PARTIAL LASER ABLATION SENSOR PROCESS
    1.
    发明申请
    PARTIAL LASER ABLATION SENSOR PROCESS 有权
    部分激光雷达传感器过程

    公开(公告)号:US20130228442A1

    公开(公告)日:2013-09-05

    申请号:US13784749

    申请日:2013-03-04

    Applicant: APPLE INC.

    Abstract: Processes for fabricating compact touch sensors for touch sensitive devices are disclosed. A process can include providing a touch sensor structure having a substrate, a first layer disposed on the substrate, and a second layer disposed on the first layer. The second layer can have an ablation fluence value that is lower than an ablation fluence value of the first layer. The process can include patterning the second layer with a laser emitting energy having a fluence value greater than or equal to the ablation fluence value of the second layer and less than the ablation fluence value of the first layer. The process can further include etching at least a portion of the first layer that was exposed during the patterning of the second layer. At least a portion of the second layer can then be removed by etching or laser ablation.

    Abstract translation: 公开了用于制造用于触敏装置的紧凑型触摸传感器的方法。 一种方法可以包括提供具有基底的触摸传感器结构,设置在基底上的第一层和设置在第一层上的第二层。 第二层可以具有低于第一层的消融注量值的消融注量值。 该方法可以包括用激光发射第二层的图案,所述激光发射能量大于或等于第二层的消融注量值,并小于第一层的消融注量值。 该方法还可以包括蚀刻在第二层的图案化期间暴露的第一层的至少一部分。 然后可以通过蚀刻或激光烧蚀来去除第二层的至少一部分。

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