公开(公告)号：US10452039B2

公开(公告)日：2019-10-22

申请号：US15663068

申请日：2017-07-28

Applicant: APPLIED MATERIALS, INC.

Inventor： Daniel O. Clark ,  Youssef A. Loldj ,  Shaun W. Crawford ,  Maxime Cayer ,  Tony H. Tong ,  Eric Rieske

IPC: G05B15/02 ,  G05B23/02

Abstract: Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.

公开(公告)号：US09740182B2

公开(公告)日：2017-08-22

申请号：US13895978

申请日：2013-05-16

Applicant: APPLIED MATERIALS, INC.

Inventor： Daniel O. Clark ,  Youssef A. Loldj ,  Shaun W. Crawford ,  Maxime Cayer ,  Tony H. Tong ,  Eric Rieske

IPC: G05B15/02 ,  G05B23/02

CPC classification number: G05B15/02 ,  G05B23/0291 ,  Y02P90/14 ,  Y02P90/86

Abstract: Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.