公开(公告)号：US20140063476A1

公开(公告)日：2014-03-06

申请号：US13596683

申请日：2012-08-28

申请人： Hongqian Sun ,  Jianming Zhou ,  Volodymyr Temchenko

发明人： Hongqian Sun ,  Jianming Zhou ,  Volodymyr Temchenko

IPC分类号： G03B27/52 ,  B05D5/06 ,  H01S3/04

CPC分类号： G03F7/70716 ,  G03F7/70875 ,  G03F7/7095 ,  Y10T428/24802

摘要： Disclosed are cooling apparatus and methods of cooling a template. The cooling apparatus includes a reticle and an optical cooling material. The reticle includes patterning for at least partially reflecting patterning radiation incident on a first side of the reticle. The optical cooling material is in thermally-conductive coupling with the reticle mount and is configured to produce cooling when exposed to a laser radiation. More particularly, the optical cooling material includes a glass material that exhibits anti-Stokes fluorescence that produces cooling of the glass material when exposed to an infrared laser beam. In some embodiments, the cooling apparatus may be incorporated with a reticle mount. The reticle mount is in thermally-conductive coupling with a second side of the reticle.

摘要翻译： 公开了冷却装置和冷却模板的方法。 冷却装置包括掩模版和光学冷却材料。 掩模版包括图案化以至少部分地反射入射在掩模版的第一侧上的图案化辐射。 光学冷却材料与掩模版安装座导热耦合，并且被配置为当暴露于激光辐射时产生冷却。 更具体地，光学冷却材料包括表现出反斯托克斯荧光的玻璃材料，其在暴露于红外激光束时产生玻璃材料的冷却。 在一些实施例中，冷却装置可以与掩模版安装件结合。 标线架安装件与标线片的第二面进行导热耦合。

公开(公告)号：US09454090B2

公开(公告)日：2016-09-27

申请号：US13596683

申请日：2012-08-28

申请人： Hongqian Sun ,  Jianming Zhou ,  Volodymyr Temchenko

发明人： Hongqian Sun ,  Jianming Zhou ,  Volodymyr Temchenko

IPC分类号： G03B27/42 ,  G03B27/52 ,  G03F7/20

CPC分类号： G03F7/70716 ,  G03F7/70875 ,  G03F7/7095 ,  Y10T428/24802

摘要： Disclosed are cooling apparatus and methods of cooling a template. The cooling apparatus includes a reticle and an optical cooling material. The reticle includes patterning for at least partially reflecting patterning radiation incident on a first side of the reticle. The optical cooling material is in thermally-conductive coupling with the reticle mount and is configured to produce cooling when exposed to a laser radiation. More particularly, the optical cooling material includes a glass material that exhibits anti-Stokes fluorescence that produces cooling of the glass material when exposed to an infrared laser beam. In some embodiments, the cooling apparatus may be incorporated with a reticle mount. The reticle mount is in thermally-conductive coupling with a second side of the reticle.

摘要翻译： 公开了冷却装置和冷却模板的方法。 冷却装置包括掩模版和光学冷却材料。 掩模版包括图案化以至少部分地反射入射在掩模版的第一侧上的图案化辐射。 光学冷却材料与掩模版安装座导热耦合，并且被配置为当暴露于激光辐射时产生冷却。 更具体地，光学冷却材料包括表现出反斯托克斯荧光的玻璃材料，其在暴露于红外激光束时产生玻璃材料的冷却。 在一些实施例中，冷却装置可以与掩模版安装件结合。 标线架安装件与标线片的第二面进行导热耦合。