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1.发明授权Device and method for stacking and/or conveying a plurality of flat substrates 失效用于堆叠和/或输送多个平坦基板的装置和方法公开(公告)号：US08337134B2
公开(公告)日：2012-12-25
申请号：US13305198
申请日：2011-11-28
申请人： Reiner Greber , Marijan Strugar , Thomas Schultze
发明人： Reiner Greber , Marijan Strugar , Thomas Schultze
CPC分类号： B65G59/04 , B65G59/045 , B65G2201/0297 , H01L21/67303 , H01L21/67781
摘要： A device for stacking a plurality of silicon wafers has an upright machine carrier for holding a plurality of silicon wafers, the silicon wafers being provided in a horizontal position in the machine carrier. The device has three identical loading cassettes for introducing several silicon wafers therein. The machine carrier has holding devices for the loading cassettes. The loading cassettes have a lower support surface for putting silicon wafers on in stack-like fashion, and a rear side wall running substantially perpendicular thereto. The loading cassette is designed in such a way that the side opposite the rear side wall, and the top side are freely accessible.
摘要翻译： 用于堆叠多个硅晶片的装置具有用于保持多个硅晶片的直立机器载体，所述硅晶片在机器载体中处于水平位置。 该装置具有用于在其中引入几个硅晶片的三个相同的加载盒。 机载机具有用于装载盒的保持装置。 装载盒具有用于将硅晶片以堆叠状的方式放置的下支撑表面，以及基本上垂直于其的后侧壁。 装载盒被设计成使得与后侧壁相对的一侧和顶侧可自由接近。
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2.发明申请Device and Method for Stacking and/or Conveying a Plurality of Flat Substrates 失效用于堆叠和/或输送多个扁平衬底的装置和方法公开(公告)号：US20120082538A1
公开(公告)日：2012-04-05
申请号：US13305198
申请日：2011-11-28
申请人： Reiner Greber , Marijan Strugar , Thomas Schultze
发明人： Reiner Greber , Marijan Strugar , Thomas Schultze
CPC分类号： B65G59/04 , B65G59/045 , B65G2201/0297 , H01L21/67303 , H01L21/67781
摘要： A device for stacking a plurality of silicon wafers has an upright machine carrier for holding a plurality of silicon wafers, the silicon wafers being provided in a horizontal position in the machine carrier. The device has three identical loading cassettes for introducing several silicon wafers therein. The machine carrier has holding devices for the loading cassettes. The loading cassettes have a lower support surface for putting silicon wafers on in stack-like fashion, and a rear side wall running substantially perpendicular thereto. The loading cassette is designed in such a way that the side opposite the rear side wall, and the top side are freely accessible.
摘要翻译： 用于堆叠多个硅晶片的装置具有用于保持多个硅晶片的直立机器载体，所述硅晶片在机器载体中处于水平位置。 该装置具有用于在其中引入几个硅晶片的三个相同的加载盒。 机载机具有用于装载盒的保持装置。 装载盒具有用于将硅晶片以堆叠状的方式放置的下支撑表面，以及基本上垂直于其的后侧壁。 装载盒被设计成使得与后侧壁相对的一侧和顶侧可自由接近。
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