公开(公告)号：US20090283131A1

公开(公告)日：2009-11-19

申请号：US12508961

申请日：2009-07-24

申请人： Katsumi KUSHIYA ,  Muneyori TACHIYUKI

发明人： Katsumi KUSHIYA ,  Muneyori TACHIYUKI

IPC分类号： H01L31/042

CPC分类号： H01L31/022425 ,  H01L31/0322 ,  H01L31/0392 ,  H01L31/03923 ,  H01L31/046 ,  H01L31/0463 ,  H01L31/0749 ,  Y02E10/541 ,  Y02P70/521

摘要： A problem of the invention is to prevent a substrate from being damaged with a metal stylus upon mechanical patterning.In the invention, a thin film obtained by accumulating in this order a substrate 2, a back surface electrode layer 3, a multi-element compound semiconductor thin film (light absorbing layer) 5, a transparent buffer layer 6 having a high resistance and a transparent and electroconductive window layer 7 is divided into respective unit cells, which are connected plurally in series to obtain a prescribed voltage, and it contains patterning P1 of dividing the back surface electrode layer 3, patterning P2 of dividing the light absorbing layer 5, or the light absorbing layer and the buffer layer 6, and patterning P3 of dividing from the window layer 7 up to the light absorbing layer 5, in which in P2 and P3, an ultrathin film layer 4 formed secondarily through reaction with a chalcogen element on the surface of the back surface electrode layer 3 in the formation step of the light absorbing layer is used as a solid lubricant upon mechanically removing the constitutional thin film layers with a metal stylus to form grooves.

摘要翻译： 本发明的一个问题是防止在机械图案化时用金属触笔损坏基板。 在本发明中，通过依次堆积基板2，背面电极层3，多元素化合物半导体薄膜（光吸收层）5，具有高电阻的透明缓冲层6和 透明导电窗口层7被分成多个串联连接以获得规定电压的单元电池，并且包含划分背面电极层3的图案化图案化P1，划分光吸收层5的图案化P2，或 光吸收层和缓冲层6，以及将从窗口层7分割到光吸收层5的图案化P3，其中在P2和P3中，通过与硫化物层上的硫属元素反应而二次形成的超薄膜层4 在光吸收层的形成步骤中的背面电极层3的表面作为固体润滑剂用于机械地除去构成薄膜层时 金属触针形成凹槽。

公开(公告)号：US06048442A

公开(公告)日：2000-04-11

申请号：US841688

申请日：1997-04-30

申请人： Katsumi Kushiya ,  Muneyori Tachiyuki ,  Takahisa Kase

发明人： Katsumi Kushiya ,  Muneyori Tachiyuki ,  Takahisa Kase

IPC分类号： H01L31/04 ,  C23C14/34 ,  H01L31/032 ,  H01L31/0336 ,  H01L31/18

CPC分类号： H01L31/0749 ,  H01L31/0322 ,  H01L31/1876 ,  Y02E10/541 ,  Y02P70/521

摘要： A thin-film light absorbing layer which is regulated so as to have any desired gallium concentration and which is capable of attaining a high open-circuit voltage is formed by a simple method at a temperature lower than the softening point of the soda-lime float glass. A light absorbing layer is formed by forming a back electrode on a soda-lime float glass substrate, forming on the back electrode layer a stacked precursor film including a copper-gallium alloy layer and an indium layer by sputtering, and then heating the precursor film in an atmosphere of selenium and/or sulfur.

摘要翻译： 通过简单的方法在低于钠钙浮渣的软化点的温度下形成被调节为具有任何期望的镓浓度并且能够获得高开路电压的薄膜光吸收层 玻璃。 通过在钠钙浮法玻璃基板上形成背面电极形成光吸收层，通过溅射在背面电极层上形成包含铜 - 镓合金层和铟层的叠层前体膜，然后加热前体膜 在硒和/或硫的气氛中。

公开(公告)号：US6092669A

公开(公告)日：2000-07-25

申请号：US274311

申请日：1999-03-23

申请人： Katsumi Kushiya ,  Muneyori Tachiyuki ,  Takahisa Kase

发明人： Katsumi Kushiya ,  Muneyori Tachiyuki ,  Takahisa Kase

IPC分类号： H01L31/04 ,  C23C14/34 ,  H01L31/032 ,  H01L31/0336 ,  H01L31/18

CPC分类号： H01L31/0749 ,  H01L31/0322 ,  H01L31/1876 ,  Y02E10/541 ,  Y02P70/521

摘要： A thin-film light absorbing layer which is regulated so as to have any desired gallium concentration and which is capable of attaining a high open-circuit voltage is formed by a simple method at a temperature lower than the softening point of the soda-lime float glass. A light absorbing layer is formed by forming a back electrode on a soda-lime float glass substrate, forming on the back electrode layer a stacked precursor film including a copper-gallium alloy layer and an indium layer by sputtering, and then heating the precursor film in an atmosphere of selenium and/or sulfur.

