point of the pipe, where d (mm) represents the wall thickness of the pipe. In a second aspect, the burner includes at least two inlets and has an inner diameter of 80 mm or more, and the deposition step is performed in the relationship, 150 mm/s
摘要翻译： 可以通过使用等离子体燃烧器的内部CVD方法以高速率合成和沉积玻璃，使得很少产生未固化的部分或气泡。 该方法包括在起始管的内壁表面上沉积玻璃膜的步骤。 在第一方面，管道的温度控制不超过（1800 + 100×d）℃，（1100 + 100×d）℃或更高的温度在管道的每个点处持续20秒以上，其中 d（mm）表示管道的壁厚。 在第二方面，燃烧器包括至少两个入口并且具有80mm或更大的内径，并且沉积步骤以150mm / s（引入燃烧器的气体的总流量） /（燃烧器的截面积）<600 mm / s。
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公开(公告)号：US07213416B2
公开(公告)日：2007-05-08
申请号：US10343314
申请日：2001-07-18
IPC分类号： C03B37/07 , C03B37/018
CPC分类号： C03B37/0142 , C03B37/01202 , C03B37/01406 , C03B37/01486 , C03B2207/36 , C03B2207/52 , C03B2207/66 , C03B2207/70
摘要： A glass base material manufacturing apparatus for manufacturing a glass base material comprising: a plurality burners, arranged in a row at a predetermined intervals along the longitudinal direction of a starting base material of the glass base material, for forming a deposit, which is a base material of the glass base material by depositing glass soot on the starting base material while moving reciprocatory over a section of the entire length of the starting base material along the longitudinal direction of the starting base material; a plurality of flow rate regulators, at least one of which is connected to the plurality of burners, respectively, for regulating a flow rate of raw material gas of the glass soot, which is supplied to the plurality of burners; and a control unit connected to each of the plurality of flow rate regulators for controlling individually the plurality of flow rate regulators.
摘要翻译： 一种用于制造玻璃基材的玻璃基材制造装置，包括：多个燃烧器，沿着玻璃基材的起始基材的长度方向以预定间隔排成一列，以形成作为基材的沉积物 通过在起始基材上沿着起始基材的整个长度的一部分沿着起始基材的长度方向往复运动而将玻璃烟灰沉积在起始基材上; 多个流量调节器，其至少一个分别连接到多个燃烧器，用于调节供给到多个燃烧器的玻璃烟炱的原料气体的流量; 以及连接到所述多个流量调节器中的每一个的控制单元，用于单独地控制所述多个流量调节器。
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公开(公告)号：US06837077B2
公开(公告)日：2005-01-04
申请号：US10247514
申请日：2002-09-20
申请人： Motonori Nakamura , Toshihiro Ooishi , Yuichi Ohga
发明人： Motonori Nakamura , Toshihiro Ooishi , Yuichi Ohga
IPC分类号： C03B8/04 , C03B20/00 , C03B37/014 , C03B37/018
CPC分类号： C03B37/01413 , C03B37/0142 , C03B2207/36 , C03B2207/52 , C03B2207/66 , C03B2207/70 , Y02P40/57
摘要： Three or more glass particle synthesizing burners are arranged to be opposed to a rotating glass rod. The glass rod and the glass particle synthesizing burners are reciprocated in parallel and relatively to deposit glass particles synthesized by the burners on the surface of the glass rod, thereby producing a soot body. The glass particle synthesizing conditions of the burners arranged at both ends are changed to have a greater deposition amount of glass particles per unit time in part or all of its movement range than other burners.
摘要翻译： 三个或更多个玻璃颗粒合成燃烧器被布置成与旋转的玻璃棒相对。 玻璃棒和玻璃颗粒合成燃烧器平行往复运动并相对于在玻璃棒的表面上沉积由燃烧器合成的玻璃颗粒，从而产生烟灰体。 布置在两端的燃烧器的玻璃颗粒合成条件被改变为具有比其他燃烧器的部分或全部移动范围更大的玻璃颗粒的每单位时间的沉积量。
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10.发明授权Method for producing an SiO2 blank and apparatus for performing said method 失效制造SiO 2空白的方法和用于执行所述方法的装置公开(公告)号：US06830781B2
公开(公告)日：2004-12-14
申请号：US10045441
申请日：2001-11-07
申请人： Heinz Fabian
发明人： Heinz Fabian
IPC分类号： C23C16453
CPC分类号： C03B19/1423 , C03B2207/46 , C03B2207/52 , C03B2207/62 , C03B2207/66
摘要： In a known method for producing an SiO2 blank, SiO2 particles are formed in a burner flame assigned to a deposition burner and are deposited under the effect of an electrical field on a deposition surface of a carrier rotating about its longitudinal axis, said at least one deposition burner being reciprocated in a predetermined sequence of movement along the developing blank between turn-around points. Starting from said method, in order to obtain blanks of a predetermined, in particular axially homogeneous, density and mass distribution, it is suggested according to the invention that the geometrical shape of the burner flame should be varied by the electrical field in dependence upon the position of the deposition burner during the sequence of movement. An apparatus which is suited for carrying out the method comprises a carrier which is rotatable about its longitudinal axis, a deposition burner for producing SiO2 particles in a burner flame, a drive device by means of which the deposition burner can be reciprocated along the carrier, and a pair of electrodes which is connected to a source of voltage for producing an electrical field which is operative in the area of the burner flame and which, when viewed along the path of movement of the deposition burner, is locally inhomogeneous or variable in time in dependence upon the position of the deposition burner during the sequence of movement of the deposition burner.
摘要翻译： 在用于生产SiO 2坯料的已知方法中，SiO 2颗粒在分配给沉积燃烧器的燃烧器火焰中形成，并且在电场作用下沉积在围绕其纵向轴线旋转的载体的沉积表面上，所述至少一个 沉积燃烧器沿着转向点之间的显影坯料以预定的运动顺序往复运动。 从所述方法开始，为了获得预定的，特别是轴向均匀的密度和质量分布的坯料，根据本发明，建议燃烧器火焰的几何形状应当根据电场的电场而变化 在运动顺序期间沉积燃烧器的位置。 适用于执行该方法的装置包括可围绕其纵向轴线旋转的载体，用于在燃烧器火焰中产生SiO 2颗粒的沉积燃烧器，通过沉积燃烧器可以沿着载体往复运动的驱动装置， 以及一对电极，其连接到电压源以产生在燃烧器火焰区域中操作的电场，并且当沿着沉积燃烧器的运动路径观察时，其在时间上是局部不均匀的或可变的 取决于沉积燃烧器在沉积燃烧器的运动顺序期间的位置。
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