公开(公告)号：US20170173521A1

公开(公告)日：2017-06-22

申请号：US15449226

申请日：2017-03-03

Applicant: APPLIED MATERIALS, INC.

Inventor： Colin John DICKINSON ,  Mehran MOALEM ,  Daniel O. CLARK

IPC: B01D53/32 ,  C23C16/44

Abstract: Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas and a reagent gas into an exhaust conduit of a substrate processing system; injecting a non-reactive gas into the exhaust conduit to maintain a desired pressure in the exhaust conduit for conversion of the exhaust gas; and forming a plasma from the exhaust gas and reagent gas, subsequent to injecting the non-reactive gas, to convert the exhaust gas to abatable byproduct gases.

公开(公告)号：US20250118538A1

公开(公告)日：2025-04-10

申请号：US18896265

申请日：2024-09-25

Applicant: Applied Materials, Inc.

Inventor： Kartik RAMASWAMY ,  Mehran MOALEM ,  Farhad MOGHADAM ,  Eller Y. JUCO

IPC: H01J37/32

Abstract: Some embodiments are directed to a remote plasma system. The remote plasma system may include: a first tube; a second tube; a first isolation component coupled between a first end of the first tube and a first end of the second tube; a second isolation component coupled between a second end of the first tube and a second end of the second tube; and a first capacitive element coupled to the first isolation component.