公开(公告)号：US20080314564A1

公开(公告)日：2008-12-25

申请号：US12110225

申请日：2008-04-25

申请人： Kazuya NAGASEKI ,  Yoshiyuki KOBAYASHI ,  Koichi MURAKAMI ,  Ryo NONAKA ,  Yoshihisa SUDOH ,  Hiroshi ITAFUJI ,  Norio KOKUBO

发明人： Kazuya NAGASEKI ,  Yoshiyuki KOBAYASHI ,  Koichi MURAKAMI ,  Ryo NONAKA ,  Yoshihisa SUDOH ,  Hiroshi ITAFUJI ,  Norio KOKUBO

IPC分类号： F28D15/00

CPC分类号： G05D23/19

摘要： A temperature control device controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object. The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and adjustment means that adjust a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit via a confluence unit that combines these flows. The adjustment means are provided on a downstream side of each of the heating pathway, the cooling pathway, and the bypass pathway and on the upstream side of the confluence unit.

摘要翻译： 温度控制装置通过在布置在受控对象附近的温度调节单元中循环流体来控制受控物体的温度。 温度控制装置包括加热和循环温度调节单元中的流体的加热通道，使温度调节单元中的流体冷却和循环的冷却通道，不通过流体通过加热通道和冷却的旁路通路 使温度调节单元中的流体循环，以及调节装置，其通过组合这些流量的汇流单元，将从加热通路，冷却通路和旁路通路供给的流体的流量比调整到温度调节单元 。 调节装置设置在每个加热通道，冷却通道和旁路通路的下游侧以及汇流单元的上游侧。

公开(公告)号：US06913031B2

公开(公告)日：2005-07-05

申请号：US10491955

申请日：2002-10-16

申请人： Tokuhide Nawata ,  Yoshihisa Sudoh ,  Masayuki Kouketsu ,  Masayuki Watanabe ,  Hiroki Doi

发明人： Tokuhide Nawata ,  Yoshihisa Sudoh ,  Masayuki Kouketsu ,  Masayuki Watanabe ,  Hiroki Doi

IPC分类号： G05D7/06

CPC分类号： G05D7/0647 ,  G05D7/0635 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86421

摘要： A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve (12) and, after that, opening/closing operation of a second cutoff valve (17)) is repeated. Simultaneously, a volume flow Q of process gas exhausted from the second cutoff valve (17) per unit time on the basis of after-filling pressure and after-exhaust pressure of the process gas in a gas filling capacity (13) measure by a pressure sensor (14). Furthermore, a mode of the pulse shot is changed to control the volume flow Q of the process gas exhausted from the second cutoff valve (17) per unit time.

摘要翻译： 流量控制器和流量控制方法适用于通过使用称为脉冲射击型的新颖型式从常规限制中解除。 重复脉冲（第一截止阀（12）的打开/关闭操作），之后，重新开启第二截止阀（17）的打开/关闭操作。 同时，基于填充气体（13）中的处理气体的补充压力和排气后压力，单位时间内从第二截止阀（17）排出的处理气体的体积流量Q通过压力 传感器（14）。 此外，改变脉冲射击的模式，以控制每单位时间从第二截止阀（17）排出的处理气体的体积流量Q。