公开(公告)号：US20240112946A1

公开(公告)日：2024-04-04

申请号：US18476067

申请日：2023-09-27

Applicant: ASM IP Holding, B.V.

Inventor： Bradley Wayne Evans ,  Shujin Huang ,  Junwei Su ,  Loc Tran ,  Xing Lin ,  Alexandros Demos

IPC: H01L21/687 ,  C23C16/458

CPC classification number: H01L21/68742 ,  C23C16/4585

Abstract: A lift pin actuator includes a castellated annulus, a first arm, a second arm, and a pin pad. The annulus arranged along a rotation axis and has a first merlon and a second merlon circumferentially separated by a crenel. The first arm is connected to the first merlon and extends outward from the annulus, the second arm is connected to the second merlon and extends outward from the annulus, and the second arm is circumferentially spaced from the first arm by a radial gap. The pin pad is connected to the annulus by the first arm and the second arm, is radially spaced from the annulus by the radial gap, and radially overlaps the crenel to nest a support member within the lift pin actuator during translation of the lift pin actuator along the rotation axis relative to the support member. Process kits, semiconductor processing systems, methods of making lift pin actuators and related material layer deposition methods are also described.