公开(公告)号：US08414962B2

公开(公告)日：2013-04-09

申请号：US11262524

申请日：2005-10-28

Applicant: Susan Trolier McKinstry ,  Clive A. Randall ,  Hajime Nagata ,  Pascal I. Pinceloup ,  James J. Beeson ,  Daniel J. Skamser ,  Michael S. Randall ,  Azizuddin Tajuddin

Inventor： Susan Trolier McKinstry ,  Clive A. Randall ,  Hajime Nagata ,  Pascal I. Pinceloup ,  James J. Beeson ,  Daniel J. Skamser ,  Michael S. Randall ,  Azizuddin Tajuddin

IPC: B05D5/12

CPC classification number: H01G4/33 ,  H01G4/1227 ,  H01G4/306

Abstract: The invention relates to thin film single layers, electronic components such as multilayer capacitors which utilize thin film layers, and to their methods of manufacture. Chemical solution deposition and microcontact printing of dielectric and electrode layers are disclosed. High permittivity BaTiO3 multilayer thin film capacitors are prepared on Ni foil substrates by microcontact printing and by chemical solution deposition. Multilayer capacitors with BaTiO3 dielectric layers and LaNiO3 internal electrodes are prepared, enabling dielectric layer thicknesses of 1 μm or less. Microcontact printing of precursor solutions of the dielectric and electrode layers is used.

Abstract translation: 本发明涉及薄膜单层，电子部件如利用薄膜层的多层电容器及其制造方法。 公开了介电层和电极层的化学溶液沉积和微接触印刷。 高介电常数BaTiO3多层薄膜电容器通过微接触印刷和化学溶液沉积在Ni箔基板上制备。 制备具有BaTiO3电介质层和LaNiO3内部电极的多层电容器，使电介质层的厚度为1μm以下。 使用介电层和电极层的前体溶液的微接触印刷。