公开(公告)号：US06811612B2

公开(公告)日：2004-11-02

申请号：US10169879

申请日：2002-11-08

申请人： Dieter M. Gruen ,  Hans-Gerd Busmann ,  Eva-Maria Meyer ,  Orlando Auciello ,  Alan R. Krauss

发明人： Dieter M. Gruen ,  Hans-Gerd Busmann ,  Eva-Maria Meyer ,  Orlando Auciello ,  Alan R. Krauss

IPC分类号： C30B2304

CPC分类号： C30B33/00 ,  B81B3/0035 ,  C30B29/605

摘要： MEMS structure and a method of fabricating them from ultrananocrystalline diamond films having average grain sizes of less than about 10 nm and feature resolution of less than about one micron . The MEMS structures are made by contacting carbon dimer species with an oxide substrate forming a carbide layer on the surface onto which ultrananocrystalline diamond having average grain sizes of less than about 10 nm is deposited. Thereafter, microfabrication process are used to form a structure of predetermined shape having a feature resolution of less than about one micron.

摘要翻译： MEMS结构以及由平均晶粒尺寸小于约10nm并具有小于约1微米的特征分辨率的超晶体金刚石膜制造它们的方法。 通过使碳二聚物与在其上沉积有平均粒径小于约10nm的超微晶金刚石的表面上形成碳化物层的氧化物基底接触来制造MEMS结构。 此后，使用微细加工工艺形成具有小于约1微米的特征分辨率的预定形状的结构。