公开(公告)号：US5531874A

公开(公告)日：1996-07-02

申请号：US261170

申请日：1994-06-17

申请人： Denis J. Brophy ,  Madhav Datta ,  Derek B. Harris ,  Frank S. Ryan ,  Frank A. Spera

发明人： Denis J. Brophy ,  Madhav Datta ,  Derek B. Harris ,  Frank S. Ryan ,  Frank A. Spera

IPC分类号： C25F3/14 ,  C25F7/00 ,  H05K3/07

CPC分类号： C25F7/00 ,  H05K3/07

摘要： An electroetching tool using scanned localized application of flowing electrolyte against a workpiece such as a large area mask having high density features for the fabrication of microelectronic components. A masked molybdenum plate is suspended in a vertical direction within a tank which functions as a reservoir for a recirculating electrobyte. The electrolyte in the reservoir is filtered and pumped to a pair of travelling cathode assemblies from which the flowing electrolyte is simultaneously applied through respective charged orifices to both sides of the workpiece. The workpiece is masked on its opposite sides with mirror imaged mask apertures having corresponding opposite-sided features in registration with each other.Each orifice through which the electrolyte is applied comprises an open groove in the surface of a block of polyvinal chloride material which groove extends in a vertical direction relative to the tank. The bottom of the groove is adjacent to a conductive plate. The open top of the groove is held closely against the masked plate as the cathode assembly is moved along the guide rails. The fresh electrobyte is introduced to the groove at the upper end thereof while the used electrolyte exits from the groove at the lower end thereof and into the tank reservoir for recirculation.

摘要翻译： 一种电蚀工具，其使用流动的电解液局部应用于工件，例如具有高密度特征的大面积掩模，用于制造微电子部件。 屏蔽的钼板在用作再循环电池的储存器的罐内沿垂直方向悬挂。 将储存器中的电解质过滤并泵送到一对行进的阴极组件，通过相应的带电孔同时将流动的电解液施加到工件的两侧。 工件在其相对侧上被掩模，镜面成像的掩模孔具有彼此对准的相应的相对侧面特征。 施加电解质的每个孔包括在聚氯乙烯材料块的表面中的开槽，该槽在相对于罐的垂直方向上延伸。 槽的底部与导电板相邻。 当阴极组件沿着导轨移动时，凹槽的开口顶部紧密地保持在屏蔽板上。 新鲜的电解质在其上端被引入到槽中，而所用的电解质在其下端从槽中排出并进入储罐用于再循环。

公开(公告)号：US5614076A

公开(公告)日：1997-03-25

申请号：US608891

申请日：1996-02-29

申请人： Denis J. Brophy ,  Madhav Datta ,  Derek B. Harris ,  Frank S. Ryan ,  Frank A. Spera

发明人： Denis J. Brophy ,  Madhav Datta ,  Derek B. Harris ,  Frank S. Ryan ,  Frank A. Spera

IPC分类号： C25F3/14 ,  C25F7/00 ,  H05K3/07 ,  C25F3/02

CPC分类号： C25F7/00 ,  H05K3/07

摘要： An electroetching tool using scanned localized application of flowing electrolyte against a workpiece such as a large area mask having high density features for the fabrication of microelectronic components. A masked molybdenum plate is suspended in a vertical direction within a tank which functions as a reservoir for a recirculating electrobyte. The electrolyte in the reservoir is filtered and pumped to a pair of travelling cathode assemblies from which the flowing electrolyte is simultaneously applied through respective charged orifices to both sides of the workpiece. The workpiece is masked on its opposite sides with mirror imaged mask apertures having corresponding opposite-sided features in registration with each other.Each orifice through which the electrolyte is applied comprises an open groove in the surface of a block of polyvinal chloride material which groove extends in a vertical direction relative to the tank. The bottom of the groove is adjacent to a conductive plate. The open top of the groove is held closely against the masked plate as the cathode assembly is moved along the guide rails. The fresh electrobyte is introduced to the groove at the upper end thereof while the used electrolyte exits from the groove at the lower end thereof and into the tank reservoir for recirculation.

摘要翻译： 一种电蚀工具，其使用流动的电解液局部应用于工件，例如具有高密度特征的大面积掩模，用于制造微电子部件。 屏蔽的钼板在用作再循环电池的储存器的罐内沿垂直方向悬挂。 将储存器中的电解质过滤并泵送到一对行进的阴极组件，通过相应的带电孔同时将流动的电解液施加到工件的两侧。 工件在其相对侧上被掩模，镜面成像的掩模孔具有彼此对准的相应的相对侧面特征。 施加电解质的每个孔包括在聚氯乙烯材料块的表面中的开槽，该槽在相对于罐的垂直方向上延伸。 槽的底部与导电板相邻。 当阴极组件沿着导轨移动时，凹槽的开口顶部紧密地保持在屏蔽板上。 新鲜的电解质在其上端被引入到槽中，而所用的电解质在其下端从槽中排出并进入储罐用于再循环。