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1.Method employing ion beams for polishing and figuring refractory dielectrics 失效
Title translation: 使用离子束进行抛光和烧蚀电介质的方法公开(公告)号:US3548189A
公开(公告)日:1970-12-15
申请号:US3548189D
申请日:1965-06-16
Applicant: ADEN B MEINEL , STANLEY BASHKIN , DONALD A LOOMIS , JOHN B SCHROEDER
Inventor: MEINEL ADEN B , BASHKIN STANLEY , LOOMIS DONALD A , SCHROEDER JOHN B
CPC classification number: C04B41/009 , C03C23/0055 , C04B41/5346 , C04B41/91 , H01J37/3005 , H01J37/3053 , C04B41/0027 , C04B35/00