摘要翻译： 通过简单的方法在低于钠钙浮渣的软化点的温度下形成被调节为具有任何期望的镓浓度并且能够获得高开路电压的薄膜光吸收层 玻璃。 通过在钠钙浮法玻璃基板上形成背面电极形成光吸收层，通过溅射在背面电极层上形成包含铜 - 镓合金层和铟层的叠层前体膜，然后加热前体膜 在硒和/或硫的气氛中。

公开(公告)号：US20070163646A1

公开(公告)日：2007-07-19

申请号：US10584286

申请日：2004-12-22

申请人： Katsumi Kushiya ,  Muneyori Tachiyuki

发明人： Katsumi Kushiya ,  Muneyori Tachiyuki

IPC分类号： H01L31/00

CPC分类号： H01L31/022425 ,  H01L31/0322 ,  H01L31/0392 ,  H01L31/03923 ,  H01L31/046 ,  H01L31/0463 ,  H01L31/0749 ,  Y02E10/541 ,  Y02P70/521

摘要： A problem of the invention is to prevent a substrate from being damaged with a metal stylus upon mechanical patterning. In the invention, a thin film obtained by accumulating in this order a substrate 2, a back surface electrode layer 3, a multi-element compound semiconductor thin film (light absorbing layer) 5, a transparent buffer layer 6 having a high resistance and a transparent and electroconductive window layer 7 is divided into respective unit cells, which are connected plurally in series to obtain a prescribed voltage, and it contains patterning P1 of dividing the back surface electrode layer 3, patterning P2 of dividing the light absorbing layer 5, or the light absorbing layer and the buffer layer 6, and patterning P3 of dividing from the window layer 7 up to the light absorbing layer 5, in which in P2 and P3, an ultrathin film layer 4 formed secondarily through reaction with a chalcogen element on the surface of the back surface electrode layer 3 in the formation step of the light absorbing layer is used as a solid lubricant upon mechanically removing the constitutional thin film layers with a metal stylus to form grooves.

摘要翻译： 本发明的一个问题是防止在机械图案化时用金属触笔损坏基板。 在本发明中，通过依次堆积基板2，背面电极层3，多元素化合物半导体薄膜（光吸收层）5，具有高电阻的透明缓冲层6和 透明导电窗层7被分成多个串联连接以获得规定电压的各个单电池，并且包含划分背面电极层3的图案化P 1，将光吸收层5分割成图案化P 2 ，或者光吸收层和缓冲层6，以及将从窗口层7分割到光吸收层5的图案化P 3，其中在P 2和P 3中，通过与第二次反应形成的超薄膜层4 在光吸收层的形成步骤中，背面电极层3的表面上的硫属元素作为固体润滑剂用于机械地除去构成薄膜 具有金属触笔的层以形成凹槽。

公开(公告)号：US5981868A

公开(公告)日：1999-11-09

申请号：US841690

申请日：1997-04-30

申请人： Katsumi Kushiya ,  Muneyori Tachiyuki ,  Takahisa Kase

发明人： Katsumi Kushiya ,  Muneyori Tachiyuki ,  Takahisa Kase

IPC分类号： C23C14/06 ,  H01L31/032 ,  H01L31/0336 ,  H01L31/04

CPC分类号： H01L31/0749 ,  H01L31/0322 ,  Y02E10/541

摘要： A solar cell with a heightened open-circuit voltage and improved junction quality of the interface between an interfacial layer (or buffer layer) and a thin-film light absorbing layer is disclosed. A thin-film solar cell is fabricated on a glass substrate and includes a metallic back electrode, a light absorbing layer, an interfacial layer, a window layer, and an upper electrode. The solar cell is characterized by the light absorbing layer. The light absorbing layer is a thin film of p-type Cu(InGa)Se.sub.2 (CIGS) of the Cu-III-VI.sub.2 chalcopyrite structure and has such a gallium concentration gradient that the gallium concentration gradually (gradationally) increases from the surface thereof to the inside, thereby attaining a heightened open-circuit voltage. The light absorbing layer has on its surface an ultrathin-film surface layer of Cu(InGa)(SeS).sub.2 (CIGSS), which has such a sulfur concentration gradient that the sulfur concentration abruptly decreases from the surface thereof (i.e., from the interfacial layer side) to the inside, thereby improving interfacial junction characteristics.

摘要翻译： 公开了具有提高的开路电压和改善界面层（或缓冲层）和薄膜光吸收层之间界面的结合质量的太阳能电池。 在玻璃基板上制造薄膜太阳能电池，包括金属背电极，光吸收层，界面层，窗口层和上电极。 太阳能电池的特征在于光吸收层。 光吸收层是Cu-III-VI2黄铜矿结构的p型Cu（InGa）Se2（CIGS）的薄膜，具有镓浓度逐渐（渐变）从其表面增加到镓浓度梯度 从而达到提高的开路电压。 光吸收层在其表面上具有Cu（InGa）（SeS）2（CIGSS）的超薄膜表面层，其具有这样的硫浓度梯度，使得硫浓度从其表面突然降低（即，从界面 层侧）到内部，从而改善界面接合特性。