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公开(公告)号:US5384817A
公开(公告)日:1995-01-24
申请号:US89832
申请日:1993-07-12
申请人: David J. Crowther , George Gutman
发明人: David J. Crowther , George Gutman
IPC分类号: G21K1/06
CPC分类号: B82Y10/00 , G21K1/062 , G21K2201/061 , G21K2201/067
摘要: X-ray dispersive elements comprise a stacked array of layer pairs of boron nitride and either nickel, tungsten, chromium, vanadium, iron, manganese, cobalt and combinations thereof. The boron nitride is preferably deposited through a planar magnetron sputtering process.
摘要翻译: X射线分散元件包括氮化硼和镍,钨,铬,钒,铁,锰,钴及其组合的层对的堆叠阵列。 氮化硼优选通过平面磁控溅射工艺沉积。