公开(公告)号：US12237195B2

公开(公告)日：2025-02-25

申请号：US17810748

申请日：2022-07-05

Applicant: ASM IP Holding B.V

Inventor： Theodorus G. M. Oosterlaken ,  Maarten Hendrikus Maria Lamers ,  Nimit Kothari ,  Chaggai Shmuel Ganani

IPC: H01L21/677

Abstract: Cassette lid opening device for a semiconductor substrate processing apparatus comprising a housing, a door assembly, a transport mechanism, and at least one suspension. The housing has at least one wall with an associated wall opening. The door assembly comprises at least one door plate configured for substantially closing off the associated wall opening of the at least one wall. The transport mechanism includes a carriage which is connected to the door assembly and configured to transport the door assembly parallel to the at least one wall. The at least one suspension is arranged between the at least one door plate and the transport mechanism. The at least one suspension comprises a suspension spring assembly which allows movement of the at least one door plate in a direction perpendicular to the at least one wall.

公开(公告)号：US20230012302A1

公开(公告)日：2023-01-12

申请号：US17810748

申请日：2022-07-05

Applicant: ASM IP Holding B.V

Inventor： Theodorus G.M. Oosterlaken ,  Maarten Hendrikus Maria Lamers ,  Nimit Kothari ,  Chaggai Shmuel Ganani

IPC: H01L21/677

Abstract: Cassette lid opening device for a semiconductor substrate processing apparatus comprising a housing, a door assembly, a transport mechanism, and at least one suspension. The housing has at least one wall with an associated wall opening. The door assembly comprises at least one door plate configured for substantially closing off the associated wall opening of the at least one wall. The transport mechanism includes a carriage which is connected to the door assembly and configured to transport the door assembly parallel to the at least one wall. The at least one suspension is arranged between the at least one door plate and the transport mechanism. The at least one suspension comprises a suspension spring assembly which allows movement of the at least one door plate in a direction perpendicular to the at least one wall.

公开(公告)号：US20210384046A1

公开(公告)日：2021-12-09

申请号：US17336494

申请日：2021-06-02

Applicant: ASM IP Holding B.V.

Inventor： Gijsbert Hendrik Ronner ,  Christianus G.M. de Ridder ,  Theodorus G.M. Oosterlaken ,  Klaas P. Boonstra ,  Jeroen de Jonge ,  Lucian Jdira ,  Chaggai Shmuel Ganani

IPC: H01L21/67 ,  B65G47/90

Abstract: The disclosure relates to a substrate processing apparatus for processing a plurality of substrates. The apparatus comprising a reactor mounted in the apparatus and configured for processing substrates and a reactor mover for moving the reactor for maintenance. The reactor mover is constructed and arranged with a lift to move the reactor to a lower height to allow for access to the reactor by a maintenance worker.